A fluid distribution system includes a mass flow controller and a first manifold assembly. The mass flow controller includes first and second end ports each extending from a lower end of the mass flow controller, proximate corresponding first and second sides of the mass flow controller, for lateral flow through the mass flow controller from the first end port to the second end port. The first manifold assembly includes a first end connection coupled to the first end port of the mass flow controller. The first manifold assembly includes a first manifold body extending parallel to the first side of the mass flow controller, and a plurality of first valve subassemblies retained in the first manifold body and arranged across a plane extending substantially parallel to the first side of the mass flow controller, with valve movement perpendicular to the first side of the mass flow controller.

A valve device includes a valve body; a cylindrical member provided in an accommodation recess and communicating with the first flow path; a valve seat supported by the cylindrical member; a seal member interposed between the periphery of the opening of first flow path on the bottom surface of the accommodation recess and the lower end portion of the cylindrical member; an annular plate which is flexible, air-tightly or liquid-tightly fixed to an annular support portion formed on the inner peripheral surface of the accommodation recess, air-tightly or liquid-tightly fixed to an annular support portion formed on the outer peripheral surface of the cylindrical member and has a plurality of openings communicating with the second flow path; and a diaphragm that moves between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat.

A manifold body includes at least first and second valve body segments each comprising an upper perimeter wall portion defining a valve cavity and a lower base portion defining one or more flow ports, a unified leak test port, a first branch leak test passage extending from the unified leak test port to an outer peripheral portion of the valve cavity of the first valve body segment, radially outward of an outer seal surface in the valve cavity, and a second branch leak test passage extending from the unified leak test port to an outer peripheral portion of the valve cavity of the second valve body segment, radially outward of an outer seal surface in the valve cavity.

A joint includes a first block, a second block, and a single pipe section connecting the first block and the second block. The first block, the second block, and the single pipe have a first gas passage and a second gas passage inside therein. The first gas passage is formed so that a first port which opens at an outer surface of the first block, the single pipe section, and a second port which opens at an outer surface of the second block communicate with each other. The second gas passage is formed so that a third port and a fourth port which open at the outer surface of the second block communicate with each other. The second port is disposed between the third port and the fourth port.

A flow control device includes a stack of annular discs positioned in a flow path. Each disc includes fluid passageways extending between inner and outer perimeters of the disc, with each passageway defining a flow axis extending out of the disc and radially offset from a central axis of the discs. A plug is moveable relative to the discs between closed and open positions. In the closed position, a cylindrical section of the plug is positioned to block fluid flow through the annular discs. In the open position, the annular discs and a tapered section of the plug collectively define an annular vortex chamber. The fluid passageways in the annular discs and the tapered section of the plug collectively impart a rotational flow when the plug is in the open position and as fluid exits the annular discs.

An actuating member is provided. The actuating member acts on a valve core rod. A guide surface is arranged on the actuating member. A guide path is formed on the guide surface. The guide surface is configured to slidably abut against a top end of the valve core rod, so that the top end of the valve core rod selectively abuts against a position on the guide path at a different height, so as to adjust a position of the valve core rod in a valve port of a reversing valve, thereby changing a flow area at the valve port.

A fluid conduit connector includes a monolithic body having a first opening at a first side and a second opening at a second side. A throughbore extends from the first opening to the second opening. A first array of holes in the first side is positioned around the first opening, each hole of the first array of holes terminating within the body. A second array of holes in the first side is positioned around the first array of holes, each hole of the second array of holes extending through the body to the second side.

A module for a fluid circuit of a vehicle includes a unitary housing. The unitary housing of the module contains a fluid moving device, a fluid control device, and a power sharing connection. The power sharing device is configured to provide power to the fluid moving device and the fluid control device.

A manifold can determine a turnover scheme including a target turnover schedule of target turnover levels, based on an operation schedule and efficiency setting for a fluid distribution. Each target turnover level can correspond to a volume of fluid to be cycled through the fluid distribution system over a period of time. The manifold can operate respective valves and a supply device based on a target turnover level and determine a current turnover level from a flowrate detected by a flow sensor for at least one of the valves. The manifold can receive a current usage of the fluid distribution system and determine a required turnover level. An override status for the turnover scheme can be based on the efficiency setting and a comparison of the current, target, and the required turnover levels, and the manifold can operate respective valves and the supply device based on the override status.

A loadlock apparatus includes a loadlock chamber including a first opening and a second opening separated in a vertical direction; a first slit valve including a first valve plate configured to move between a first open position where the first opening is open and a first closed position where the first opening is closed, the first open position being a position moved downward from the first closed position; and a second slit valve including a second valve plate configured to move between a second open position where the second opening is open and a second closed position where the second opening is closed, the second open position being a position moved upward from the second closed position.