Patent classifications
F16K51/02
GATE VALVE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF OPERATING GATE VALVE
A gate valve provided in a boundary portion between two sections to block communication between the two sections, the gate valve includes a base, a first moving mechanism installed on the base and configured to move a first movement body along a first linear track, a second moving mechanism installed on the first movement body, and configured to operate at a timing different from the first moving mechanism and to move a second movement body along a second linear track orthogonal to the first linear track, and a valve body installed on the second movement body and configured to come into contact with a contact surface so as to perform sealing. One of the first linear track and the second linear track is parallel to a direction orthogonal to the contact surface.
LOADLOCK APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
A loadlock apparatus includes a loadlock chamber including a first opening and a second opening separated in a vertical direction; a first slit valve including a first valve plate configured to move between a first open position where the first opening is open and a first closed position where the first opening is closed, the first open position being a position moved downward from the first closed position; and a second slit valve including a second valve plate configured to move between a second open position where the second opening is open and a second closed position where the second opening is closed, the second open position being a position moved upward from the second closed position.
LOADLOCK APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
A loadlock apparatus includes a loadlock chamber including a first opening and a second opening separated in a vertical direction; a first slit valve including a first valve plate configured to move between a first open position where the first opening is open and a first closed position where the first opening is closed, the first open position being a position moved downward from the first closed position; and a second slit valve including a second valve plate configured to move between a second open position where the second opening is open and a second closed position where the second opening is closed, the second open position being a position moved upward from the second closed position.
Assembly having at least two chambers and at least one transfer valve
An assembly having at least two chambers (1, 2) and at least one transfer valve (3), wherein: a valve housing interior (9) of the transfer valve (3) is separated from each the chamber interiors (4, 5) of the chambers (1, 2) by respective partitions (12, 13) and a transfer opening (14, 15) for the feeding through of objects and/or fluids is formed in each of the partitions (12, 13) and in addition to the transfer opening (14, 15) in question an additional opening (16, 17) is arranged in each of the partitions (12, 13). The additional openings (16, 17) can be closed by respective switching valves (18, 19) of the assembly and, in an open state of the respective switching valves (18, 19), directly fluidically connect the valve housing interior (9) to the respective chamber interiors (4, 5) adjoining the respective partitions (12, 13).
Assembly having at least two chambers and at least one transfer valve
An assembly having at least two chambers (1, 2) and at least one transfer valve (3), wherein: a valve housing interior (9) of the transfer valve (3) is separated from each the chamber interiors (4, 5) of the chambers (1, 2) by respective partitions (12, 13) and a transfer opening (14, 15) for the feeding through of objects and/or fluids is formed in each of the partitions (12, 13) and in addition to the transfer opening (14, 15) in question an additional opening (16, 17) is arranged in each of the partitions (12, 13). The additional openings (16, 17) can be closed by respective switching valves (18, 19) of the assembly and, in an open state of the respective switching valves (18, 19), directly fluidically connect the valve housing interior (9) to the respective chamber interiors (4, 5) adjoining the respective partitions (12, 13).
Gate valve
A connecting fitting is disposed on an upper face of a valve plate and is fixed to the connecting shaft. A first close-contact mechanism portion is formed at a portion where the connecting fitting and the connecting shaft are in contact with each other, a second close-contact mechanism portion is formed at a portion where the connecting fitting and the valve plate are in contact with each other, and a third close-contact mechanism portion is formed at a portion where the lower end of the valve plate and the lower end of the connecting shaft are in contact with each other. By bringing the valve plate and the connecting shaft toward each other with the close-contact mechanism portions of three vertical positions, a hole front face of a connection hole and a shaft front face of a connecting shaft are brought into close contact with each other.
Gate valve
A connecting fitting is disposed on an upper face of a valve plate and is fixed to the connecting shaft. A first close-contact mechanism portion is formed at a portion where the connecting fitting and the connecting shaft are in contact with each other, a second close-contact mechanism portion is formed at a portion where the connecting fitting and the valve plate are in contact with each other, and a third close-contact mechanism portion is formed at a portion where the lower end of the valve plate and the lower end of the connecting shaft are in contact with each other. By bringing the valve plate and the connecting shaft toward each other with the close-contact mechanism portions of three vertical positions, a hole front face of a connection hole and a shaft front face of a connecting shaft are brought into close contact with each other.
Predictive diagnostics systems and methods using vacuum pressure control valves
Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.
Predictive diagnostics systems and methods using vacuum pressure control valves
Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.
Hydro excavation remote dig system
The hydro excavation remote dig system provides for a primary and secondary dig tube attachments that permit a vacuum truck to be used for a remote dig setup. Specifically, the attachments include various attachable handles, corrugated tubing that connects to a reinforcement bar device with releasable clamps to maintain the corrugated tubing in an elongated state during use, a debris box with an integrated safety valve, and a dig tip.