A vapor deposition device and a method for depositing a coating on a substrate are disclosed. The device includes a heating chamber for containing plasma and an evaporant chamber for containing an evaporant source. Evaporant is generated by heating of the evaporant source by the plasma. The heating chamber is both separated from the evaporant chamber and in thermally conductive connectivity with the evaporant chamber. The method includes supplying plasma to a heating chamber; heating an evaporant source by transfer of heat from the plasma to in an amount sufficient to generate evaporant from the evaporant source; and condensing the evaporant or a reaction product thereof on a surface of the substrate to form a coating thereon. The plasma is maintained in isolation from the evaporant source and the evaporant.

An object of the present invention is to provide a method which enable a material to be fully embedded into a recess portion with a deposition film left in the recess portion. A method in one embodiment comprises: a first irradiation step of irradiating a deposition film formed on an opening portion of a recess portion in a substrate with a particle beam in a direction at a first angle with respect to a substrate in-plane direction, to remove part of the deposition film in a thickness direction; and a second irradiation step of, after the first irradiation step, irradiating the deposition film with the particle beam in a direction at a second angle which is closer to perpendicular to the substrate in-plane direction than the first angle is, to remove part of the remaining deposition film in the thickness direction.

A method of bonding transparent substrates is provided, comprising: preparing a pair of transparent substrates; forming a thin film of aluminum oxide by a sputtering method, on a bonding surface of the transparent substrates; contacting the aluminum oxide thin films in the air to bond the pair of transparent substrates; and heating the bonded pair of transparent substrates.

The present disclosure relates to a process for pre-lithiation and an equipment for implementing the same. The process for pre-lithiation comprising evaporating lithium onto a surface of a negative electrode to form a lithium layer thereon and subjecting the negative electrode to a thermal treatment.

The process for producing an orthopedic implant having an integrated ceramic surface layer includes steps for positioning the orthopedic implant inside a vacuum chamber, emitting a relatively high energy beam into the at least two different vaporized metalloid or transition metal atoms in the vacuum chamber to cause a collision therein to form ceramic molecules, and driving the ceramic molecules with the ion beam into an outer surface of the orthopedic implant at a relatively high energy such that the ceramic molecules implant therein and form at least a part of the molecular structure of the outer surface of the orthopedic implant, thereby forming the integrated ceramic surface layer.

Provided are methods of reducing the stress of a semiconductor wafer. A wafer map of a free-standing wafer is created using metrology tools. The wafer map is then converted into a power spectral density (PSD) using a spatial frequency scale. The fundamental component of bow is then compensated with a uniform film, e.g., silicon nitride (SiN), deposited on the back side of the wafer.

The process for producing an orthopedic implant having an integrated silicon nitride surface layer includes steps for positioning the orthopedic implant inside a vacuum chamber, mixing nitrogen gas and vaporized silicon atoms in the vacuum chamber, emitting a relatively high energy beam into the mixture of nitrogen gas and vaporized silicon atoms in the vacuum chamber to cause a gas-phase reaction between the nitrogen gas and the vaporized silicon atoms to form reacted precipitate silicon nitride molecules, and driving the precipitate silicon nitride molecules with the same beam into an outer surface of the orthopedic implant at a relatively high energy such that the precipitate silicon nitride molecules implant therein and form at least a part of the molecular structure of the outer surface of the orthopedic implant, thereby forming the integrated silicon nitride surface layer.

Provided are a laminated body and a laminated body manufacturing method that can improve adhesiveness between a resin layer and a seed layer. The laminated body has a substrate, a first wiring layer, a resin layer, and a second wiring layer in this order, and the second wiring layer includes at least an adhesive layer and a seed layer in this order.

An apparatus includes a substrate, an anodic oxidation layer, and a base layer. The anodic oxidation layer is disposed on a surface of the substrate, and the base layer is disposed on a surface of the anodic oxidation layer. The base layer includes a first base layer and a second base layer stacked on the anodic oxidation layer, and each of the first base layer and the second base layer includes a deposition layer of a first metal. An average grain size of the first base layer is less than an average grain size of the second base layer. The anodic oxidation layer includes a nanopore structure, and grains of the first base layer is at least partially embedded in the nanopore structure of the anodic oxidation layer.

Provided are a laminated body and a laminated body manufacturing method that can improve adhesiveness between a resin layer and a seed layer. The laminated body has a substrate, a first wiring layer, a resin layer, and a second wiring layer in this order, and the second wiring layer includes at least an adhesive layer and a seed layer in this order.