Provided is a film forming apparatus for forming a metal film capable of replacing an electrolyte membrane at a proper timing along with further degradation in the electrolyte membrane. The film forming apparatus includes a housing for containing a plating solution, the housing having an electrolyte membrane removably attached thereto; a replacement mechanism configured to replace the electrolyte membrane attached to the housing; a detecting device configured to detect a state of the electrolyte membrane or a state of the surface of the substrate after film formation; and a control device configured to control replacement of the electrolyte membrane. The control device determines whether there is degradation in the electrolyte membrane based on a result of detection by the detecting device, and if it is determined that the electrolyte membrane is degraded, causes the replacement mechanism to replace the electrolyte membrane.

An illustrative example embodiment of an apparatus and method includes providing a weave body downstream of an electrolyzer, purifying hydrogen by demisting a hydrogen stream exiting the electrolyzer via flow through the weave body; and de-oxidizing the hydrogen stream during flow through the weave body.