At least one layer in a coating located on a surface of a substrate is a domain structure layer constituted of two or more domains different in composition. The average value of the size of each of first domains, defined as the diameter of a virtual circumcircle in contact with each first domain, is 1 nm to 10 nm. The average value of the nearest neighbor distance of each first domain, defined as the length of the shortest straight line connecting the center of the circumcircle with the center of another circumcircle adjacent to the circumcircle, is 1 nm to 12 nm. 95% or more of the first domains has a size within 25% of the average value of the size, and 95% or more of the first domains has a nearest neighbor distance within 25% of the average value of the nearest neighbor distance.

A hard coating, which is to be disposed to cover a surface of a substrate, has a total thickness of 0.5-20 m, and includes an A layer and nanolayer-alternated layer that are alternately laminated by physical vapor deposition. The nanolayer-alternated layer includes a B layer and a C layer that are alternately laminated. The A layer has a thickness of 50-1000 nm and is AlCr nitride that is represented by a composition formula of [Al.sub.1-UCr.sub.U]N wherein an atomic ratio U is 0.20-0.80. The B layer has a thickness of 1-100 nm and is TiAl nitride that is represented by a composition formula of [Ti.sub.1-WAl.sub.W]N wherein an atomic ratio W is 0.30-0.85. The C layer has a thickness of 1-100 nm and is TiSi nitride that is represented by a composition formula of [Ti.sub.1-YSi.sub.Y]N wherein an atomic ratio Y is 0.05-0.45. The nanolayer-alternated layer has a thickness of 50-1000 nm.

The present disclosure provides articles comprising a laminate material having a void volume of at least 40%, having a lattice structure comprising a plurality of interconnected struts forming polyhedrons in a series that extends in three dimensions, or both, where the laminate materials have an interface density of at least 2.0 interfaces/micrometer (m). Also described are methods for forming the same.

The provided sliding member has both excellent wear resistance and excellent coating adhesion even under harsh sliding conditions. The disclosed sliding member (100) is used in the presence of a lubricating oil and includes a base member (10), a metal intermediate layer (12) formed on the sliding surface (10A) side of the base member, a layered carbon coating (18) formed on the metal intermediate layer and having a first carbon coating (14) and a second carbon coating (16) layered alternately therein, and a hard carbon coating (20) formed on the layered carbon coating. Under bright-field observation with a transmission electron microscope, an image of the first carbon coating (14) is brighter than an image of the second carbon coating (16). Furthermore, 10 nm<T21000 nm and 0.010T1/T20.60, where T1 and T2 are the thicknesses of the first and second carbon coatings (14, 16).

A surface-coated cutting tool includes a base material and a coating film formed on a surface of the base material. The coating film includes a first alternating layer and a second alternating layer formed on the first alternating layer. The first alternating layer includes first and second layers. The second alternating layer includes third and fourth layers. One or a plurality of the first layers and one or a plurality of the second layers are layered alternately, and one or a plurality of the third layers and one or a plurality of the fourth layers are layered alternately.

Embodiments described herein generally relate to methods of manufacturing an oxide/polysilicon (OP) stack of a 3D memory cell for memory devices, such as NAND devices. The methods generally include treatment of the oxide and/or polysilicon materials with precursors during PECVD processes to lower the dielectric constant of the oxide and reduce the resistivity of the polysilicon. In one embodiment, the oxide material is treated with octamethylcyclotetrasiloxane (OMCTS) precursor. In another embodiment, germane (GeH.sub.4) is introduced to a PECVD process to form Si.sub.xGe.sub.(1x) films with dopant. In yet another embodiment, a plasma treatment process is used to nitridate the interface between layers of the OP stack. The precursors and plasma treatment may be used alone or in any combination to produce OP stacks with low dielectric constant oxide and low resistivity polysilicon.

A coated tool has a substrate and a hard material coating deposited on the substrate. The hard material coating has a layer structure in the following order, starting from the substrate: a titanium nitride layer, a titanium boron nitride transition layer, and a titanium diboride layer. The titanium boron nitride transition layer has a boron content that increases from the titanium nitride layer in the direction of the titanium diboride layer. The boron content does not exceed 15 at %.

A turbine article includes a substrate with a geometric surface having a multiple of divots recessed into the substrate, and a ceramic topcoat disposed over the geometric surface, the topcoat including at least a first layer having a first hardness and a second layer having a second hardness, the first hardness different than the second hardness.

A coated cutting tool includes a multilayer of alternating sublayers of -Al.sub.2O.sub.3 and sublayers of TiN, TiC, TiCN, TiCO or TiCNO. The multilayer includes at least 3 sublayers of -Al.sub.2O.sub.3. The multilayer further exhibits an XRD diffraction over a -2scan of 15-140, wherein the 0 0 2 diffraction peak (peak area) is the strongest peak originating from the -Al.sub.2O.sub.3 sublayers of the multilayer.

A surface-coated cutting tool includes a substrate and a coating film that coats the substrate, wherein the coating film includes a WC.sub.1-x layer composed of a compound represented by WC.sub.1-x, where x is more than or equal to 0.54 and less than or equal to 0.58, and the compound represented by WC.sub.1-x includes a hexagonal crystal structure.