A turbomolecular pump is obtained in which a gas absorbing substance is placed without increasing the axial length of an inlet port due to the gas absorbing substance. The turbomolecular pump includes a rotor portion and a stator portion in a casing (outer cylinder 127). The turbomolecular pump includes a getter pump portion, which is placed in the stator portion or the casing, and a heater portion 402, which performs at least one of activation and regeneration of a gas absorbing substance 401 of the getter pump portion.

A turbomolecular pump is obtained in which a gas absorbing substance is placed without increasing the axial length of an inlet port due to the gas absorbing substance. The turbomolecular pump includes a rotor portion and a stator portion in a casing (outer cylinder 127). The turbomolecular pump includes a getter pump portion, which is placed in the stator portion or the casing, and a heater portion 402, which performs at least one of activation and regeneration of a gas absorbing substance 401 of the getter pump portion.

Materials, components, and methods consistent with the present invention are directed to the fabrication and use of micro-scale channels with a fluid, where the temperature and flow of the fluid is controlled through the geometry of the micro-scale channel and the configuration of at least a portion of the wall of the micro-scale channel and the constituent particles that make up the fluid. Moreover, the wall of the micro-scale channel and the constituent particles are configured such that collisions between the constituent particles and the wall are substantially specular.

Materials, components, and methods consistent with the present invention are directed to the fabrication and use of micro-scale channels with a fluid, where the temperature and flow of the fluid is controlled through the geometry of the micro-scale channel and the configuration of at least a portion of the wall of the micro-scale channel and the constituent particles that make up the fluid. Moreover, the wall of the micro-scale channel and the constituent particles are configured such that collisions between the constituent particles and the wall are substantially specular.

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.

Materials, components, and methods consistent with the present invention are directed to the fabrication and use of micro-scale channels with a fluid, where the temperature and flow of the fluid is controlled through the geometry of the micro-scale channel and the configuration of at least a portion of the wall of the micro-scale channel and the constituent particles that make up the fluid. Moreover, the wall of the micro-scale channel and the constituent particles are configured such that collisions between the constituent particles and the wall are substantially specular.

Materials, components, and methods consistent with the present invention are directed to the fabrication and use of micro-scale channels with a fluid, where the temperature and flow of the fluid is controlled through the geometry of the micro-scale channel and the configuration of at least a portion of the wall of the micro-scale channel and the constituent particles that make up the fluid. Moreover, the wall of the micro-scale channel and the constituent particles are configured such that collisions between the constituent particles and the wall are substantially specular.

An integrated system and method are provided in an electrically powered airless paint spray unit for thermally monitoring the heat generating elements of the spray unit and provide thermal protection for the spray unit and the monitored heat generating elements. The temperatures of various heat generating elements of the paint spray unit are measured and directed to the motor controller of the electric motor of the unit the microprocessor of which is programmed to adjust the power level to the motor in response to excessive temperature readings of the monitored elements or shut off power to the motor in the event any of the temperature readings are greater than a maximum temperature assigned to the monitored element.

An integrated system and method are provided in an electrically powered airless paint spray unit for thermally monitoring the heat generating elements of the spray unit and provide thermal protection for the spray unit and the monitored heat generating elements. The temperatures of various heat generating elements of the paint spray unit are measured and directed to the motor controller of the electric motor of the unit the microprocessor of which is programmed to adjust the power level to the motor in response to excessive temperature readings of the monitored elements or shut off power to the motor in the event any of the temperature readings are greater than a maximum temperature assigned to the monitored element.