A method of forming metal nanostructures is a low temperature closed space vacuum deposition method. The method includes disposing a source material in an enclosed space at low evaporation temperatures to controllably form nanostructures of different dimensionalities on a substrate. The nanostructures have dimensionalities determined by a chosen evaporation temperature. An apparatus is also provided for performing the method.

Provided is a dry coating apparatus for coating a coating material, i.e., deposition vapor (metal vapor) on a substrate (a steel strip). The dry coating apparatus includes a coating part disposed in a vacuum to coat deposition vapor generated through heating and evaporation of a supplied coating material onto a proceeding object to be coated and a heating source disposed in an atmosphere to heat and levitate the coating material in the coating part.

Provided is a dry coating apparatus for coating a coating material, i.e., deposition vapor (metal vapor) on a substrate (a steel strip). The dry coating apparatus includes a coating part disposed in a vacuum to coat deposition vapor generated through heating and evaporation of a supplied coating material onto a proceeding object to be coated and a heating source disposed in an atmosphere to heat and levitate the coating material in the coating part.

An evaporation crucible and an evaporation system are disclosed. The evaporation crucible includes a crucible body and at least one nozzle located on a top face of the crucible body. The crucible body includes an inner wall and an outer wall that are bonded together, where the inner wall is formed of a first material, the outer wall is made of a second material, and a heat conductivity of the first material is larger than that of the second material. The evaporation crucible and the evaporation system may solve technical problem of non-uniform evaporation of vapor deposition material in prior arts, such that a uniform coating on OLED substrate may be achieved.

A crucible apparatus includes a crucible and one or more induction coils arranged around the crucible. Upon application of electric power to the one or more induction coils, a first thermal zone is generated in at least a first portion of the crucible and a second thermal zone is generated in at least a second portion of the crucible, wherein a first thermal characteristic of the first thermal zone is different from a second thermal characteristic of the second thermal zone.

A crucible apparatus includes a crucible and one or more induction coils arranged around the crucible. Upon application of electric power to the one or more induction coils, a first thermal zone is generated in at least a first portion of the crucible and a second thermal zone is generated in at least a second portion of the crucible, wherein a first thermal characteristic of the first thermal zone is different from a second thermal characteristic of the second thermal zone.

The present invention discloses a heating source, applied in an evaporator of organic light emitting diode to heat a heating container in the evaporator, wherein the heating source comprises a heating coil and a protective component, and the protective component is insulation material, and two ends of the heating coil are connected to a power source to receive voltages to generate heat, and the protective component is located on the heating coil to restrict a deformation range of the heating coil for restricting contact of two adjacent heater strips in the heating coil and preventing the short circuit the two adjacent heater strips. Therefore, the present invention reduces the possibility of the heating coil short circuit and raises the stability of the heating coil, and thus, the stability of the evaporator applied with the heating coil can be provided.

The present invention discloses a heating source, applied in an evaporator of organic light emitting diode to heat a heating container in the evaporator, wherein the heating source comprises a heating coil and a protective component, and the protective component is insulation material, and two ends of the heating coil are connected to a power source to receive voltages to generate heat, and the protective component is located on the heating coil to restrict a deformation range of the heating coil for restricting contact of two adjacent heater strips in the heating coil and preventing the short circuit the two adjacent heater strips. Therefore, the present invention reduces the possibility of the heating coil short circuit and raises the stability of the heating coil, and thus, the stability of the evaporator applied with the heating coil can be provided.

In various embodiments, evaporation sources are heated and/or cooled via a fluid-based thermal management system during deposition of thin films.

In various embodiments, evaporation sources are heated and/or cooled via a fluid-based thermal management system during deposition of thin films.