A method for depositing a metal film onto a substrate is disclosed. In particular, the method comprises pulsing a metal halide precursor onto the substrate and pulsing a reducing precursor onto the substrate. A reaction between the metal halide precursor and the reducing precursor forms a metal film. Specifically, the method discloses forming a metal boride or a metal silicide film.

A method for depositing a metal film onto a substrate is disclosed. In particular, the method comprises pulsing a metal halide precursor onto the substrate and pulsing a reducing precursor onto the substrate. A reaction between the metal halide precursor and the reducing precursor forms a metal film. Specifically, the method discloses forming a metal boride or a metal silicide film.

A method for depositing a metal boride film onto a substrate is disclosed. In particular, the method comprises pulsing a metal halide precursor onto the substrate and pulsing a boron compound precursor onto the substrate. A reaction between the metal halide precursor and the boron compound precursor forms a metal boride film. Specifically, the method discloses forming a tantalum boride (TaB.sub.2) or a niobium boride (NbB.sub.2) film.

A method for depositing a metal boride film onto a substrate is disclosed. In particular, the method comprises pulsing a metal halide precursor onto the substrate and pulsing a boron compound precursor onto the substrate. A reaction between the metal halide precursor and the boron compound precursor forms a metal boride film. Specifically, the method discloses forming a tantalum boride (TaB.sub.2) or a niobium boride (NbB.sub.2) film.

A coated cutting tool comprising a substrate and a coating layer formed on a surface of the substrate, wherein: the coating layer comprises a lower layer, an intermediate layer, and an upper layer in this order from the substrate side; the lower layer comprises one or two or more Ti compound layers containing a Ti compound of Ti and an element of at least one kind selected from the group consisting of C, N, O and B, the intermediate layer comprises an α-Al.sub.2O.sub.3 layer containing α-Al.sub.2O.sub.3, and the upper layer comprises a TiCNO layer containing TiCNO; an average thickness of the coating layer is 5.0 μm or more and 30.0 μm or less; in a specific first cross section, a misorientation A satisfies a specific condition; and in a specific second cross section, a misorientation B satisfies a specific condition.

A coated cutting tool comprising a substrate and a coating layer formed on a surface of the substrate, wherein: the coating layer comprises a lower layer, an intermediate layer, and an upper layer in this order from the substrate side; the lower layer comprises one or two or more Ti compound layers containing a Ti compound of Ti and an element of at least one kind selected from the group consisting of C, N, O and B, the intermediate layer comprises an α-Al.sub.2O.sub.3 layer containing α-Al.sub.2O.sub.3, and the upper layer comprises a TiCNO layer containing TiCNO; an average thickness of the coating layer is 5.0 μm or more and 30.0 μm or less; in a specific first cross section, a misorientation A satisfies a specific condition; and in a specific second cross section, a misorientation B satisfies a specific condition.

A surface coated member having improved stability and a longer service life is provided. The surface coated member of the present invention includes a base member and a hard coating formed on a surface thereof. The hard coating is constituted of one or more layers. At least one of the layers is formed by a CVD method and includes a multilayer structure having a first unit layer and a second unit layer being layered alternately. The first unit layer includes a first compound containing Ti and one or more kind of element selected from the group consisting of B, C, N, and O. The second unit layer includes a second compound containing Al and one or more kind of element selected from the group consisting of B, C, N, and O.

A surface coated member having improved stability and a longer service life is provided. The surface coated member of the present invention includes a base member and a hard coating formed on a surface thereof. The hard coating is constituted of one or more layers. At least one of the layers is formed by a CVD method and includes a multilayer structure having a first unit layer and a second unit layer being layered alternately. The first unit layer includes a first compound containing Ti and one or more kind of element selected from the group consisting of B, C, N, and O. The second unit layer includes a second compound containing Al and one or more kind of element selected from the group consisting of B, C, N, and O.

Disclosed is a method for improving the high-temperature stability of a component, in particular a blade of a turbomachine, formed at least partially from a molybdenum alloy that, besides molybdenum, silicon, boron and titanium, comprises iron and/or yttrium. The method comprises depositing a diffusion barrier layer formed from technically pure molybdenum or tungsten or being an alloy based on molybdenum and/or tungsten at least on an outer surface, which comprises the molybdenum alloy, of the component, and depositing silicon on the diffusion barrier layer to form molybdenum silicides and/or tungsten silicides.

Disclosed is a method for improving the high-temperature stability of a component, in particular a blade of a turbomachine, formed at least partially from a molybdenum alloy that, besides molybdenum, silicon, boron and titanium, comprises iron and/or yttrium. The method comprises depositing a diffusion barrier layer formed from technically pure molybdenum or tungsten or being an alloy based on molybdenum and/or tungsten at least on an outer surface, which comprises the molybdenum alloy, of the component, and depositing silicon on the diffusion barrier layer to form molybdenum silicides and/or tungsten silicides.