Patent classifications
C
C07
C07C
57/00
C07C57/30
C07C57/42
C07C57/44
C07C57/44
SEMICONDUCTOR PHOTORESIST COMPOSITIONS AND METHODS OF FORMING PATTERNS USING THE COMPOSITION
20250271754
·
2025-08-28
·
A semiconductor photoresist composition and a method of forming patterns using the semiconductor photoresist composition are provided. The semiconductor photoresist composition includes a Sn-containing organometallic compound, a carboxylic acid compound including at least one aryl group and an unsaturated bond, and a solvent.