A vacuum valve including a housing, a closure unit with two valve plates, supported by a valve rod, and a carrier piece connected rigidly to the valve rod, a transmission unit, a drive unit with a base body and an actuator, a longitudinal linear guide, by which the transmission unit is guided parallel to a longitudinal adjusting direction relative to the base body, an oblique linear guide, by which the carrier piece is guided parallel to an oblique adjusting direction relative to the transmission unit, a spring acting between the transmission unit and the carrier piece, a stop device which blocks adjustment of the closure unit in the longitudinal adjusting direction in a middle position thereof, and a blocking unit, which in the locked state blocks an adjustment of the closure unit situated in the middle position counter to the longitudinal adjusting direction and, in the release state, allows adjustment.

A vacuum valve including a housing, a closure unit with two valve plates, supported by a valve rod, and a carrier piece connected rigidly to the valve rod, a transmission unit, a drive unit with a base body and an actuator, a longitudinal linear guide, by which the transmission unit is guided parallel to a longitudinal adjusting direction relative to the base body, an oblique linear guide, by which the carrier piece is guided parallel to an oblique adjusting direction relative to the transmission unit, a spring acting between the transmission unit and the carrier piece, a stop device which blocks adjustment of the closure unit in the longitudinal adjusting direction in a middle position thereof, and a blocking unit, which in the locked state blocks an adjustment of the closure unit situated in the middle position counter to the longitudinal adjusting direction and, in the release state, allows adjustment.

A vacuum valve having a valve body, a closure member, a valve rod which supports the closure member, a guide piece by which the valve rod is movably guided parallel to a longitudinal displacement direction, a longitudinal travel drive by which the valve rod is displaceable with respect to the guide piece parallel to the longitudinal displacement direction, a transverse travel drive, and a slide part which is movable by the transverse travel drive, is guided by a primary linear guide to be movable with respect to the valve body, and is guided by a secondary linear guide to be movable with respect to the guide piece. The primary and secondary linear guides each run at an angle of less than 45° with respect to the longitudinal displacement direction, and the primary linear guides form an angle of more than 3° and less than 45° with the secondary linear guides.

A vacuum valve having a valve body, a closure member, a valve rod which supports the closure member, a guide piece by which the valve rod is movably guided parallel to a longitudinal displacement direction, a longitudinal travel drive by which the valve rod is displaceable with respect to the guide piece parallel to the longitudinal displacement direction, a transverse travel drive, and a slide part which is movable by the transverse travel drive, is guided by a primary linear guide to be movable with respect to the valve body, and is guided by a secondary linear guide to be movable with respect to the guide piece. The primary and secondary linear guides each run at an angle of less than 45° with respect to the longitudinal displacement direction, and the primary linear guides form an angle of more than 3° and less than 45° with the secondary linear guides.

The invention relates to a high-frequency grounding device (40) for use with a vacuum valve for closing and opening a valve opening of a vacuum chamber system, having a grounding band (42) made of a conductive material for discharging electrical charges occurring on the vacuum valve, wherein the grounding band has a first end (41) and a second end (43) and, for grounding the vacuum valve, is designed to be connected at the first end to a valve closure of the vacuum valve, and to be connected at the second end to a component of the vacuum chamber system, wherein the high-frequency grounding device has a correction impedance, wherein the grounding band is coupled to the correction impedance so that a resonant circuit results, which comprises the grounding band and the correction impedance, and the correction impedance has a first element for shifting a resonant frequency of the resonant circuit and/or a second element for reducing a quality of the resonant circuit. The invention additionally relates to a vacuum valve and a vacuum chamber system having such a high-frequency grounding device.

The invention relates to a high-frequency grounding device (40) for use with a vacuum valve for closing and opening a valve opening of a vacuum chamber system, having a grounding band (42) made of a conductive material for discharging electrical charges occurring on the vacuum valve, wherein the grounding band has a first end (41) and a second end (43) and, for grounding the vacuum valve, is designed to be connected at the first end to a valve closure of the vacuum valve, and to be connected at the second end to a component of the vacuum chamber system, wherein the high-frequency grounding device has a correction impedance, wherein the grounding band is coupled to the correction impedance so that a resonant circuit results, which comprises the grounding band and the correction impedance, and the correction impedance has a first element for shifting a resonant frequency of the resonant circuit and/or a second element for reducing a quality of the resonant circuit. The invention additionally relates to a vacuum valve and a vacuum chamber system having such a high-frequency grounding device.

Disclosed is a vacuum valve having a valve closure and having a drive unit which is coupled to the valve closure and which has at least one adjustment element. The vacuum valve furthermore has a position sensor, in particular a travel or distance sensor, such that a position of the valve closure and/or of the at least one adjustment element relative to a zero position, in particular an open position or closed position of the vacuum valve, can be measured.

Disclosed is a vacuum valve having a valve closure and having a drive unit which is coupled to the valve closure and which has at least one adjustment element. The vacuum valve furthermore has a position sensor, in particular a travel or distance sensor, such that a position of the valve closure and/or of the at least one adjustment element relative to a zero position, in particular an open position or closed position of the vacuum valve, can be measured.

A valve for a vacuum apparatus includes a first housing element and a second housing element wherein an outer chamber is defined by the first housing element and the second housing element. The first housing element has a first opening and the second housing element has a second opening in fluid communication with the first opening via the outer chamber. An inner chamber is defined by the first housing element and the second housing element wherein a membrane is disposed in the inner chamber. A sealing element is connected to the membrane and is moveable from a first position to a second position wherein in the first position the sealing element closes the first opening in a leak-tight manner and in the second position the sealing element opens the first opening to allow a gaseous medium to flow through the valve.

A valve for a vacuum apparatus includes a first housing element and a second housing element wherein an outer chamber is defined by the first housing element and the second housing element. The first housing element has a first opening and the second housing element has a second opening in fluid communication with the first opening via the outer chamber. An inner chamber is defined by the first housing element and the second housing element wherein a membrane is disposed in the inner chamber. A sealing element is connected to the membrane and is moveable from a first position to a second position wherein in the first position the sealing element closes the first opening in a leak-tight manner and in the second position the sealing element opens the first opening to allow a gaseous medium to flow through the valve.