The present invention provides a splinter shield for a vacuum pump, capable of reducing costs of the splinter shield by obtaining a single sheet of splinter shield having a required strength, in which fastening strength to a fixing groove is enhanced to prevent the splinter shield from bending toward the inside of a pump and coming into contact with equipment inside the pump when air rushes into the pump through an inlet port and to prevent the splinter shield from falling. Furthermore, attachment and removal of the splinter shield with respect to the inlet port are facilitated. The present invention is a splinter shield for a vacuum pump in which a rim formed in a circumferential edge portion of the splinter shield is inserted into a fixing groove that is provided in a concave manner in an inner circumferential portion of an inlet port, and the splinter shield is provided in a tensioned manner to the inlet port by pushing a retaining ring into the fixing groove, wherein locking parts that are locked into the retaining ring at a plurality of sections in the rim are provided in a standing manner at substantially right angles to the rim.

The present invention provides a splinter shield for a vacuum pump, capable of reducing costs of the splinter shield by obtaining a single sheet of splinter shield having a required strength, in which fastening strength to a fixing groove is enhanced to prevent the splinter shield from bending toward the inside of a pump and coming into contact with equipment inside the pump when air rushes into the pump through an inlet port and to prevent the splinter shield from falling. Furthermore, attachment and removal of the splinter shield with respect to the inlet port are facilitated. The present invention is a splinter shield for a vacuum pump in which a rim formed in a circumferential edge portion of the splinter shield is inserted into a fixing groove that is provided in a concave manner in an inner circumferential portion of an inlet port, and the splinter shield is provided in a tensioned manner to the inlet port by pushing a retaining ring into the fixing groove, wherein locking parts that are locked into the retaining ring at a plurality of sections in the rim are provided in a standing manner at substantially right angles to the rim.

A pumping installation includes at least one first positive-displacement machine and one second positive-displacement machine, as well as a control module, in which installation a gas is evacuated from an enclosed volume by means of the first positive-displacement machine and/or the second positive-displacement machine. The pumping installation includes at least one control valve controlled by the control module and a pressure sensor for sensing the value of the pressure at the outlet of the first positive-displacement machine and/or a temperature sensor for sensing the value of the temperature at the outlet of the first positive-displacement machine in order to control the flow of gas between the enclosed volume and the outlet of the pumping installation.

A pumping installation includes at least one first positive-displacement machine and one second positive-displacement machine, as well as a control module, in which installation a gas is evacuated from an enclosed volume by means of the first positive-displacement machine and/or the second positive-displacement machine. The pumping installation includes at least one control valve controlled by the control module and a pressure sensor for sensing the value of the pressure at the outlet of the first positive-displacement machine and/or a temperature sensor for sensing the value of the temperature at the outlet of the first positive-displacement machine in order to control the flow of gas between the enclosed volume and the outlet of the pumping installation.

A turbomolecular pump, vacuum pumping system and method of evacuating a vacuum chamber is disclosed. The turbomolecular pump comprises: a rotor comprising a plurality of rotor blade rows, a stator comprising a plurality of stator blade rows and an outer casing, the rotor being rotatably mounted within the stator; wherein at least a portion of a surface of at least one of the rotor and the stator comprise a non-evaporable getter material.

A kit of parts for forming a foreline for coupling a process chamber to a vacuum pumping and/or abatement system, the kit comprising: a plurality of foreline segments; wherein each foreline segment is a pipe that comprises: a first substantially straight end portion; a second substantially straight end portion opposite to the first end portion; and an intermediate portion disposed between the first and second end portions and connected to the first and second end portions by respective bends; the first and second end portions are substantially parallel to each other; the intermediate portion is oblique to the first and second end portions; and the foreline segments are configured to be attached together so as to form a continuous foreline.

A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10.sup.−2 mbar to a second pressure between 10.sup.−3 mbar and 10.sup.−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.

A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10.sup.−2 mbar to a second pressure between 10.sup.−3 mbar and 10.sup.−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.

The present relates to a Metal hydride compressor control method for generating a variable output pressure P.sub._desired_outPut, comprising a first step of inflowing gaseous hydrogen into a metal hydride compartment at a constant temperature and then stopping the gaseous hydrogen inflow, a second step of heating the metal hydride to a predetermined temperature which corresponds to a temperature which passes through the α+β phase at the desired output pressure P.sub._desired_output, a third step of opening the output connection of the compressor and keeping it at a constant pressure by regulating the temperature to keep a constant output pressure P.sub._desired_outPut until the system completely leaves the α+β phase.

A cryopump has a cryogenic refrigerator with cold and colder stages that cool a radiation shield, a primary cryopumping array and a frontal array. The frontal array is coupled to the cold stage and is spaced from and wrapped around the frontally facing envelope of the primary cryopumping array. The frontal array may be recessed from the frontal opening and closer to the primary cryopumping array than to the frontal opening.