Disclosed is a safety-reinforced water-ring vacuum pump including a built-in hogging flow path. The water-ring vacuum pump includes a first-stage body, a second-stage body, and an impeller. The first-stage body includes a gas inlet port through which gas is suctioned and a seal water supply port through which seal water is supplied. The second-stage body includes a mixed fluid outlet port through which a mixed fluid of the gas and the seal water is discharged. The impeller is rotated at high speed by an internal drive shaft penetrating the first-stage body and the second-stage body. The first-stage body has a fluid-mixing space provided therein, the fluid-mixing space having a mixed flow of the gas and the seal water therein. The second-stage body has a fluid guide space and an internal hogging flow path provided therein, the internal hogging flow path communicating with the fluid guide space.

An electrically driven positive displacement compressor includes an electric drive motor configured to drive the compressor, the electric drive motor including a ring shaped electric stator and an electric rotor arranged inside the ring shaped electric stator and defining a cavity within the electric rotor. The compressor also includes a working chamber having an inlet and an outlet, the working chamber being arranged at least partially inside the cavity of the electric rotor. The compressor additionally includes a compressor rotor arranged inside the working chamber and coupled to the electric rotor.

An electrically driven positive displacement compressor includes an electric drive motor configured to drive the compressor, the electric drive motor including a ring shaped electric stator and an electric rotor arranged inside the ring shaped electric stator and defining a cavity within the electric rotor. The compressor also includes a working chamber having an inlet and an outlet, the working chamber being arranged at least partially inside the cavity of the electric rotor. The compressor additionally includes a compressor rotor arranged inside the working chamber and coupled to the electric rotor.

The invention relates to a vacuum pump for a motor vehicle, comprising a pump housing surface, on which a noise reduction hood delimiting a sound damping volume is mounted. The invention is characterized in that a multi-functional decoupling element is located between the pump housing surface and the noise reduction hood, said element carrying out a sealing function and a valve function in addition to a sound decoupling function.

The invention relates to a vacuum pump for a motor vehicle, comprising a pump housing surface, on which a noise reduction hood delimiting a sound damping volume is mounted. The invention is characterized in that a multi-functional decoupling element is located between the pump housing surface and the noise reduction hood, said element carrying out a sealing function and a valve function in addition to a sound decoupling function.

A turbocharger generating a vacuum negative pressure may include a compressor which receives, through a turbocharger shaft, a rotational force of a turbine which rotates based on exhaust gas from an engine and turbo-charges an intake which is supplied to the engine, and a motorless vacuum pump coupled to the turbine through a center housing which is coupled to the compressor and is configured to be rotated by the turbocharger shaft, thus generating a vacuum negative pressure.

A turbocharger generating a vacuum negative pressure may include a compressor which receives, through a turbocharger shaft, a rotational force of a turbine which rotates based on exhaust gas from an engine and turbo-charges an intake which is supplied to the engine, and a motorless vacuum pump coupled to the turbine through a center housing which is coupled to the compressor and is configured to be rotated by the turbocharger shaft, thus generating a vacuum negative pressure.

Durability of a vacuum pump is prevented from degrading by suppressing abrasion of a rotor and a side plate. The vacuum pump has a hollow cylinder chamber S having an opening at an end portion of a casing body, a rotor which is rotationally driven in the cylinder chamber S, a side plate for blocking the opening of the cylinder chamber S, and a pump cover which is disposed at the opposite side to the rotor so as to sandwich the side plate between the pump cover and the rotor, and the side plate is provided with an intercommunication port which confronts a shaft hole of the rotor and intercommunicates with a space between the side plate and the pump cover.

Durability of a vacuum pump is prevented from degrading by suppressing abrasion of a rotor and a side plate. The vacuum pump has a hollow cylinder chamber S having an opening at an end portion of a casing body, a rotor which is rotationally driven in the cylinder chamber S, a side plate for blocking the opening of the cylinder chamber S, and a pump cover which is disposed at the opposite side to the rotor so as to sandwich the side plate between the pump cover and the rotor, and the side plate is provided with an intercommunication port which confronts a shaft hole of the rotor and intercommunicates with a space between the side plate and the pump cover.

A vacuum pumping arrangement includes a first primary pump having an inlet and an outlet, and a first common pumping line fluidly connected to the inlet, the first common pumping line including a plurality of first common pumping line inlets each of which is fluidly connectable to at least one vacuum process chamber forming the semiconductor fabrication tool, the first primary pump and the first common pumping line handling deposition process flows. The pumping arrangement further including a second primary pump having an inlet and an outlet, and a second common pumping line fluidly connected to the inlet of the second primary pump, the second common pumping line including a plurality of second pumping line inlets each of which is fluidly connectable to at least one process chamber forming the semiconductor fabrication tool, the second primary pump and the second common pumping line handling cleaning process flows.