A coated tool of the present disclosure may include a base and a coating layer covering at least a part of the base. The base may include a hard phase of a carbonitride including Ti and a binder phase including at least one of Co and Ni and has a thermal expansion coefficient at 25 to 1000° C. of 9.0×10.sup.−6/° C. or more. The coating layer may include a TiCN layer and an Al.sub.2O.sub.3 layer positioned on the TiCN layer. The TiCN layer may have a compressive stress of 250 to 500 MPa. The Al.sub.2O.sub.3 layer may have a thickness of 2 μm or more and a compressive stress of 450 MPa or more, and the value of the compressive stress is greater than the compressive stress of the TiCN layer.

There is provided a technique that includes: removing a deposit adhering to an inside of a process container by supplying a cleaning gas into the process container after performing a process of forming a film on a substrate in the process container, wherein the act of removing the deposit includes sequentially and repeatedly performing: a first process of supplying the cleaning gas into the process container until a predetermined first pressure is reached in the process container; a second process of stopping the supply of the cleaning gas and exhausting the cleaning gas and a reaction product generated by the cleaning gas remaining in the process container; and a third process of cooling an exhaust pipe that connects the process container and a vacuum pump, while maintaining a pressure inside the process container at a second pressure, which is lower than the first pressure, or lower.

There is provided a technique that includes: removing a deposit adhering to an inside of a process container by supplying a cleaning gas into the process container after performing a process of forming a film on a substrate in the process container, wherein the act of removing the deposit includes sequentially and repeatedly performing: a first process of supplying the cleaning gas into the process container until a predetermined first pressure is reached in the process container; a second process of stopping the supply of the cleaning gas and exhausting the cleaning gas and a reaction product generated by the cleaning gas remaining in the process container; and a third process of cooling an exhaust pipe that connects the process container and a vacuum pump, while maintaining a pressure inside the process container at a second pressure, which is lower than the first pressure, or lower.

Methods and systems for forming a forming a nitrogen-containing carbon film and structures formed using the methods or systems are disclosed. Exemplary methods include providing a precursor with carbon-terminated carbon-nitrogen bonds. The methods can further include providing a reactant to the reaction chamber.

A surface-coated cutting tool includes a substrate and a coating formed on a surface of the substrate, the coating including one or two or more layers, at least one of the layers being an Al-rich layer including hard particles, the hard particle having a sodium chloride type crystal structure, and including a first unit phase in a form of a plurality of lumps and a second unit phase interposed between the lumps of the first unit phase, the first unit phase being composed of a nitride or carbonitride of Al.sub.xTi.sub.1-x, the first unit phase having an atomic ratio x of Al of 0.7 or more and 0.96 or less, the second unit phase being composed of a nitride or carbonitride of Al.sub.yTi.sub.1-y, the second unit phase having an atomic ratio y of Al exceeding 0.5 and less than 0.7.

In a vanadium nitride film formed on a surface of a base material, a ratio V [at %]/N [at %] between a vanadium element concentration and a nitrogen element concentration in the film is 1.08 or more and a chlorine element concentration in the film is 1 at % or more and 5 at % or less.

In a vanadium nitride film formed on a surface of a base material, a ratio V [at %]/N [at %] between a vanadium element concentration and a nitrogen element concentration in the film is 1.08 or more and a chlorine element concentration in the film is 1 at % or more and 5 at % or less.

A coated tool of the present disclosure may include a base and a coating layer covering at least a part of the base. The base may include a hard phase of a carbonitride including Ti and a binder phase including at least one of Co and Ni and has a thermal expansion coefficient at 25 to 1000° C. of 9.0×10.sup.−6/° C. or more. The coating layer may include a TiCN layer and an Al.sub.2O.sub.3 layer positioned on the TiCN layer. The TiCN layer may have a compressive stress of 250 to 500 MPa. The Al.sub.2O.sub.3 layer may have a thickness of 2 μm or more and a compressive stress of 450 MPa or more, and the value of the compressive stress is greater than the compressive stress of the TiCN layer.

A surface-coated cutting tool includes a substrate and a coating that is disposed on the substrate and formed so as to cover at least a portion of a flank face, in which the coating includes an inner layer and an outer layer formed on the inner layer, the inner layer is formed of at least one layer and includes an aluminum oxide layer as a layer in contact with the outer layer, the outer layer has a multilayer structure that includes three or more layers stacked on top of one another, and each of the layers that constitute the multilayer structure contains titanium.

A coated tool of the present disclosure is provided with a base member and a coating layer located on a surface of the base member. The coating layer includes a TiCNO layer and an Al.sub.2O.sub.3 layer. The Al.sub.2O.sub.3 layer is located in contact with the TiCNO layer at a position farther from the base member than the TiCNO layer is. The TiCNO layer includes a composite protrusion including a first protrusion that projects toward the Al.sub.2O.sub.3 layer, a second protrusion that projects from the first protrusion in a direction intersecting a direction in which the first protrusion projects, and a third protrusion that projects from the second protrusion in a direction intersecting the direction in which the second protrusion projects.