A material synthesis method may comprise: adding at least one liquid precursor solution to an atomizer device; generating by the atomizer device an aerosol comprising liquid droplets; transporting the aerosol to a reactive zone for evaporating one or more solvents from the aerosol; and collecting particles synthesized from at least evaporating the aerosol.

A material synthesis method may comprise: adding at least one liquid precursor solution to an atomizer device; generating by the atomizer device an aerosol comprising liquid droplets; transporting the aerosol to a reactive zone for evaporating one or more solvents from the aerosol; and collecting particles synthesized from at least evaporating the aerosol.

A material synthesis method may comprise: obtaining at least one liquid precursor solution comprising one or more solutes determined based on atomic stoichiometry of target particles; adding the at least one liquid precursor solution to an atomizer device; generating at the atomizer device an aerosol; transporting the aerosol to a reactive zone of a predetermined temperature for a predetermined time; and obtaining synthesized particles by evaporating one or more solvents from the aerosol in the reactive zone.

A component for a plasma processing apparatus, and a plasma processing apparatus are highly resistant to plasma and are highly durable. The component includes a substrate containing a first element that is a metal element or a semimetal element, and a film located on the substrate and containing yttrium oxide as a main constituent. The film contains yttrium oxide crystal grains oriented with a deviation angle of ±10° from a {111} direction of a crystal lattice plane of yttrium oxide. The yttrium oxide crystal grains oriented with the deviation angle have an area ratio of 45% or greater.

A component for a plasma processing apparatus, and a plasma processing apparatus are highly resistant to plasma and are highly durable. The component includes a substrate containing a first element that is a metal element or a semimetal element, and a film located on the substrate and containing yttrium oxide as a main constituent. The film contains yttrium oxide crystal grains oriented with a deviation angle of ±10° from a {111} direction of a crystal lattice plane of yttrium oxide. The yttrium oxide crystal grains oriented with the deviation angle have an area ratio of 45% or greater.

Proposed is an yttrium-based granular powder for thermal spraying. The yttrium-based granular powder includes at least one yttrium compound powder selected from the group consisting of Y.sub.2O.sub.3, YOF, YF.sub.3, Y.sub.4Al.sub.2O.sub.9, Y.sub.3Al.sub.5O.sub.12, and YAlO.sub.3, and a silica (SiO.sub.2) powder. The yttrium-based granular powder is prepared by mixing the yttrium compound powder having a mean grain diameter of 50 nm to 900 nm and the silica powder having a mean grain diameter of 50 nm to 900 nm. The yttrium-based granular powder includes less than 10 wt % of a Y—Si—O mesophase. A thermal spray coating produced using the yttrium-based granular powder can exhibit low porosity, high density, and excellent plasma resistance.

Proposed is an yttrium-based granular powder for thermal spraying. The yttrium-based granular powder includes at least one yttrium compound powder selected from the group consisting of Y.sub.2O.sub.3, YOF, YF.sub.3, Y.sub.4Al.sub.2O.sub.9, Y.sub.3Al.sub.5O.sub.12, and YAlO.sub.3, and a silica (SiO.sub.2) powder. The yttrium-based granular powder is prepared by mixing the yttrium compound powder having a mean grain diameter of 50 nm to 900 nm and the silica powder having a mean grain diameter of 50 nm to 900 nm. The yttrium-based granular powder includes less than 10 wt % of a Y—Si—O mesophase. A thermal spray coating produced using the yttrium-based granular powder can exhibit low porosity, high density, and excellent plasma resistance.

An aqueous solution containing ions of one or more rare earth elements selected from the group consisting of Y, Nd, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu, hydrogen peroxide, urea, and polyvinylpyrrolidone is heated at a temperature of 80° C. or higher and equal to or lower than a boiling point of the aqueous solution to produce particles of a rare earth compound under a reaction between a hydrolysis product of urea and the ions of the rare earth elements. Furthermore, the particles of the rare earth compound are solid-liquid separated from the aqueous solution, and the obtained solid content is baked at a temperature of 600° C. or higher in an atmosphere containing oxygen to produce rare earth oxide particles.

In a first embodiment, a coal treatment process includes exposing a material comprising coal to ionic liquid(s) to form a first mixture, isolating a residue from the first mixture, forming a second mixture comprising the residue, and electrospinning the second mixture to form a carbon fiber precursor material. In a second embodiment, a coal treatment process includes exposing a material comprising coal to ionic liquid(s) to form a mixture comprising solids and a liquid fraction, separating and filtering the liquid fraction from the mixture, and isolating one or more compounds from the liquid fraction. In a third embodiment, a coal treatment process includes exposing a material comprising coal to ionic liquid(s) to form a first mixture comprising residues, exposing the first mixture to (a) an acid, (b) a solvent, or (c) both to form a second mixture, and isolating rare earth elements and rare earth element compounds.

In a first embodiment, a coal treatment process includes exposing a material comprising coal to ionic liquid(s) to form a first mixture, isolating a residue from the first mixture, forming a second mixture comprising the residue, and electrospinning the second mixture to form a carbon fiber precursor material. In a second embodiment, a coal treatment process includes exposing a material comprising coal to ionic liquid(s) to form a mixture comprising solids and a liquid fraction, separating and filtering the liquid fraction from the mixture, and isolating one or more compounds from the liquid fraction. In a third embodiment, a coal treatment process includes exposing a material comprising coal to ionic liquid(s) to form a first mixture comprising residues, exposing the first mixture to (a) an acid, (b) a solvent, or (c) both to form a second mixture, and isolating rare earth elements and rare earth element compounds.