Patent classifications
C30B29/52
METHOD OF FORMING AN EPITAXIAL STACK ON A PLURALITY OF SUBSTRATES
A method of forming an epitaxial stack on a plurality of substrates is provided. In a preferred embodiment, the method comprises providing a semiconductor processing apparatus. This semiconductor processing apparatus comprises a process chamber and a carousel for stationing a wafer boat before or after processing in the process chamber. The method further comprises loading the wafer boat into the process chamber, the wafer boat comprising the plurality of substrates. The method further comprises processing the plurality of substrates in the process chamber, thereby forming, on the plurality of substrates, the epitaxial stack. This epitaxial stack has a pre-determined thickness. The processing comprises unloading the wafer boat, one or more times, from the process chamber to the carousel until the epitaxial stack reaches the pre-determined thickness.
METHOD OF FORMING AN EPITAXIAL STACK ON A PLURALITY OF SUBSTRATES
A method of forming an epitaxial stack on a plurality of substrates is provided. In a preferred embodiment, the method comprises providing a semiconductor processing apparatus. This semiconductor processing apparatus comprises a process chamber and a carousel for stationing a wafer boat before or after processing in the process chamber. The method further comprises loading the wafer boat into the process chamber, the wafer boat comprising the plurality of substrates. The method further comprises processing the plurality of substrates in the process chamber, thereby forming, on the plurality of substrates, the epitaxial stack. This epitaxial stack has a pre-determined thickness. The processing comprises unloading the wafer boat, one or more times, from the process chamber to the carousel until the epitaxial stack reaches the pre-determined thickness.
Three-dimensionally stretchable single crystalline semiconductor membrane
A structure including a three-dimensionally stretchable single crystalline semiconductor membrane located on a substrate is provided. The structure is formed by providing a three-dimensional (3D) wavy silicon germanium alloy layer on a silicon handler substrate. A single crystalline semiconductor material membrane is then formed on a physically exposed surface of the 3D wavy silicon germanium alloy layer. A substrate is then formed on a physically exposed surface of the single crystalline semiconductor material membrane. The 3D wavy silicon germanium alloy layer and the silicon handler substrate are thereafter removed providing the structure.
Three-dimensionally stretchable single crystalline semiconductor membrane
A structure including a three-dimensionally stretchable single crystalline semiconductor membrane located on a substrate is provided. The structure is formed by providing a three-dimensional (3D) wavy silicon germanium alloy layer on a silicon handler substrate. A single crystalline semiconductor material membrane is then formed on a physically exposed surface of the 3D wavy silicon germanium alloy layer. A substrate is then formed on a physically exposed surface of the single crystalline semiconductor material membrane. The 3D wavy silicon germanium alloy layer and the silicon handler substrate are thereafter removed providing the structure.
HYBRID SUPERALLOY ARTICLE AND METHOD OF MANUFACTURE THEREOF
An article comprises a first portion comprising a first alloy and a second portion comprising a second alloy that is metallurgically bonded to the first portion to form a monolithic article. The metallurgical bonding involves the application of an electrical current across the bond line and results in a retention of a metallurgical structure of the first portion and of a metallurgical structure of the second portion immediately adjacent to a bond line. The first portion has a first dominant property and the second portion has a second dominant property. The first dominant property is different from the second dominant property. The first dominant property is selected to handle operating conditions at a first position of the article where the first portion is located and the second dominant property is selected to handle operating conditions at a second position of the article where the second portion is located.
Insert for hot isostatic pressing treatment
An insert fixture has a base, a plurality of mounting brackets, and a plurality of separators. The plurality of separators extends vertically from the base and includes a plurality of grid portions extending the length of the insert fixture and a plurality of divider portions, which connect to the plurality of grid portions to form a plurality of individual component holders around one of the plurality of mounting brackets. Each individual component holder has two separated grid portion sections positioned on either side of the bracket. These grid portions have two divider portions which are also separated and positioned either side of the bracket at an angle relative to the two grid portions. The individual component holder forms a cell around the mounting bracket. The insert fixture may be constructed from a molybdenum alloy, lanthanum oxide and/or titanium zirconium molybdenum.
SUBSTRATE-TRIGGERED DIRECTIONAL SOLIDIFICATION PROCESS FOR SINGLE CRYSTAL SUPERALLOY
The present invention relates to a substrate-triggered single crystal superalloy directional solidification process, including: (1) preparing a single crystal substrate material having crystallographic characteristics that match crystallographic characteristics of the single crystal superalloy; (2) fabricating a single crystal substrate chilling plate using the obtained single crystal substrate material; and (3) applying the obtained single crystal substrate chilling plate in a directional solidification apparatus, and then preparing a single crystal alloy product by performing superalloy melting and directional solidification. Compared with grain selector method and seeding with grain selector method, in addition to control the crystallographic orientation of the single crystal superalloy precisely, the present invention could reduce the height of block and the whole mold through canceling the spiral grain selector, significantly improve the axial heat dissipation and temperature gradient at the solid-liquid interface, and then reduce the occurrence of freckles and stray grains near platform.
SUBSTRATE-TRIGGERED DIRECTIONAL SOLIDIFICATION PROCESS FOR SINGLE CRYSTAL SUPERALLOY
The present invention relates to a substrate-triggered single crystal superalloy directional solidification process, including: (1) preparing a single crystal substrate material having crystallographic characteristics that match crystallographic characteristics of the single crystal superalloy; (2) fabricating a single crystal substrate chilling plate using the obtained single crystal substrate material; and (3) applying the obtained single crystal substrate chilling plate in a directional solidification apparatus, and then preparing a single crystal alloy product by performing superalloy melting and directional solidification. Compared with grain selector method and seeding with grain selector method, in addition to control the crystallographic orientation of the single crystal superalloy precisely, the present invention could reduce the height of block and the whole mold through canceling the spiral grain selector, significantly improve the axial heat dissipation and temperature gradient at the solid-liquid interface, and then reduce the occurrence of freckles and stray grains near platform.
DIRECTIONAL SOLIDIFICATION METHOD FOR SUPERALLOY SINGLE CRYSTAL BLADE BASED ON SOLID-LIQUID INTERFACE STEADY CONTROL
The present invention discloses a directional solidification method for a superalloy single crystal blade based on solid-liquid interface steady control. The method establishes effective criteria for withdrawal speed adjustment, i.e. the related position between a macro solid-liquid interface and a thermal baffle, the range between the dendrite tips at the solid-liquid interface, and the difference between the advance speed of the macro solid-liquid interface and the withdrawal speed. With these criteria, the advance of the solid-liquid interface during directional solidification is simulated and a withdrawal speed curve v(t) for the solid-liquid interface steady advancement was obtained. And then, the single crystal blade was prepared.
DIRECTIONAL SOLIDIFICATION METHOD FOR SUPERALLOY SINGLE CRYSTAL BLADE BASED ON SOLID-LIQUID INTERFACE STEADY CONTROL
The present invention discloses a directional solidification method for a superalloy single crystal blade based on solid-liquid interface steady control. The method establishes effective criteria for withdrawal speed adjustment, i.e. the related position between a macro solid-liquid interface and a thermal baffle, the range between the dendrite tips at the solid-liquid interface, and the difference between the advance speed of the macro solid-liquid interface and the withdrawal speed. With these criteria, the advance of the solid-liquid interface during directional solidification is simulated and a withdrawal speed curve v(t) for the solid-liquid interface steady advancement was obtained. And then, the single crystal blade was prepared.