Example embodiments relate to microfluidic devices for controlling pneumatic microvalves. One embodiment includes a microfluidic device for independently controlling a plurality of pneumatic microvalves. The microfluidic device is couplable to a pressure source. The microfluidic device includes a first substrate. The microfluidic device also includes a flexible membrane covering the first substrate. Additionally, the microfluidic device includes a second substrate covering the flexible membrane. Further, the microfluidic device includes one or more fluidic channels at least partially defined in the first substrate. In addition, the microfluidic device includes a pressure couplable to the pressure source and branching into a plurality of pressure channels. Still further, the microfluidic device includes at least one pressure control switch per pressure channel.

According to an aspect, an active valve for an implantable device includes a base plate defining an opening, a piezo element, a diaphragm actuator coupled to the piezo element, and a protrusion coupled to the diaphragm actuator. The diaphragm actuator, in response to the piezo element being activated, is configured to move the protrusion into the opening in a first direction until the protrusion contacts a portion of the base plate.

A control device for a valve device can detect open/close state of the valve device without using limit switches. The valve device includes a diaphragm for opening and closing a flow path for flowing a fluid, a coil spring for biasing the diaphragm in the closing direction of flow path, a main actuator for driving it against the biasing force of the coil spring, and an adjusting actuator using a piezoelectric element for adjusting the opening degree of the flow path determined by the diaphragm. The controller detects the open/close state of flow path based on the voltage generated by the piezoelectric element of the adjusting actuator, and controls valve device using the detection signal.

A first lever portion includes a first point-of-effort portion, a first fulcrum portion, and a first point-of-load portion. A second lever portion has a second point-of-effort portion, a second fulcrum portion, and a second point-of-load portion. A first point-of-effort portion is located between a first fulcrum portion and a first point-of-load portion in a direction orthogonal to an axis of a stem. A second fulcrum portion is located between a second point-of-effort portion and a second point-of-load portion in the direction orthogonal to the axis. A distance between the second fulcrum portion and the second point-of-load portion is configured longer than a distance between the second fulcrum portion and the second point-of-effort portion. The second point-of-load portion of the second lever portion is displaced toward the stem and moves the stem toward the piezoelectric element by means of displacement of the intermediate member to the second lever portion side.

A process control device has an electropneumatic control unit which is used for activating a pneumatic actuating drive. The control unit has a fastening module by means of which it is fastened to a drive housing of the actuating drive. The control unit includes an interface plate which is separate from the fastening module, is mounted on a top side of the fastening module and is fluidically connected, through the fastening module, to the actuating drive. The control unit includes an electrically actuatable control valve device which is fixed to the fastening module by being mounted on the interface plate fixed to the fastening module. In this way, a process control device can be produced in an easily and variably configurable manner.

A flow rate control method for raising a flow rate performed in a flow control device having a first control valve, a second control valve downstream of the first control valve, and a pressure sensor for measuring a pressure between the first and the second control valves, comprises a step (a) of determining a pressure remaining downstream of the first control valve in a state of closing the second control valve, and a step (b) of controlling the pressure remaining downstream of the first control valve by adjusting the opening degree of the second control valve based on the output of the pressure sensor to flow the fluid downstream the second control valve at the first flow rate.

A micro-valve includes an orifice plate having a first surface, a second surface and an orifice extending from the first surface to the second surface. An actuating beam is disposed in spaced relation to the orifice plate. The actuating beam includes a base portion and a cantilevered portion. The base portion is separated from the orifice plate by a predetermined distance. The cantilevered portion extends from the base portion such that an overlapping portion thereof overlaps the orifice. The actuating beam is movable between a closed position and an open position. The micro-valve also includes a sealing structure including a sealing member disposed at the overlapping portion of the cantilevered portion. When the actuating beam is in the closed position, the cantilevered portion is positioned such that the sealing structure seals the orifice so as to close the micro-valve.

A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.

A servo valve comprising: a fluid transfer valve assembly includes: a housing having channel therethrough fluidly connecting a supply port, a return port and a control port formed in the housing; a moveable valve spool located within the channel and arranged to regulate flow of fluid between the supply port, the return port and the control port in response to a control signal; and a drive assembly configured to axially move the valve spool relative to the fluid transfer assembly in response to the control signal to regulate the fluid flow. The valve spool comprises a first spool part and a second spool part and the drive assembly comprises a piezoelectric actuator positioned between the first and the second spool parts within the channel. Then when a control signal is applied to the piezoelectric actuator it causes extension or contraction of the first and second piezoelectric actuator elements.

An execution system (100) for a fluid micro-injection device and a fluid micro-injection device are provided. The execution system (100) has a base body (110), a movable member (120), an executor and an adjusting member (130). The adjusting member (130) is disposed in the executor mounting cavity (110) and connected with the executor. The adjusting member (130) is adjustable for adjusting a pre-tightening force of the executor.