Provided is a valve device which can precisely adjust the flow rate while ensuring the flow rate of the fluid. A valve device includes a main actuator which receives a pressure of a supplied drive fluid and moves an operating member to an open position or closed position; an adjusting actuator arranged to receive at least a part of a force generated by the main actuator and for adjusting the position of the operating member positioned at the open position; and a pressure regulator provided in a feed path of the drive fluid to the main actuator and for regulating the pressure of the supplied drive fluid to suppress fluctuation of the pressure of the drive fluid supplied to the main actuator.

A protruding section formed at the one side end of a connector section provided in a valve is inserted into a recessed section formed as part of a valve placement section of a fluid apparatus. The valve is caused to pivot with the inserted portion that serves as a supporting point, and an engaging section formed at the front end of a lever of a hook section formed at the other side end of the connector section is allowed to engage with an engaging protruding section formed as part of the valve placement section of the fluid apparatus. The valve is thus attached to the fluid apparatus.

A driving stage of a servo valve, including a hydraulic ejector and a hydraulic receiver able to be moved relative to each other, one of the two hydraulic units being integral with a mobile unit, movable relative to a body of the servo valve through actuation means, characterized in that the actuation means comprise two piezoelectric actuators connected in series. Control device comprising a servo valve comprising such a driving stage.

A supercritical fluid chromatograph includes a supercritical flow path, a mobile phase supply section for supplying a mobile phase containing liquid carbon dioxide, a sample introduction section, a sample separation section, a detector, and a pressure control valve. A valve post-stage flow path is connected to a fluid outlet of the pressure control valve, and the inside of the valve post-stage flow path is maintained by pressure maintaining means at a pressure by which a mobile phase from the fluid outlet of the pressure control valve is not vaporized.

A piezoelectric element-driven valve includes a body provided with a fluid channel and a valve seat, a valve element which opens and closes the fluid channel by being in contact with and separated from the valve seat of the body, and piezoelectric actuators which drive the valve element to open and close by means of the extension of the piezoelectric element. In the piezoelectric element-driven valve, at least two piezoelectric actuators are arranged on a straight line via a spacer which allows pulling out of wiring.

A pressure control valve has: a passageway having a flow opening; an member displaceable relative to the opening for obstructing the opening by differing amounts; a piezo actuator; and a linkage mechanism adapted to amplify a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the member relative to the opening, wherein the linkage mechanism comprises a frame attached to a wall and fixed at a first end in relation to the passageway, a portion of the frame moveable in a first direction while being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending between the wall and the movable portion such that an expansion of the piezo actuator results in movement of the movable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the member.

A fluid system includes a fluid active region, a fluid channel, a convergence chamber, a sensor and plural valves. The fluid active region includes at least one fluid-guiding unit. The fluid-guiding unit is enabled under control to transport fluid to be discharged out through an outlet aperture. The fluid channel is in communication with the outlet aperture of the fluid active region, and has plural branch channels for splitting the fluid discharged from the fluid active region. The convergence chamber is in communication with the fluid channel. The sensor is disposed in the fluid channel for measuring fluid. The valves each of which is disposed in the corresponding branch channel, wherein the fluid is discharged out through the branch channels according to opened/closed states of the valves under control. The fluid system is capable of acquiring required flow rate, pressure and amount of the fluid to be transported.

A piezoelectric element-driven valve 1 including a main body, a valve element, piezoelectric actuators, a plurality of cylindrical actuator boxes arranged in series, a cylindrical outer connecting jig detachably connecting the adjacent actuator boxes and having an opening for drawing out wiring, a plurality of piezoelectric actuators accommodated in the actuator box respectively in the same direction, and a cylindrical inner connecting jig slidably accommodated in the outer connecting jig and having an opening for positioning the adjacent piezoelectric actuators and drawing out wiring.

A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.

A drive system (1) which is designed in particular as a robot (1a) and which has a fluid-operated linear drive (2), on the drive unit (7) of which linear drive, which drive unit can be driven so as to perform a drive movement (8), there is mounted an electrically and fluidically operable working unit (3). The linear drive (2) is equipped with a control valve device (16) which can be actuated by means of an internal electronic control device (32) in order to move the drive unit (7). Two drive pressure sensor devices (113) and a travel measuring device (114) are connected to the internal electronic control device (32), such that a position-controlled operation of the drive unit (8) is possible. The drive system (1) furthermore includes a flexible electrical cable arrangement (97) and a flexible fluid hose arrangement (95), which are fixed to the drive unit (7) and which serve for the supply of electricity and fluid to the working unit (3).