A method for making a component for use in a plasma processing chamber is provided. A non-oxide silicon containing powder composition is placed in a mold, wherein the non-oxide silicon containing powder composition consists essentially of a non-oxide silicon containing powder and at least one of a B or B4C dopant. The non-oxide silicon containing powder composition is subjected to spark plasma sintering (SPS) to form a spark plasma sintered component. The spark plasma sintered component is machined into a plasma processing chamber component.

A dry substance mixture for a batch, preferably a refractory batch, for the production of a coarse ceramic, refractory, non-basic, shaped or unshaped product, such a refractory batch, such a product as well as a method for its production and a lining of an industrial furnace for the aluminum industry, and such an industrial furnace as well as a lining of a launder transport system or a mobile transport vessel for the aluminum industry, and such a launder transport system and such a transport vessel.

Exemplary methods of coating a metal-containing component are described. The methods are developed to increase corrosion resistance and improve coating adhesion to a metal substrate. The methods include forming a bonding layer on a metal substrate, where the bonding layer includes an oxide of a metal in the metal substrate. The coating methods further include depositing a stress buffer layer on the bonding layer, where the stress buffer layer is characterized by a stress buffer layer coefficient of thermal expansion (CTE) that is less than a metal substrate CTE and a bonding layer CTE. The coating methods also include depositing an environmental barrier layer on the stress buffer layer, where a ratio of the metal substrate CTE to an environmental barrier layer CTE is greater than or about 20:1, and where the environmental barrier layer includes silicon oxide. The metal-containing components may be used in fabrication equipment for electronic devices.

A method of preparing a coated article is disclosed. The method includes depositing a coating composition on a surface of a substrate to form a calcia-magnesia-alumina-silicate (CMAS)-resistant thermal barrier coating (TBC) thereon and give the coated article. The coating composition comprises from about 3 to about 50 wt. % of one or more rare-earth oxides, from about 45 to about 96.5 wt. % zirconia, and from about 0.5 to about 4 wt. % alumina, each based on the total weight of the coating composition. As deposited, the alumina is distributed substantially homogeneously throughout the CMAS-resistant TBC. A coated part prepared with the method is also disclosed.

A method of forming an activated coating composition is disclosed. The method includes providing (a) boron nitride, (b) carbon, (c) aluminum oxide and (d) a liquid carrier. Each of the boron nitride, carbon and aluminum oxide are in particulate form. The coating composition is activated to form an activated coating composition. The activated coating composition includes active components having from about 60.0 wt % to about 90.0 wt % boron nitride, from about 16 wt % to about 24 wt % carbon and from about 4 wt % to about 6 wt % aluminum oxide. A coating method, coated substrate and activated coating composition are also disclosed.

A calcium-magnesium-alumino-silicate (CMAS)-reactive thermal barrier coating including a ceramic coating; and a CMAS-reactive overlay coating, wherein the CMAS-reactive overlay coating conforms to a surface of the ceramic coating and comprises a compound that forms a stable high melting point crystalline precipitate when reacted with molten CMAS at a rate that is competitive with CMAS infiltration kinetics into the thermal barrier coating; wherein the CMAS-reactive overlay coating comprises a material selected from a group consisting of a non-rare earth oxide and a mixed non-rare earth oxide; and wherein the ceramic coating phase is chemically stable with the CMAS-reactive overlay coating.

A refractory lining in a combustion chamber operating in a reducing atmosphere. The lining includes at least one or more Zirconia (Zr)-based refractory lining members comprising one or more Zr-based parts. The Zr-based parts comprise at least 90 wt. %, preferably at least 95 wt. %, of monoclinic ZrO.sub.2 and/or partially stabilized ZrO.sub.2 and/or fully stabilized ZrO.sub.2, wherein the total content of tetragonal and cubic ZrO.sub.2 amounts to at least 20 wt. %, preferably more than 35 wt. %, as well as Zr based refractory lining members and methods for manufacturing the Zr based refractory lining members.

An embodiment relates to a material comprising a ceramic formed from an amorphous metal alloy (amorphous metal ceramic composite), wherein the composite exhibits a higher corrosion resistance than that of Haynes 230 when exposed to molten chlorides such as KCl or MgCl.sub.2 or combinations thereof at temperatures up to 750° C. Yet, another embodiment relates to a method comprising obtaining a substrate, forming a coating of an amorphous metal alloy, heating the coating, and transforming at least a portion the amorphous metal alloy into an amorphous metalceramic composite.

The present disclosure discloses a sintering-resistant material, and a preparation method and use thereof. The sintering-resistant material includes magnesium oxide, an anti-corrosive agent, an antioxidant, and a binder, where the anti-corrosive agent includes a barite powder and a porous graphite powder; the antioxidant includes aluminum carbide and an aluminum powder; the binder includes a metal chloride and a silica sol; and metals in the raw materials are all extracted from a hydrochloric acid leachate of an electric furnace slag. In the present disclosure, the preparation method of the present disclosure improves the resource utilization of the electric furnace slag. Magnesium and aluminum have the largest proportion among metal elements in the electric furnace slag, and thus magnesium oxide is used as the main material. In addition, other chloride salts leached out from the electric furnace slag by hydrochloric acid can be directly or indirectly used.

A base plate containing a having a top and a bottom and comprising a beryllium oxide composition containing at least 95 wt % beryllium oxide and optionally fluorine/fluoride ion. The base plate demonstrates a clamping pressure of at least 133 kPa at a temperature of at least 600° C. and a bulk resistivity greater than 1×10.sup.5 ohm-m at 800° C.