An onium salt having a partial structure of formula (A) is provided wherein R.sup.a1 and R.sup.a2 are hydrogen or a C.sub.1-C.sub.10 hydrocarbyl group in which hydrogen may be substituted by halogen and —CH.sub.2— may be replaced by —O— or —C(═O)—, both R.sup.a1 and R.sup.a2 are not hydrogen at the same time, R.sup.a1 and R.sup.a2 may bond together to form an aliphatic ring. A chemically amplified negative resist composition comprising the onium salt as acid generator forms a pattern of good profile having a high sensitivity, improved dissolution contrast, reduced LWR and improved CDU.

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A process synthesizes a compound with at least one alkylene group and at least one thiol or thiolate group. The process involves reacting a compound with at least one five-membered cyclic monothiocarbonate group with a starter selected from a compound with at least one thiol group, from a compound with at least one hydroxy group, or from a basic inorganic composed; to obtain a compound with at least one alkylene group and at least one thiol or thiolate group and carbon dioxide.

A process synthesizes a compound with at least one alkylene group and at least one thiol or thiolate group. The process involves reacting a compound with at least one five-membered cyclic monothiocarbonate group with a starter selected from a compound with at least one thiol group, from a compound with at least one hydroxy group, or from a basic inorganic composed; to obtain a compound with at least one alkylene group and at least one thiol or thiolate group and carbon dioxide.

Provided are a carboxylate capable of producing a resist pattern with satisfactory CD uniformity (CDU), and a resist composition. Disclosed are a carboxylate represented by formula (I) and a resist composition:

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wherein Ar represents an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, X.sup.1 represents an oxygen atom or a sulfur atom, R.sup.1 represents a halogen atom or a haloalkyl group having 1 to 12 carbon atoms, R.sup.2 represents a halogen atom, a hydroxy group, a haloalkyl group having 1 to 12 carbon atoms or an alkyl group having 1 to 12 carbon atoms, —CH.sub.2— included in the haloalkyl group and the alkyl group may be replaced by —O— or —CO—, m1 represents an integer of 1 to 6, m2 represents an integer of 0 to 4, and Z.sup.+ represents an organic cation.

It is related to compounds used as autophagy modulators and a method for preparing and using the same, specifically providing a compound of general formula (I), or pharmaceutically acceptable salts thereof, which is a type of autophagy modulators, particularly mammalian ATG8 homologues modulators. ##STR00001##

The present disclosure discloses a preparation method for 4-phenylthio-benzenethiol. The preparation method comprises the following steps: subjecting phenyl sulfide as a raw material to a halogenation reaction to obtain 4-halophenyl sulfide; subjecting the 4-halophenyl sulfide to a sulfhydrylation reaction to obtain a 4-phenylthio-phenylthiolate; and subjecting the 4-phenylthio-phenylthiolate to acidification. The preparation method of the present disclosure avoids the use of materials such as thiophenol which pollutes the environment, and realizes efficient recycling of the reaction materials, solvents, water and the like. The preparation method of the present disclosure is a green process for the synthesis of 4-phenylthio-phenylthiol without organic waste, waste acid and waste water discharge.

The present disclosure discloses a preparation method for 4-phenylthio-benzenethiol. The preparation method comprises the following steps: subjecting phenyl sulfide as a raw material to a halogenation reaction to obtain 4-halophenyl sulfide; subjecting the 4-halophenyl sulfide to a sulfhydrylation reaction to obtain a 4-phenylthio-phenylthiolate; and subjecting the 4-phenylthio-phenylthiolate to acidification. The preparation method of the present disclosure avoids the use of materials such as thiophenol which pollutes the environment, and realizes efficient recycling of the reaction materials, solvents, water and the like. The preparation method of the present disclosure is a green process for the synthesis of 4-phenylthio-phenylthiol without organic waste, waste acid and waste water discharge.

An onium salt containing an anion having formula (A1) and a cation having formula (A1-a), (A1-b) or (A1-c) is provided. A chemically amplified negative resist composition comprising the onium salt as acid generator forms a pattern of good profile having a high sensitivity, improved dissolution contrast, reduced LWR and improved CDU. ##STR00001##

A process synthesizes a compound with at least one alkylene group and at least one thiol or thiolate group. The process involves reacting a compound with at least one five-membered cyclic monothiocarbonate group with a starter selected from a compound with at least one thiol group, from a compound with at least one hydroxy group, or from a basic inorganic composed; to obtain a compound with at least one alkylene group and at least one thiol or thiolate group and carbon dioxide.

A process synthesizes a compound with at least one alkylene group and at least one thiol or thiolate group. The process involves reacting a compound with at least one five-membered cyclic monothiocarbonate group with a starter selected from a compound with at least one thiol group, from a compound with at least one hydroxy group, or from a basic inorganic composed; to obtain a compound with at least one alkylene group and at least one thiol or thiolate group and carbon dioxide.