MWIR/LWIR transparent, conductive coatings
10444409 ยท 2019-10-15
Assignee
Inventors
Cpc classification
G02B1/118
PHYSICS
C04B35/547
CHEMISTRY; METALLURGY
C23C16/301
CHEMISTRY; METALLURGY
C30B29/40
CHEMISTRY; METALLURGY
H01L31/0203
ELECTRICITY
C03C17/00
CHEMISTRY; METALLURGY
G02B1/16
PHYSICS
C04B35/547
CHEMISTRY; METALLURGY
G02B5/208
PHYSICS
International classification
H01L31/0203
ELECTRICITY
G02B1/16
PHYSICS
C23C18/12
CHEMISTRY; METALLURGY
C30B29/40
CHEMISTRY; METALLURGY
Abstract
An optical system includes a housing, an imaging device housed within the housing, and a window in the housing providing an optical path through the housing to the imaging device. The window includes a transparent substrate and a coating over the transparent substrate. The coating is made of an electrically conductive semiconductor. The imaging device is sensitive to and the coating is transparent to at least one of MWIR and/or LWIR wavelengths.
Claims
1. An optical system comprising: a housing; an imaging device housed within the housing; and a window in the housing providing an optical path through the housing to the imaging device, wherein the window includes: a transparent substrate that is at least one of MWIR and/or LWIR transparent; and a coating embedded in the transparent substrate, the coating being made of an electrically conductive semiconductor, wherein the imaging device is sensitive to and wherein the coating is transparent to at least one of MWIR and/or LWIR wavelengths, wherein the coating is embedded in the transparent substrate in a grid pattern, the coating and transparent substrate having closely matched indices of refraction to mitigate light scattering through the pattern, wherein the conductive coating is embedded in a pattern in a transparent coating on the transparent substrate, the coating and a transparent base coating have closely matched indices of refraction to mitigate light scattering through the pattern, and wherein the housing and the window are an electromagnetic interference (EMI) shield for the imaging device for wavelengths larger than the spaces between the lattices in the grid.
2. The optical system as recited in claim 1, wherein the coating has its peak transmission in MWIR wavelengths.
3. The optical system as recited in claim 2, wherein the transparent substrate includes sapphire, Aluminum Oxynitride (AlON), and/or Spinel.
4. The optical system as recited in claim 1, wherein the coating is transparent in LWIR wavelengths.
5. The optical system as recited in claim 4, wherein the transparent substrate includes at least one of ZnS and/or ZnSe.
6. The optical system as recited in claim 1, wherein the coating includes InAs.
7. The optical system as recited in claim 1, wherein the coating is doped with at least one of Te, S, Se, Si, and/or Sn.
8. The optical system as recited in claim 1, wherein the coating includes InGaAs.
9. The optical system as recited in claim 1, wherein the coating includes InAlAs.
10. The optical system as recited in claim 1, wherein the coating is formed as a film on the transparent substrate by at least one of metalorganic chemical vapor deposition (MOCVD), evaporation, molecular beam epitaxy (MBE), chemical spray pyrolysis, chemical vapor deposition (CVD), and/or aerosol-assisted CVD.
11. The optical system as recited in claim 1, further comprising an anti-reflection coating over the coating.
12. The optical system as recited in claim 1, wherein the coating has a sheet resistance of less than 200 Ohms per square.
13. The system as recited in claim 1, wherein the coating has its peak transmission in MWIR wavelengths, and wherein the imaging device is sensitive to MWIR wavelengths.
14. The system as recited in claim 1, wherein the coating is transparent in LWIR wavelengths, and wherein the imaging device is sensitive to LWIR wavelengths.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) So that those skilled in the art to which the subject disclosure appertains will readily understand how to make and use the devices and methods of the subject disclosure without undue experimentation, preferred embodiments thereof will be described in detail herein below with reference to certain figures, wherein:
(2)
(3)
(4)
(5)
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
(6) Reference will now be made to the drawings wherein like reference numerals identify similar structural features or aspects of the subject disclosure. For purposes of explanation and illustration, and not limitation, a partial view of an exemplary embodiment of a window for an imaging system in accordance with the disclosure is shown in
(7) Window 100 includes a transparent substrate 102 and a coating 104 over the transparent substrate 102. The coating 104 is made of an electrically conductive semiconductor, that is transparent to at least one of mid-wavelength infrared (MWIR) and/or long-wavelength infrared (LWIR) wavelengths. For example, in embodiments, the coating 104 has its peak transmission in MWIR wavelengths, and the transparent substrate 102 includes sapphire, aluminum oxynitride (AlON), and/or Spinel. The coatings can be doped with Te, S, Se, Si, or Sn to provide additional electrons for increased electrical conductivity. A suitable coating 104 for this peak transmission is InAs, a Te-doped InAs film (InAs:Te), which has low absorption in the 3 to 12 micron range with a peak transmission exceeding 80% from 4.6 to 5.1 microns without an anti-reflection (AR) coating. An optional anti-reflection coating 106 over the coating 104 increases transmittance through window 100. Other suitable coating materials for this application include InGaAs and/or InAlAs. These materials allow the coating 104 to have a sheet resistance of less than 200 ohms per square, with enough electron mobility to provide EMI shielding for imaging devices.
(8) It is also contemplated that the coating 104 can be is transparent in LWIR wavelengths, e.g., with its peak transmission in LWIR wavelengths. The transparent substrate 102 for such an application can include at least one of ZnS and/or ZnSe. Adding a group III element such as aluminum or gallium to InAs creates a compound (InGaAs, InAlAs) with a higher bandgap and extend transmission to shorter wavelengths. However, such materials are expected to have lower electron mobility than InAs and reduced long wavelength transmission. Therefore, there is a compromise between SWIR and MWIR to LWIR transmission.
(9) The coating 104 is formed as a film on the transparent substrate 102. This can be accomplished by metalorganic chemical vapor deposition (MOCVD), evaporation, molecular beam epitaxy (MBE), chemical spray pyrolysis, chemical vapor deposition (CVD), aerosol-assisted CVD, and/or any other suitable process.
(10) Referring now to
(11) The pattern can be selected for a given application with a tradeoff between EMI shielding and transparency to wider bands balanced for the application. For example, visible and SWIR wavelengths can transmit where there is no grid (between the grid lattices where substrate 202 is not covered with the grid of coating 204), and the grid itself can be transparent to MWIR and LWIR wavelengths. Furthermore, if the grid lines are embedded in a base coating or in substrate 202 itself with a close index of refraction (n=3.5 at 5 microns), diffraction from the grid is greatly reduced. There is a compromise between transmittance and sheet resistance as less surface area is covered by a grid than a continuous coating.
(12) With reference now to
(13) The methods and systems of the present disclosure, as described above and shown in the drawings, provide for electrically conductive coatings with superior properties including MWIR and/or LWIR optical transmittance. While the apparatus and methods of the subject disclosure have been shown and described with reference to preferred embodiments, those skilled in the art will readily appreciate that changes and/or modifications may be made thereto without departing from the scope of the subject disclosure.