There is provided a technique that includes: a controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate. The controller acquires device data, which includes at least one of a current value, a rotational speed, and a back pressure of a pump, in a specific step among the plurality of steps and compares an acquired value of the device data with a previously acquired value of the device data. The controller generates a notification if at least one of the following conditions is met: the acquired value for the current value is larger than the previously acquired value for the current value, the acquired value for the back pressure is larger than the previously acquired value for the back pressure, and the acquired value for the rotational speed is smaller than the previously acquired value for the rotational speed.

Methods and systems to provide compressed air via exhaust gases of an internal combustion engine are presented. In one example, a pump comprising two pistons is driven via engine exhaust gases. On piston within the pump moves in response to the exhaust gases while the other piston acts to compress air.

An analysis method of absolute energy efficiency and relative energy efficiency of the compressed air system. For the compressed air system operating in a form of a single compressor, a gas flow rate and a corresponding operating power of the compressor operating in the single compressor model are measured under a specified flow rate. Meanwhile, influencing factors of the compressor operation are monitored. The absolute energy efficiency of the compressor is defined, and a curve of the absolute energy efficiency of the compressor varying with the operating time versus the above factors are plotted in a same coordinate system. Obtaining absolute energy efficiency data of the compressor in a corresponding state. By analyzing the absolute energy efficiency under corresponding conditions and based on the corresponding chart, the actual unit consumption of a given single compressor and its changing rule under different production and environmental operating conditions can be intuitively analyzed.

A power-saving optimization operation method and switching point determining method for a water pump unit. In the parallel water pump units, k water pumps converters form a sub-pump unit A. The water output Q.sub.1 of a first water pump in the sub-pump unit A, the input power P.sub.1 of the frequency converter corresponding to Q.sub.1 and the operating frequency f.sub.1 of the frequency converter corresponding to Q.sub.1 are recorded, where Q.sub.A=Q.sub.1, P.sub.A=P.sub.1. The Q.sub.A-P.sub.A curve of an operating water pump serves as the working curve w.sub.1, where Q.sub.A=mQ.sub.1 and P.sub.A=mP.sub.1, and k≥m≥2. The working curve w.sub.m of m operating water pumps operating at the same frequency is obtained, where f.sub.1=f.sub.2= . . . =f.sub.m. The intersection point of the working curve w.sub.m-1 and the working curve w.sub.m is the optimal switching point between m-1 operating water pumps and m operating water pumps under the constant pressure H.sub.s.

A system for mounting an annular component on a shaft, comprising (a) a hydraulic nut having an annular coaxial cavity and a ring-like piston, displaceable within the cavity; (b) a displacement sensor for providing a displacement signal indicating the axial displacement of the piston within the cavity; (c) a wireless displacement transmitter for transmitting the displacement signal; (d) a pressure sensor for providing a pressure signal indicating a pressure within the cavity; (e) a wireless pressure transmitter for transmitting the pressure signal; (f) a pump arranged to pump fluid into the cavity; and (g) a remote control device having a communications device arranged to receive transmitted pressure and displacement signals, wherein the remote control device is arranged to output control information for controlling the pump.

A power-saving optimization operation method and switching point determining method for a water pump unit. In the parallel water pump units, k water pumps converters form a sub-pump unit A. The water output Q.sub.1 of a first water pump in the sub-pump unit A, the input power P.sub.1 of the frequency converter corresponding to Q.sub.1 and the operating frequency f.sub.1 of the frequency converter corresponding to Q.sub.1 are recorded, where Q.sub.A=Q.sub.1, P.sub.A=P.sub.1. The Q.sub.A−P.sub.A curve of an operating water pump serves as the working curve w.sub.1, where Q.sub.A=mQ.sub.1 and P.sub.A=mP.sub.1, and k≥m≥2. The working curve w.sub.m of m operating water pumps operating at the same frequency is obtained, where f.sub.1=f.sub.2= . . . =f.sub.m. The intersection point of the working curve w.sub.m−1 and the working curve w.sub.m is the optimal switching point between m−1 operating water pumps and m operating water pumps under the constant pressure H.sub.s.

The present invention provides wireless sensor technology seamlessly integrated into a pump system having a pump, a motor and a drive, has diagnostic and prognostic intelligence that utilizes sensor data, allows real-time condition monitoring; enables easy access to data and analytics via smart devices (i.e., smart phones and tablets); allows for easy remote monitoring (i.e., web portal) of the pump system; allows self-learning artificial intelligence (AI) built-in that adapts to changing conditions; and allows for smart pump system remote control. In operation, the present invention monitors the health and performance of the pump system that allows the user to get real-time data and intelligence virtually anywhere and anytime, as well as real-time diagnostics and prognostics, and also allows for smart control of the pump system remotely via smart device, and reduces downtime of equipment.

A method of driving a pump is used in a pressure-applying apparatus, the apparatus including a flow passage, a pump configured to impart pressure into the flow passage, an opening and closing valve configured to open and close the flow passage, a pressure detector configured to detect pressure in the flow passage, and an atmospheric air open valve configured to open an interior of the flow passage to atmospheric air. The method includes driving the pump after closing the opening and closing valve and opening the atmospheric air open valve, and evaluating a state of the pump, based on one of: the pressure detected by the pressure detector at a time at which a predetermined time period has elapsed after closing the atmospheric air open valve, and a time from closing of the atmospheric air open valve until detection of a predetermined pressure by the pressure detector.

A hydraulic system includes: a cylinder that moves a moving object in a vertical direction by extension and retraction of a rod; a first bidirectional pump connected to a head-side chamber of the cylinder by a first supply/discharge line; a second bidirectional pump connected to a rod-side chamber of the cylinder by a second supply/discharge line and coupled to the first bidirectional pump in a manner enabling torque to be transmitted between the first and second bidirectional pumps; a relay line connecting the first and second bidirectional pumps such that a hydraulic liquid discharged from one of the first and second bidirectional pumps is introduced into the other of the first and second bidirectional pumps; and a servomotor that drives the first or second bidirectional pump. At least one of the first and second bidirectional pumps is a variable displacement pump whose delivery capacity per rotation is freely variable.

The hand-operated air pump is a mechanical device. The hand-operated air pump compresses atmospheric gas for use in an inflatable structure. The hand-operated air pump comprises a housing and a pump structure. The housing contains the pump structure. The housing transfers externally provisioned motive forces that are required to operate the pump structure. The pump structure compresses the atmospheric gas used in the inflatable structure. The pump structure transports the compressed atmospheric gas to the inflatable structure. The pump structure measures the pressure of atmospheric gas contained in the inflatable structure.