Methods for the manufacture of extreme ultraviolet (EUV) mask blanks and production systems therefor are disclosed. A method for forming an EUV mask blank comprises forming a bilayer on a portion of a multi-cathode PVD chamber interior and then forming a multilayer stack of Si/Mo on a substrate in the multi-cathode PVD chamber.

According to at least one feature of the present disclosure, a method of forming an optical element, includes: Depositing an aluminum layer atop a glass substrate via a physical deposition process; depositing a first fluorine containing layer atop the aluminum layer via a physical deposition process; depositing a second fluorine containing layer atop the first fluorine containing layer via a physical deposition process; and depositing a third fluorine containing layer atop the first fluorine containing layer via an atomic layer deposition process.

The present disclosure provides a multilayer coated cutting material having increased wear resistance at high temperatures, a method for manufacturing the same, and a cutting tool insert for mechanical machining including the same. According to an embodiment of the present disclosure, the multilayer coated cutting material includes a cemented carbide, cermet, ceramic, a cubic crystal boron nitride-based material or a hard alloy body of high-speed steel, and a cutting layer positioned on the base material and configured in multiple layers.

A method of making a multi-layer coating on a substrate is provided and involves applying a mirror coating to a substrate then spraying a silicate topcoat onto the mirror coating. Applying the mirror coating can involve applying a reflective material to the substrate to form a reflective layer and applying an oxide layer to the reflective layer to form the mirror coating. The oxide layer can be made of one or more oxide layers, and each of the one or more oxide layers can include aluminum oxide, silicon oxide, or a combination thereof. The multi-layer coating provides increased IR emittance and decreased solar absorptance relative to conventional thermal control coatings.

In a surface-coated cutting tool in which a hard coating layer having a total layer thickness of 0.5 to 10 μm is deposited on a surface of a tool body made of WC-based cemented carbide or TiCN-based cermet, the hard coating layer has an alternately laminated structure of A layers and B layers, in a case where the A layer is: (Al.sub.aTi.sub.1-a)N (here, a is in atomic ratio), the A layer satisfies 0.50≦a<0.75, in a case where the B layer is: (Al.sub.bTi.sub.1-b)N (here, b is in atomic ratio), the B layer satisfies 0.75≦b≦0.95, and when a layer thickness per layer of the A layers is represented by x (nm) and a layer thickness per layer of the B layers is represented by y (nm), 5y≧x≧3y and 250 (nm)≧x+y≧100 (nm) are satisfied.

The present disclosure provides a multilayer coated cutting material having increased wear resistance at high temperatures, a method for manufacturing the same, and a cutting tool insert for mechanical machining including the same. According to an embodiment of the present disclosure, the multilayer coated cutting material includes a cemented carbide, cermet, ceramic, a cubic crystal boron nitride-based material or a hard alloy body of high-speed steel, and a cutting layer positioned on the base material and configured in multiple layers.

A tool die for forming a green ceramic body. The tool die has a wear resistant coating that is deposited on a substrate and has an outer or free surface having a morphology that provides a mean roughness in a range from about 0.03 μm up to about 0.8 μm Rq. In one embodiment, the wear resistant coating has multiple alternating layers of fine grained and coarse grained materials. Methods of making the tool die and wear resistant coating are also provided.

Methods for forming a laminate film on substrate by a plasma-enhanced cyclical deposition process are provided. The methods may include: providing a substrate into a reaction chamber, and depositing on substrate a metal oxide laminate film by alternatingly depositing a first metal oxide film and a second metal oxide film different from the first metal oxide film, wherein depositing the first metal oxide film and the second metal oxide film comprises, contacting the substrate with sequential and alternating pulses of a metal precursor and an oxygen reactive species generated by applying RF power to a reactant gas comprising at least nitrous oxide (N.sub.2O).

A surface-coated cutting tool has a hard coating layer on a tool body. The hard coating layer includes a (Ti.sub.1−xAl.sub.x)(C.sub.yN.sub.1−y) layer (the average amount Xavg of Al and the average amount Yavg of C satisfy 0.60≦Xavg≦0.95 and 0≦Yavg≦0.005). Crystal grains having an NaCl type face-centered cubic structure in the layer have {111} orientation, a columnar structure in which the average grain width of the individual crystal grains having an NaCl type face-centered cubic structure is 0.1 μm to 2.0 μm and the average aspect ratio is 2 to 10 is included, and in the individual crystal grains having an NaCl type face-centered cubic structure, a periodic compositional variation in Ti and Al in the composition formula: (Ti.sub.1−xAl.sub.x)(C.sub.yN.sub.1−y) is present and the difference between the average of maximum values of x and the average of minimum values thereof is 0.03 to 0.25.

Provided is a coated tool in which a hard coating layer has excellent hardness and toughness and exhibits chipping resistance and defect resistance during long-term use. The hard coating layer includes at least a layer of a complex nitride or complex carbonitride expressed by the composition formula: (Ti.sub.1-x-yAl.sub.xMe.sub.y) (C.sub.zN.sub.1-x) (here, Me is one element selected from among Si, Zr, B, V, and Cr), an average amount Xavg of Al, an average amount Yavg of Me, and an average amount Zavg of C satisfy 0.60≦Xavg, 0.005≦Yavg≦0.10, 0≦Zavg≦0.005, and 0.605≦Xavg+Yavg≦0.95, crystal grains having a cubic structure are present in crystal grains constituting the layer of a complex nitride or complex carbonitride, and in the crystal grains having a cubic structure, a predetermined periodic concentration variation of Ti, Al, and Me is present, whereby the problems are solved.