A tooling assembly suitable for use in infiltrating a fibrous preform comprises a first perforated plate having an outer surface and an oppositely disposed inner surface defining a plate thickness therebetween, and a plurality of tapered holes extending through the thickness. Each hole of the plurality of tapered holes has a first diameter at the outer surface and a second diameter at the inner surface, and the first diameter is greater than the second diameter.

An electrostatic chuck for a substrate processing system includes a monolithic body made of ceramic. A plurality of first electrodes are arranged in the monolithic body adjacent to a top surface of the monolithic body and that are configured to selectively receive a chucking signal. A gas channel is formed in the monolithic body and is configured to supply back side gas to the top surface. Coolant channels are formed in the monolithic body and are configured to receive fluid to control a temperature of the monolithic body.

A method of making a ceramic matrix composite article includes fabricating a preform comprising a plurality of fibers arranged in an arrangement, wherein there are spaces between adjacent ones of the fibers; providing particles to the preform, whereby the particles are situated in the spaces; and applying a matrix material to the preform by atomic layer deposition to make a ceramic matrix composite article. A ceramic matrix composite article is also disclosed.

An optical system includes a housing, an imaging device housed within the housing, and a window in the housing providing an optical path through the housing to the imaging device. The window includes a transparent substrate and a coating over the transparent substrate. The coating is made of an electrically conductive semiconductor. The imaging device is sensitive to and the coating is transparent to at least one of MWIR and/or LWIR wavelengths.

An optical system includes a housing, an imaging device housed within the housing, and a window in the housing providing an optical path through the housing to the imaging device. The window includes a transparent substrate and a coating over the transparent substrate. The coating is made of an electrically conductive semiconductor. The imaging device is sensitive to and the coating is transparent to at least one of MWIR and/or LWIR wavelengths.

The present invention relates to a moldable nanocomposite for producing a transparent article made of a ceramic material, the moldable nanocomposite according to the present invention comprising: an organic binder; a powder of the ceramic material dispersed in the organic binder, the powder comprising particles having a diameter in the range from 5 nm to 700 nm, and/or a precursor of the ceramic material dispersed in the organic binder, the precursor being at least one metal-containing compound; and a phase-forming agent dispersed in the organic binder, the phase-forming agent being solid or viscous at room temperature and forming an internal phase in the organic binder, wherein the combined content of the powder and the precursor of the ceramic material in the moldable nanocomposite is at least 5 parts per volume based on 100 parts per volume of the organic binder, and wherein the moldable nanocomposite does not contain any low viscosity solvent. Further, the present invention relates to a method of producing a transparent article made of a ceramic material, the method according to the present invention making use of the moldable nanocomposite according to the present invention.

A tooling assembly suitable for use in infiltrating a fibrous preform comprises an outer tooling fixture with a plurality of outer sidewalls defining an inner volume, each of the plurality of outer sidewalls having an outer wall thickness, and a window extending through the outer wall thickness of at least one outer sidewall of the plurality of sidewalls. The tooling assembly further comprises an inner tooling fixture positioned within the inner volume of the outer tooling fixture, the inner tooling having a plurality of inner sidewalls, each of the plurality of inner sidewalls having an inner wall thickness, and a plurality of holes extending through the inner wall thickness of at least one inner sidewall of the plurality of inner sidewalls. The at least one outer sidewall is positioned adjacent the at least one inner sidewall such that the window overlaps with at least a subset of the plurality of holes in the at least one inner sidewall.

The present invention relates to a new process for manufacturing a silicon carbide (SiC) coated body by depositing SiC in a chemical vapor deposition method using dimethyldichlorosilane (DMS) as the silane source on a graphite substrate. A further aspect of the present invention relates to the new silicon carbide coated body, which can be obtained by the new process of the present invention, and to the use thereof for manufacturing articles for high temperature applications, susceptors and reactors, semiconductor materials, and wafer.

The present invention relates to a new process for manufacturing a silicon carbide (SiC) coated body by depositing SiC in a chemical vapor deposition method using dimethyldichlorosilane (DMS) as the silane source on a graphite substrate. A further aspect of the present invention relates to the new silicon carbide coated body, which can be obtained by the new process of the present invention, and to the use thereof for manufacturing articles for high temperature applications, susceptors and reactors, semiconductor materials, and wafer.

A method for producing a part having improved resistance to oxidation and high temperature-corrosion, includes the formation of an environmental barrier coating on an at least partially ceramic matrix composite material, the environmental barrier coating being formed by direct liquid injection-metal organic chemical vapor deposition.