A valve plate has a plate portion with a front side elastomeric seal fitted thereon, and a connection apparatus arranged at the rear side for connecting the valve plate to a carrier apparatus of a vacuum valve. The connection apparatus includes first and second elongate connection portions, the first connection portion is located at one side and the second connection portion is located at the other side of the longitudinal center of the plate portion, with each being connected to the plate portion with the two spaced-apart ends thereof. The connection portions are spaced apart from the plate portion in the region between the two ends thereof, with a respective slot formed between the plate portion and the respective connection portion, and have in a central region of the longitudinal extent thereof a connection structure for connection to an end portion of a respective valve rod of the carrier apparatus.

A valve plate has a plate portion with an elastomeric seal on a front face and an elongated connecting portion spaced apart from a rear face by a slot for fastening the valve plate to a valve rod. The extension of the connecting portion in the width direction is defined by opposing first and second side edges of the connecting portion when viewed in a plan view of the rear face of the plate portion. A connecting structure is configured in the connecting portion in a central region of the longitudinal extension of the first side edge of the connecting portion for connecting the connecting portion to an end portion of the valve rod. The connecting portion is reinforced in a region of its extension in the width direction adjoining the second side edge, relative to a region of its extension in the width direction adjoining the first side edge.

A vacuum valve includes a valve housing (1) having a first housing part (1a) and a second housing part (1b), between which a ring-shaped housing seal (3b) is arranged, and a closure member (9) which is adjustable between an open position in which the vacuum valve is open and a closed position in which the vacuum valve is closed. The housing seal (3b) is mounted on a ring-shaped carrier (3a). Additionally on the carrier (3a) radially inside the housing seal (3b) is mounted a ring-shaped seat seal (3c) against which the closure member (9) is pressed with the closure member (9) in the closed position, wherein the seat seal (3c) abuts against a sealing face of the valve housing (1).

A vacuum valve, having a valve seat including a valve opening (axis (A)), and a first sealing surface around the valve opening and defines a first sealing plane (E.sub.S), having a valve disk with a second sealing surface corresponding to the first sealing surface and defining a second sealing plane (E.sub.T), additionally having a first coupling element, connected to the valve disk and comprising a receiving means and a drive unit coupled with the first coupling element and is configured to provide the valve disk adjustable from an open position to a closed position. The drive unit and the valve disk are configured to provide a fine control position, wherein the valve disk is tilted relative to the valve seat where E.sub.S and E.sub.T enclose a defined angle (α), and the seal abuts fully against one of the two sealing surfaces and in part against the other sealing surface.

A vacuum valve, having a valve seat including a valve opening (axis (A)), and a first sealing surface around the valve opening and defines a first sealing plane (E.sub.S), having a valve disk with a second sealing surface corresponding to the first sealing surface and defining a second sealing plane (E.sub.T), additionally having a first coupling element, connected to the valve disk and comprising a receiving means and a drive unit coupled with the first coupling element and is configured to provide the valve disk adjustable from an open position to a closed position. The drive unit and the valve disk are configured to provide a fine control position, wherein the valve disk is tilted relative to the valve seat where E.sub.S and E.sub.T enclose a defined angle (α), and the seal abuts fully against one of the two sealing surfaces and in part against the other sealing surface.

A temperature control apparatus is provided, which is capable of, even when it is necessary to perform control by means of valves in a plurality of channels, promptly controlling a temperature of an area to be temperature-controlled promptly to a desired temperature, while avoiding complication and enlargement of the apparatus as a whole. Passage and blockage of a heating medium passing through a first supply channel to a mixing channel, a temperature of the heating medium being controlled by a first temperature regulating unit at a predetermined temperature, and passage and blockage of a heating medium passing through a second supply channel to the mixing channel, a temperature of the heating medium being controlled by a second temperature regulating unit, are controlled by a valve unit. The valve unit includes a first spool valve and a second spool valve, which are coupled through a heat insulating layer.

A temperature control apparatus is provided, which is capable of, even when it is necessary to perform control by means of valves in a plurality of channels, promptly controlling a temperature of an area to be temperature-controlled promptly to a desired temperature, while avoiding complication and enlargement of the apparatus as a whole. Passage and blockage of a heating medium passing through a first supply channel to a mixing channel, a temperature of the heating medium being controlled by a first temperature regulating unit at a predetermined temperature, and passage and blockage of a heating medium passing through a second supply channel to the mixing channel, a temperature of the heating medium being controlled by a second temperature regulating unit, are controlled by a valve unit. The valve unit includes a first spool valve and a second spool valve, which are coupled through a heat insulating layer.

A vacuum valve placed between a vacuum vessel and a vacuum pump to adjust a valve opening degree using an operating fluid includes a packing mounted in a recessed groove of a piston. The packing is provided with a contact portion on a radially inner side and a contact portion on a radially outer side, and a slide-contact portion contacting with an inner peripheral surface of a cylinder. A portion between the contact portion and the slide-contact portion has a thin thickness.

A vacuum valve placed between a vacuum vessel and a vacuum pump to adjust a valve opening degree using an operating fluid includes a packing mounted in a recessed groove of a piston. The packing is provided with a contact portion on a radially inner side and a contact portion on a radially outer side, and a slide-contact portion contacting with an inner peripheral surface of a cylinder. A portion between the contact portion and the slide-contact portion has a thin thickness.

A flow through valve can satisfy the manufacturing constraints encountered when handling materials at high temperatures and low pressures, for example during semiconductor thin-film manufacturing using techniques such as vapor transport deposition.