C07F7/1896

Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features

A method for depositing a silicon-containing film, the method comprising: placing a substrate comprising at least one surface feature into a flowable CVD reactor which is at a temperature of from about −20° C. to about 100° C.; increasing pressure in the reactor to at least 10 torr; and introducing into the reactor at least one silicon-containing compound having at least one acetoxy group to at least partially react the at least one silicon-containing compound to form a flowable liquid oligomer wherein the flowable liquid oligomer forms a silicon oxide coating on the substrate and at least partially fills at least a portion of the at least one surface feature. Once cured, the silicon oxide coating has a low k and excellent mechanical properties.

L-GLUFOSINATE INTERMEDIATE AND L-GLUFOSINATE PREPARATION METHOD

Provided are L-glufosinate intermediate preparation method or L-glufosinate preparation method, the method, for preparing L-glufosinate intermediate or L-glufosinate from an L-homoserine derivative, comprising a step of preparing a compound of Chemical Formula 2 from a compound of Chemical Formula 1.

Electrolyte, electrochemical device and electronic device containing the same

The present application relates to an electrolyte, an electrochemical device and an electronic device comprising the same. The electrolyte of the present application includes a cyclic N-containing sulfonyl-compound and at least one of vinylene carbonate, fluoroethylene carbonate, lithium tetrafluoroborate, lithium difluoro(oxalato)borate or lithium difluorophosphate. The electrolyte of the present application may further include a sulfur-oxygen double bond containing compound and a silicon-containing carbonate. Compared with the prior art, using the electrolyte provided by the present application can effectively improve the high-temperature storage, cycle performance and overcharge performance of an electrochemical device, such as a lithium-ion battery.

ANTIMICROBIAL ORGANOSILANES

Organosilicon quaternary ammonium compounds, their formulations, including powdered and solid formulations, and methods of use to treat infections in humans and animals.

Process for the preparation of apalutamide

The present invention relates to a process for the preparation of Apalutamide of formula (A) Apalutamide is a latest-generation androgen receptor inhibitor, used to treat non-metastatic castration-resistant prostate cancer. ##STR00001##

Chemical agent for forming water repellent protective film and surface treatment method for wafers

According to the present disclosure, there is provided a water-repellent protective film-forming liquid chemical capable of achieving an improved water repellency imparting effect. The water-repellent protective film-forming liquid chemical according to the present disclosure contains the following compositions: (I) an aminosilane composition of the following general formula [1]; (II) a silicon compound of the following general formula [2]; and (III) an aprotic solvent, wherein the amount of the component (I) contained is 0.02 to 0.5 mass % based on the total amount of the components (I) to (III).
(R.sup.1).sub.aSi(H).sub.b(NH.sub.2).sub.4-a-b  [1]
(R.sup.2).sub.cSi(H).sub.dX.sub.4-c-d  [2]

Precursors and flowable CVD methods for making low-k films to fill surface features

A method for depositing a silicon-containing film, the method comprising: placing a substrate comprising at least one surface feature into a flowable CVD reactor which is at a temperature of from about −20° C. to about 400° C.; introducing into the reactor at least one silicon-containing compound having at least one acetoxy group to at least partially react the at least one silicon-containing compound to form a flowable liquid oligomer wherein the flowable liquid oligomer forms a silicon oxide coating on the substrate and at least partially fills at least a portion of the at least one surface feature. Once cured, the silicon oxide coating has a low k and excellent mechanical properties.

ENVIRONMENTALLY-FRIENDLY HYDROAZIDATION OF OLEFINS
20210284601 · 2021-09-16 ·

The present invention provides processes for the synthesis of organic azides, intermediates for the production thereof, and compositions related thereto.

Precursors and flowable CVD methods for making low-K films to fill surface features

A method for depositing a silicon-containing film, the method comprising: placing a substrate comprising at least one surface feature into a flowable CVD reactor which is at a temperature of from about −20° C. to about 100° C.; increasing pressure in the reactor to at least 10 torr; and introducing into the reactor at least one silicon-containing compound having at least one acetoxy group to at least partially react the at least one silicon-containing compound to form a flowable liquid oligomer wherein the flowable liquid oligomer forms a silicon oxide coating on the substrate and at least partially fills at least a portion of the at least one surface feature. Once cured, the silicon oxide coating has a low k and excellent mechanical properties.

Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features

A method for depositing a silicon-containing film, the method comprising: placing a substrate comprising at least one surface feature into a flowable CVD reactor which is at a temperature of from about 20 C. to about 100 C.; increasing pressure in the reactor to at least 10 torr; and introducing into the reactor at least one silicon-containing compound having at least one acetoxy group to at least partially react the at least one silicon-containing compound to form a flowable liquid oligomer wherein the flowable liquid oligomer forms a silicon oxide coating on the substrate and at least partially fills at least a portion of the at least one surface feature. Once cured, the silicon oxide coating has a low k and excellent mechanical properties.