A vacuum pumping arrangement includes a first primary pump having an inlet and an outlet, and a first common pumping line fluidly connected to the inlet, the first common pumping line including a plurality of first common pumping line inlets each of which is fluidly connectable to at least one vacuum process chamber forming the semiconductor fabrication tool, the first primary pump and the first common pumping line handling deposition process flows. The pumping arrangement further including a second primary pump having an inlet and an outlet, and a second common pumping line fluidly connected to the inlet of the second primary pump, the second common pumping line including a plurality of second pumping line inlets each of which is fluidly connectable to at least one process chamber forming the semiconductor fabrication tool, the second primary pump and the second common pumping line handling cleaning process flows.

The present invention provides an improved vacuum pump assembly for a motor vehicle comprising of a housing, a rotor, modified vane, a sealing ring, a cover, wherein, the modified vane containing a vane slider is having at least one oil vent or relief hole or slot, for the reduction of the exit port oil peak pressure, by channelizing oil supplies to the vane top and bottom face, thereby improving the seal-ability between the moving and stationary part of the pump; and the modified vane further having an oil vent control at the exit port, for maintaining oil pressure and reducing the exit port hydraulic pressure, leading to reduction in the opposite end vane slider tip load causing low friction between the pump housing, the vane and vane slider, and further channelizing the excess amount of oil to the vane top face which creates additional sealing between the vane and the housing, reducing the air leakage between the low pressure chamber and high pressure chamber inside the pump.

The present invention provides an improved vacuum pump assembly for a motor vehicle comprising of a housing, a rotor, modified vane, a sealing ring, a cover, wherein, the modified vane containing a vane slider is having at least one oil vent or relief hole or slot, for the reduction of the exit port oil peak pressure, by channelizing oil supplies to the vane top and bottom face, thereby improving the seal-ability between the moving and stationary part of the pump; and the modified vane further having an oil vent control at the exit port, for maintaining oil pressure and reducing the exit port hydraulic pressure, leading to reduction in the opposite end vane slider tip load causing low friction between the pump housing, the vane and vane slider, and further channelizing the excess amount of oil to the vane top face which creates additional sealing between the vane and the housing, reducing the air leakage between the low pressure chamber and high pressure chamber inside the pump.

A method for regulating the temperature at an outlet channel of a compressor or a vacuum element, comprising providing a pressure regulating valve on a influence channel, said influence channel being in direct fluid communication with the compressor or vacuum element, said valve regulating the pressure within the compressor or vacuum element by adjusting the volume of fluid flowing between a process channel and the compressor or vacuum element relative to the difference between the pressure value within said compressor or vacuum element and a set pressure value, and comprises starting the compressor or vacuum element and starting a pre-purge cycle by connecting the inlet channel to a supply of a purge gas for a preselected time interval; connecting the influence channel to a process channel; and disconnecting the inlet channel from the process channel, for maintaining a set temperature within the vacuum element for a selected time interval.

A method for regulating the temperature at an outlet channel of a compressor or a vacuum element, comprising providing a pressure regulating valve on a influence channel, said influence channel being in direct fluid communication with the compressor or vacuum element, said valve regulating the pressure within the compressor or vacuum element by adjusting the volume of fluid flowing between a process channel and the compressor or vacuum element relative to the difference between the pressure value within said compressor or vacuum element and a set pressure value, and comprises starting the compressor or vacuum element and starting a pre-purge cycle by connecting the inlet channel to a supply of a purge gas for a preselected time interval; connecting the influence channel to a process channel; and disconnecting the inlet channel from the process channel, for maintaining a set temperature within the vacuum element for a selected time interval.

A scroll vacuum pump has an axially extending drive shaft with an eccentric shaft portion, such that rotation of the drive shaft imparts an orbiting motion to an orbiting scroll relative to a fixed scroll. An axial adjustment mechanism has a plurality of adjustment members angularly spaced around the drive shaft and extending through the pump housing towards the orbiting scroll, the plurality of adjustment members each being configured to provide an independently adjustable axial position of the orbiting scroll. A plurality of sealing means isolate the plurality of adjustment members from a pump chamber, the plurality of sealing means extending around each of the plurality of adjustment members and comprising at least one flexible portion such that one end of the sealing means may orbit relative to a fixed other end of the sealing means.

An electric priming pump device detachably couples to a centrifugal water pump on the suction side of the water pump, for priming thereof. The device comprises an enclosure and a base, wherein the enclosure contains a rotary vane peripheral bypass vacuum motor which is pressed against the base to form an air-tight seal. The device generates a vacuum for priming through use of a rotary vane peripheral bypass vacuum motor, which can remove large volumes of air quickly. An opening in the base receives a check valve fitting to protect the motor from water and slows loss of vacuum pressure after use. Additionally, a cone shaped protective cover protects components in the device and provides space for branding or advertisement.

An electric priming pump device detachably couples to a centrifugal water pump on the suction side of the water pump, for priming thereof. The device comprises an enclosure and a base, wherein the enclosure contains a rotary vane peripheral bypass vacuum motor which is pressed against the base to form an air-tight seal. The device generates a vacuum for priming through use of a rotary vane peripheral bypass vacuum motor, which can remove large volumes of air quickly. An opening in the base receives a check valve fitting to protect the motor from water and slows loss of vacuum pressure after use. Additionally, a cone shaped protective cover protects components in the device and provides space for branding or advertisement.

A vacuum device, in particular to a vacuum pump, includes a reservoir for an operating medium; an outlet connector arranged at or in the reservoir; and a selection device that selectively closes or opens the outlet connector or an outlet line, which is connected via the outlet connector to the reservoir, in dependence on whether the operating medium or water is present at the outlet connector.

A vacuum device, in particular to a vacuum pump, includes a reservoir for an operating medium; an outlet connector arranged at or in the reservoir; and a selection device that selectively closes or opens the outlet connector or an outlet line, which is connected via the outlet connector to the reservoir, in dependence on whether the operating medium or water is present at the outlet connector.