A metal chloride generator is provided. The metal chloride generator is a metal chloride centrifugal reactor that can be operated under conditions sufficient to cause metal particles and chlorine in the generator to be brought into contact with one another and react using centrifugal force to form metal chloride. A process for manufacturing titanium dioxide that utilizes the metal chloride generator is also provided.

A metal chloride generator is provided. The metal chloride generator is a metal chloride centrifugal reactor that can be operated under conditions sufficient to cause metal particles and chlorine in the generator to be brought into contact with one another and react using centrifugal force to form metal chloride. A process for manufacturing titanium dioxide that utilizes the metal chloride generator is also provided.

Methods are provided herein for forming transition metal oxide thin films, preferably Group IVB metal oxide thin films, by atomic layer deposition. The metal oxide thin films can be deposited at high temperatures using metalorganic reactants. Metalorganic reactants comprising two ligands, at least one of which is a cycloheptatriene or cycloheptatrienyl (CHT) ligand are used in some embodiments. The metal oxide thin films can be used, for example, as dielectric oxides in transistors, flash devices, capacitors, integrated circuits, and other semiconductor applications.

Methods are provided herein for forming transition metal oxide thin films, preferably Group IVB metal oxide thin films, by atomic layer deposition. The metal oxide thin films can be deposited at high temperatures using metalorganic reactants. Metalorganic reactants comprising two ligands, at least one of which is a cycloheptatriene or cycloheptatrienyl (CHT) ligand are used in some embodiments. The metal oxide thin films can be used, for example, as dielectric oxides in transistors, flash devices, capacitors, integrated circuits, and other semiconductor applications.

A metal chloride generator is provided. The metal chloride generator is a metal chloride centrifugal reactor that can be operated under conditions sufficient to cause metal particles and chlorine in the generator to be brought into contact with one another and react using centrifugal force to form metal chloride. A process for manufacturing titanium dioxide that utilizes the metal chloride generator is also provided.

A metal chloride generator is provided. The metal chloride generator is a metal chloride centrifugal reactor that can be operated under conditions sufficient to cause metal particles and chlorine in the generator to be brought into contact with one another and react using centrifugal force to form metal chloride. A process for manufacturing titanium dioxide that utilizes the metal chloride generator is also provided.

Titanium oxide particles, a method for their production, and a slurry, dispersion, composition and dielectric starting material that include the titanium oxide particles. The D90 (LD)/D50 (LD) ratio of the titanium oxide particles is greater than 1.0 and 2.0 or lower, and the particle concentration of coarse particles having a size exceeding 16 times the D50 (SEM)(16? the D50 (SEM)), for primary particles, is 20 ppm or lower. For their production, a source gas and oxidizing gas are introduced into a reaction tube and reacted, with a purge medium blowing outlet being provided on the inner wall of the reaction tube, and the blowout angle and the blowout flow velocity (B) of the purge medium from the inner wall of the reaction tube being such that the purge medium is introduced in a swirling manner along the inner wall of the reaction tube.

Titanium oxide particles, a method for their production, and a slurry, dispersion, composition and dielectric starting material that include the titanium oxide particles. The D90 (LD)/D50 (LD) ratio of the titanium oxide particles is greater than 1.0 and 2.0 or lower, and the particle concentration of coarse particles having a size exceeding 16 times the D50 (SEM)(16? the D50 (SEM)), for primary particles, is 20 ppm or lower. For their production, a source gas and oxidizing gas are introduced into a reaction tube and reacted, with a purge medium blowing outlet being provided on the inner wall of the reaction tube, and the blowout angle and the blowout flow velocity (B) of the purge medium from the inner wall of the reaction tube being such that the purge medium is introduced in a swirling manner along the inner wall of the reaction tube.

The invention relates to a method for the synthesis of a nanocomposite compound comprising TiO.sub.2 nanoparticles bound to carbon nanostructures, characterized in that it comprises the following steps: a) mixing carbon nanostructures and at least one TiO.sub.2 precursor in a first liquid in order to form a stock suspension; b) nebulizing said stock suspension and transporting it into a reaction chamber by means of a gaseous flow; and c) carrying out laser pyrolysis of said stock suspension in said reaction chamber in order to simultaneously form TiO.sub.2 nanoparticles and graft them onto the nano structures.

The invention relates to a method for the synthesis of a nanocomposite compound comprising TiO.sub.2 nanoparticles bound to carbon nanostructures, characterized in that it comprises the following steps: a) mixing carbon nanostructures and at least one TiO.sub.2 precursor in a first liquid in order to form a stock suspension; b) nebulizing said stock suspension and transporting it into a reaction chamber by means of a gaseous flow; and c) carrying out laser pyrolysis of said stock suspension in said reaction chamber in order to simultaneously form TiO.sub.2 nanoparticles and graft them onto the nano structures.