A vacuum system having a condenser and a root vacuum pump set includes an independent inlet condenser set having an inlet end for receiving vapor inputted from an output of an air cooling power generator condenser of a generator; air in the vapor being condensed, and the surplus air is outputted; a root vacuum pump set including at least one root vacuum pump; the root vacuum pump set further including an input end and an output end; the input end being connected to the independent inlet condenser set; air outputted from the independent inlet condenser set being inputted to the at least one root vacuum pump for compression and then the compressed air being outputted from the output end; and a backing pump connected to the output end of the root vacuum pump set by using an output pipe; the backing pump serving to receive air outputted from the root vacuum pump set.

A scroll type gas machine that can suppress wear of tip seals is provided. The scroll type compressor includes: a fixed scroll 11 having a helical wrap 16; an orbiting scroll 12 having a helical wrap 21; a drive shaft 13 that causes the orbiting scroll 12 to orbit relative to the fixed scroll 11; and a helical tip seal 29A inserted into a seal groove 28A of the wrap 21. The tip seal 29A has: a groove 36A that has an opening at a central portion of a sliding surface 30 in the seal width direction; and a communication groove 37A that establishes communication between the inside of the groove 36A and a working chamber S.sub.H on the inner side in the wrap width direction. The groove 36A is provided in a range where the differential pressure (P.sub.H−P.sub.L) is equal to or higher than 0.1 Mpa between the working chamber S.sub.H on the inner side in the wrap width direction and a working chamber S.sub.L on the outer side in the wrap width direction. The communication groove 37A is shorter than the groove 36A in the seal extension direction.

An apparatus for applying a vacuum during a surgical procedure can include a vacuum pump assembly having a port, a first housing, a second housing, a first silencer or tubular magnet and a second silencer. The first housing can define a first cavity receiving the vacuum pump assembly therein. A portion of the first housing can be formed by a portion of the port. The second housing can define a second cavity receiving the first housing therein. A portion of the second housing can be formed by a second portion of the port. The first silencer or tubular magnet can be coupled to the first housing and can have a longitudinal extent along a longitudinal axis. The first silencer or tubular magnet can extend from the first housing within the second cavity. The second silencer can be coupled to the second housing and can have a longitudinal extent along a longitudinal axis. The second silencer can extend from the second housing within second cavity.

One embodiment of a method for operating an internal combustion engine under a pressure less than atmospheric pressure includes the steps of positioning a vacuum pump such that said vacuum pump is in fluid communication with a crankcase of said internal combustion engine, connecting a discharge of said vacuum pump to a separator, wherein a portion of said discharge of said vacuum pump condenses in said separator, connecting a vapor discharge of said separator to a filter, wherein said filter removes a portion of volatile organic compounds from said vapor discharge, and venting said filter to an ambient atmosphere.

A method for evacuating a process space by initially evacuating the process space to a pressure limit value using two compressors operated in parallel, and on reaching or undershooting the pressure limit value, the process space is subsequently evacuated using the two compressors operated in series.

A method for evacuating a process space by initially evacuating the process space to a pressure limit value using two compressors operated in parallel, and on reaching or undershooting the pressure limit value, the process space is subsequently evacuated using the two compressors operated in series.

A lubricant recovery system for vacuum pump comprising a reservoir to store lubricant. Supply lines connected to the reservoir wherein the supply line can be connected to the vacuum pump to supply the lubricant to the vacuum pump. Further, a return line is connected to the reservoir to return a lubricant-air mixture from the vacuum pump to the reservoir by the return line. An air filter is disposed inside the reservoir to separate lubricant from the air wherein the filter is connected to a scavenge line which is connectable to a low-pressure region of the vacuum pump such that lubricant separated from the lubricant-air mixture by the air filter is drawn via the scavenge line into the vacuum pump. In accordance to the present invention a valve is disposed in the scavenge line to selectively separate the air filter from the vacuum pump.

A lubricant recovery system for vacuum pump comprising a reservoir to store lubricant. Supply lines connected to the reservoir wherein the supply line can be connected to the vacuum pump to supply the lubricant to the vacuum pump. Further, a return line is connected to the reservoir to return a lubricant-air mixture from the vacuum pump to the reservoir by the return line. An air filter is disposed inside the reservoir to separate lubricant from the air wherein the filter is connected to a scavenge line which is connectable to a low-pressure region of the vacuum pump such that lubricant separated from the lubricant-air mixture by the air filter is drawn via the scavenge line into the vacuum pump. In accordance to the present invention a valve is disposed in the scavenge line to selectively separate the air filter from the vacuum pump.

The present disclosure provides a product removal apparatus, a treatment system, and a product removal method that can sufficiently remove the products deposited inside a vacuum pump and also suppress corrosion of the base material of the vacuum pump. The product removal apparatus of the present disclosure includes: a sensor for measuring the temperature of the inside of a vacuum pump, the thickness of a film of a product in a flow path in the vacuum pump, or the vibration frequency of the vacuum pump; a gas supplier for supplying a gas containing hydrogen halide, fluorine, chlorine, chlorine trifluoride, or fluorine radicals to the vacuum pump; and a control device. The control device controls the gas supplier so that the supply of the gas to the vacuum pump is stopped depending on a rate of temperature increase calculated from the temperature measured by the sensor, the film thickness, or the vibration frequency.

A multi-stage vacuum pump comprising a stator defining multiple pumping chambers is discussed. The stator comprises a plurality of transfer channels for providing a fluid passage from an outlet port of one of the plurality of pumping chambers to an inlet port of a subsequent pumping chamber. Some of the transfer channels comprise two side channel sections on opposing sides of the stator. One of the transfer channels comprises a single side channel section on one side of the stator. The vacuum pump further comprises a gas ballast inlet channel arranged on an other side of the stator to the one side of the stator.