A metal-oxide electron-beam evaporation source including a variable temperature control device according to the present invention includes: a crucible configured to store a deposition material which is formed of a metal oxide and over which an electron beam is directly scanned; N heating units provided in an outer portion of the crucible, dividing the crucible into N regions, and provided for N regions, respectively; and a control unit configured to control the N heating units so that a temperature of an upper region of the crucible is maintained to be higher than that of a lower region of the crucible to reduce a temperature difference between a region over which the electron beam is scanned and a region over which the electron beam is not scanned.

A heater for an evaporator includes a heating wire and a support, and the heating wire includes a tunnel part that surrounds an outer surface of a container in which an organic material is accommodated and is coiled in a cylindrical shape, a flange part that is connected to an upper end of the tunnel part and has a spiral structure in which a radius increases in a plane direction, a first straight part extending downward from a lower end of the tunnel part, and a second straight part extending downward from a distal end of the flange part, and the support includes a ring part that supports a lower surface of the flange part, and a plurality of bars extending downward form the ring part.

A versatile high throughput deposition apparatus includes a process chamber and a workpiece platform in the process chamber. The workpiece platform can hold a plurality of workpieces around a center region and to rotate the plurality of workpieces around the center region. Each of the plurality of workpieces includes a deposition surface facing the center region. A gas distribution system can distribute a vapor gas in the center region of the process chamber to deposit a material on the deposition surfaces on the plurality of workpieces. A magnetron apparatus can form a closed-loop magnetic field near the plurality of workpieces. The plurality of workpieces can be electrically biased to produce a plasma near the deposition surfaces on the plurality of workpieces.

Provided is a vacuum coating device, comprising a crucible (13), an induction heater (15) arranged on the outer side of the crucible (13); a flow distribution box connected to the top of the crucible (13) through a steam pipeline (16); a pressure regulating valve (18) and a diverter valve (19) sequentially arranged in a direction in which the steam pipeline (16) is in communication with the flow distribution box; a horizontal pressure stabilizing plate (20) arranged in the flow distribution box, a plurality of sub-nozzles (21) connected to the top of the flow distribution box; wherein a plurality of air flow distribution chambers are arranged in the diverter valve (19); a ratio of a total area of the air flow distribution chambers (S.sub.distribution) to an area of the steam pipeline (16) in the radial direction (S.sub.pipeline) is greater than or equal to 0.1, i.e.: S.sub.diversion/S.sub.pipeline≥0.1. According to the device, a uniform spray flow can be formed, a uniform coating (23) is formed on the surface of a steel plate (100) when high temperature steam is in contact with a low temperature steel plate, the spray flow formed by the sub-nozzles (21) arranged at the rear portion continuously covers the deposited metal layer that has been formed, so as to achieve efficient coating of strip steel under vacuum conditions.

Provided is a vacuum coating device, comprising a crucible (13), an induction heater (15) arranged on the outer side of the crucible (13); a flow distribution box connected to the top of the crucible (13) through a steam pipeline (16); a pressure regulating valve (18) and a diverter valve (19) sequentially arranged in a direction in which the steam pipeline (16) is in communication with the flow distribution box; a horizontal pressure stabilizing plate (20) arranged in the flow distribution box, a plurality of sub-nozzles (21) connected to the top of the flow distribution box; wherein a plurality of air flow distribution chambers are arranged in the diverter valve (19); a ratio of a total area of the air flow distribution chambers (S.sub.distribution) to an area of the steam pipeline (16) in the radial direction (S.sub.pipeline) is greater than or equal to 0.1, i.e.: S.sub.diversion/S.sub.pipeline≥0.1. According to the device, a uniform spray flow can be formed, a uniform coating (23) is formed on the surface of a steel plate (100) when high temperature steam is in contact with a low temperature steel plate, the spray flow formed by the sub-nozzles (21) arranged at the rear portion continuously covers the deposited metal layer that has been formed, so as to achieve efficient coating of strip steel under vacuum conditions.

The present disclosure relates to a zinc-based coated steel material having excellent corrosion resistance and spot weldability and, more particularly, to a zinc-based coated steel material plated with a multilayer zinc alloy, which has two or more layers, and having excellent corrosion resistance and spot weldability. A zinc-based coated steel material according to an aspect of the present disclosure includes: a base steel; and a multilayer zinc-based plating layer composed of two or more discriminated plating layers, in which the multilayer zinc-based plating layer may include Mg of 0.12˜0.64 percent by weight.

The present disclosure relates to a zinc-based coated steel material having excellent corrosion resistance and spot weldability and, more particularly, to a zinc-based coated steel material plated with a multilayer zinc alloy, which has two or more layers, and having excellent corrosion resistance and spot weldability. A zinc-based coated steel material according to an aspect of the present disclosure includes: a base steel; and a multilayer zinc-based plating layer composed of two or more discriminated plating layers, in which the multilayer zinc-based plating layer may include Mg of 0.12˜0.64 percent by weight.

An evaporator device incudes a crucible comprising an inlet through which solid material is introduced to the crucible, and an outlet through which vaporised material is released from the crucible. Vapours outgassed from molten material within the crucible are guided away from the outlet.

An evaporator device incudes a crucible comprising an inlet through which solid material is introduced to the crucible, and an outlet through which vaporised material is released from the crucible. Vapours outgassed from molten material within the crucible are guided away from the outlet.

A material deposition apparatus for depositing an evaporated material onto a substrate is provided. The material deposition apparatus includes a processing drum having a cooler configured to control a substrate temperature during processing of a substrate on the processing drum; a roller guiding the substrate towards the processing drum; a first heater assembly positioned to heat the substrate in a free-span area between the roller and the processing drum; a second heater assembly positioned to heat the substrate while being supported on the processing drum; at least one deposition source provided along a substrate transport path downstream of the second heater assembly; a substrate speed sensor providing a speed signal correlating with a substrate transportation speed; and a controller having an input for the speed signal configured to control at least the first heater assembly.