Patent classifications
C08F12/20
METHOD FOR PRODUCING FLUORINE-CONTAINING POLYMER AND FLUORINE-CONTAINING POLYMER
A method for producing a fluorine-containing polymer of the present disclosure includes reacting a polymer comprising a unit represented by the following Formula (I) with a fluorine-containing compound represented by the following Formula (II), to obtain a fluorine-containing polymer comprising a unit represented by the following Formula (III).
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METHOD FOR PRODUCING FLUORINE-CONTAINING POLYMER AND FLUORINE-CONTAINING POLYMER
A method for producing a fluorine-containing polymer of the present disclosure includes reacting a polymer comprising a unit represented by the following Formula (I) with a fluorine-containing compound represented by the following Formula (II), to obtain a fluorine-containing polymer comprising a unit represented by the following Formula (III).
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Polymer, negative resist composition, and pattern forming process
A polymer comprising recurring units derived from vinylanthraquinone, recurring units containing a benzene ring having a hydroxyl-bearing tertiary alkyl group bonded thereto, and recurring units derived from hydroxystyrene is provided. The polymer is used as a base resin to formulate a negative resist composition having a high resolution and minimal LER.
Polymer, negative resist composition, and pattern forming process
A polymer comprising recurring units derived from vinylanthraquinone, recurring units containing a benzene ring having a hydroxyl-bearing tertiary alkyl group bonded thereto, and recurring units derived from hydroxystyrene is provided. The polymer is used as a base resin to formulate a negative resist composition having a high resolution and minimal LER.
COMPOSITION, MODIFICATION METHOD AND SELECTIVE MODIFICATION METHOD OF BASE MATERIAL SURFACE, PATTERN-FORMING METHOD, AND POLYMER
A composition includes a first polymer and a solvent. The first polymer includes a first structural unit including a fluorine atom, and a group including a first functional group at an end of a main chain or a side chain of the first polymer. The first functional group is capable of forming a bond with a metal or a metalloid. The first structural unit preferably includes a fluorinated hydrocarbon group. The first structural unit is preferably derived from a (meth)acrylic ester containing a fluorine atom, or a styrene compound containing a fluorine atom. The first structural unit preferably contains 6 or more fluorine atoms.
COMPOSITION, MODIFICATION METHOD AND SELECTIVE MODIFICATION METHOD OF BASE MATERIAL SURFACE, PATTERN-FORMING METHOD, AND POLYMER
A composition includes a first polymer and a solvent. The first polymer includes a first structural unit including a fluorine atom, and a group including a first functional group at an end of a main chain or a side chain of the first polymer. The first functional group is capable of forming a bond with a metal or a metalloid. The first structural unit preferably includes a fluorinated hydrocarbon group. The first structural unit is preferably derived from a (meth)acrylic ester containing a fluorine atom, or a styrene compound containing a fluorine atom. The first structural unit preferably contains 6 or more fluorine atoms.
METHOD FOR PREPARING PARTICLES SUITABLE FOR CATALYSING OXYGEN REDUCTION OR HYDROGEN OXIDATION, THE PARTICLES BEING PROTON-CONDUCTING BY GRAFTING SPECIFIC PROTON-CONDUCTING FLUORINATED POLYMERS TO THE SURFACE THEREOF
A method for preparing particles comprising a material suitable for catalysing oxygen reduction or hydrogen oxidation, the particles being grafted with grafts consisting of at least one specific polymer comprising at least one repeating fluorinated styrene unit bearing at least one proton-conducting group.
METHOD FOR PREPARING PARTICLES SUITABLE FOR CATALYSING OXYGEN REDUCTION OR HYDROGEN OXIDATION, THE PARTICLES BEING PROTON-CONDUCTING BY GRAFTING SPECIFIC PROTON-CONDUCTING FLUORINATED POLYMERS TO THE SURFACE THEREOF
A method for preparing particles comprising a material suitable for catalysing oxygen reduction or hydrogen oxidation, the particles being grafted with grafts consisting of at least one specific polymer comprising at least one repeating fluorinated styrene unit bearing at least one proton-conducting group.
CONDUCTIVE POLYMER COMPOSITION, COATED ARTICLE, AND PATTERNING PROCESS
The present invention is a conductive polymer composition including: (A) a polyaniline-based conductive polymer having two or more kinds of repeating units shown by the following general formula (1); and (B) a dopant polymer which contains a repeating unit shown by the following general formula (2) and has a weight-average molecular weight in a range of 1,000 to 500,000.
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This provides a conductive polymer composition having good filterability and film-formability of a flat film onto an electron beam resist, and being suitably usable for a antistatic film for electron beam resist drawing having lower surface resistivity (/) to show excellent antistatic performance in an electron beam drawing process, and excellent peelability with H.sub.2O or an alkaline developer after drawing.
COMPOUND, METHOD FOR PREPARING SAME, AND SINGLE MOLECULE AND POLYMER DERIVED FROM SAME
The present specification relates to a compound of Chemical Formula 1, a method for preparing the same, and a single molecule and a polymer derived from the compound.