There is provided a technique that includes: a gate valve including a movable gate valve plate; and a butterfly valve that is installed at the gate valve plate, has a diameter smaller than those of valve openings configured to be opened or closed by the gate valve plate, and is configured to be capable of being fully closed, wherein the gate valve plate of the gate valve and the butterfly valve are configured to be capable of being driven independently of each other.

There is provided a technique that includes: a gate valve including a movable gate valve plate; and a butterfly valve that is installed at the gate valve plate, has a diameter smaller than those of valve openings configured to be opened or closed by the gate valve plate, and is configured to be capable of being fully closed, wherein the gate valve plate of the gate valve and the butterfly valve are configured to be capable of being driven independently of each other.

A vacuum valve includes a valve plate that covers an exhaust port of a vacuum chamber, and a poppet type actuator that drives the valve plate in an axial direction orthogonal to a surface of the vacuum chamber on which the exhaust port is provided. The actuator includes a shaft that is connected to the valve plate, a drive unit that is disposed side by side with the shaft in a radial direction of the shaft and includes a ball screw shaft and a drive source that rotates the ball screw shaft, and a connection part that connects the ball screw shaft and the shaft and moves in the axial direction together with the shaft to a position where the valve plate covers the exhaust port.

A vacuum valve includes a valve plate that covers an exhaust port of a vacuum chamber, and a poppet type actuator that drives the valve plate in an axial direction orthogonal to a surface of the vacuum chamber on which the exhaust port is provided. The actuator includes a shaft that is connected to the valve plate, a drive unit that is disposed side by side with the shaft in a radial direction of the shaft and includes a ball screw shaft and a drive source that rotates the ball screw shaft, and a connection part that connects the ball screw shaft and the shaft and moves in the axial direction together with the shaft to a position where the valve plate covers the exhaust port.

A gate valve opens and closes a first opening of a first chamber in a vacuum processing apparatus. The gate valve includes: a valve element configured to open and close the first opening; a drive configured to move the valve element so that the valve element takes at least a closing position, where the valve element closes the first opening, and an opening position, where the valve element opens the first opening; a first gas line and a second gas line; and a first switching valve that connects one of the first gas line and the second gas line to the drive. The drive moves the valve element from the opening position to the closing position by pressure of gas supplied from the first gas line or the second gas line, and holds the valve element at the closing position by pressure of gas supplied from the second gas line.

A gate valve opens and closes a first opening of a first chamber in a vacuum processing apparatus. The gate valve includes: a valve element configured to open and close the first opening; a drive configured to move the valve element so that the valve element takes at least a closing position, where the valve element closes the first opening, and an opening position, where the valve element opens the first opening; a first gas line and a second gas line; and a first switching valve that connects one of the first gas line and the second gas line to the drive. The drive moves the valve element from the opening position to the closing position by pressure of gas supplied from the first gas line or the second gas line, and holds the valve element at the closing position by pressure of gas supplied from the second gas line.

A gate valve is disposed between first and second chambers and allows a first opening leading to the first chamber and a second opening leading to the second chamber to be communicated and opens and closes. The gate valve includes a valve shaft, first and second valve plates that are attached to a leading end part of the valve shaft, an operation mechanism that moves these valve plates to an evacuation position at which the first opening and the second opening are communicated, a first closed position at which the first opening is closed by the first valve plate, and a second closed position at which the second opening is closed the second valve plate by operating the valve shaft, a fastening mechanism that attaches these valve plates to the valve shaft, and a support mechanism that fasten both end parts of these valve plates in a longitudinal direction.

A sheet 200 for an array of vacuum apertures 152 in a substrate support unit 150 of a printer is provided. The sheet 200 comprises a plurality of valves 202 formed into the sheet 200. The sheet 200 is made from a resilient material. Each valve 202 comprises a valve head 204 for sealing a vacuum aperture 152 in the substrate support unit 150, and a valve lever arm 206 for permitting movement of the valve head 204 towards and away from the vacuum aperture 152 in order to open and close the valve 202.

A sheet 200 for an array of vacuum apertures 152 in a substrate support unit 150 of a printer is provided. The sheet 200 comprises a plurality of valves 202 formed into the sheet 200. The sheet 200 is made from a resilient material. Each valve 202 comprises a valve head 204 for sealing a vacuum aperture 152 in the substrate support unit 150, and a valve lever arm 206 for permitting movement of the valve head 204 towards and away from the vacuum aperture 152 in order to open and close the valve 202.

A connecting fitting is disposed on an upper face of a valve plate and is fixed to the connecting shaft. A first close-contact mechanism portion is formed at a portion where the connecting fitting and the connecting shaft are in contact with each other, a second close-contact mechanism portion is formed at a portion where the connecting fitting and the valve plate are in contact with each other, and a third close-contact mechanism portion is formed at a portion where the lower end of the valve plate and the lower end of the connecting shaft are in contact with each other. By bringing the valve plate and the connecting shaft toward each other with the close-contact mechanism portions of three vertical positions, a hole front face of a connection hole and a shaft front face of a connecting shaft are brought into close contact with each other.