The present invention provides an infrared hydrogen/oxygen combustor. The structure of the combustor includes a sinus ring (1). A surrounding foot (12) of the angle-shaped sinus ring (1) wraps a material-containing basin (14). A first small tube (16) and a second small tube (7) are connected the material-containing basin (14) and the angle-shaped sinus ring (1). Water solution (3) is contained in the material-containing basin (14). A straight-hole ceramic water-absorbing board (5) is provided on the upper part of the water solution (3), a spacing ring (6) is provided above the side of the material-containing basin (14) and in the upward ring of the angle-shaped sinus ring (1), a two-stage material-containing box (9) with a separated brake is provide on one side of the angle-shaped sinus ring (1). The technical scheme of the invention reduces the production cost, the pollution and protects the environment.

A radiant burner for treating an effluent gas stream from a manufacturing process tool may include: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; and a plenum surrounding the porous sleeve supplying the combustion materials to the porous sleeve, the plenum being configured to provide the combustion materials with varying stoichiometry along a length of the porous sleeve. This approach of varying the stoichiometric ratios of the combustion materials correspondingly varies the heat generated by those combustion materials along the length of the porous sleeve. By varying the stoichiometry of the combustion materials to compensate for variations in the heat generated within the combustion chamber along the length of the porous sleeve, a more uniform temperature can be achieved along the length of the porous sleeve within the combustion chamber.

A down-fired flame burner includes a flame holder positioned below the burner. The flame holder includes a plurality of perforations that collectively confine a combustion reaction of the burner to the flame holder.

The present disclosure generally relates to systems and methods for the combustive abatement of waste gas formed during the manufacture of semiconductor wafers. In particular, the systems described herein are capable of combusting air-polluting perfluorocarbons, including those having high greenhouse gas indexes such as hexafluoroethane (C.sub.2F.sub.6) and tetrafluoromethane (CF.sub.4), as well as particulate-forming silicon dioxide precursors, such as silane (SiH.sub.4) and tetraethoxysilane (Si(OC.sub.2H.sub.5).sub.4, abbreviated TEOS), with greater efficiency and lower energy usage than prior abatement systems. More particularly, and in one preferred embodiment, the present disclosure is directed to a waste gas abatement system that utilizes a combination of non-combustible and combustible gases (or gas mixtures) for thermal combustion, which are directed through multiple permeable interior surfaces of a reaction chamber, efficiently combusting waste gas and preventing undesirable accumulation of solid particulate matter on the chamber surfaces.

In a flameless thermal oxidizer including a vessel configured to contain a matrix bed of media, and a vent gas stream conduit and an oxidizing agent conduit each extending into an interior of the vessel at least partially within the matrix bed of media, a method of delivering a vent gas stream and oxidizing agents into the vessel includes the steps of distributing the vent gas stream through the vent gas stream conduit; distributing the oxidizing agents through a mixing conduit; and combining the vent gas stream and the oxidizing agents in the mixing conduit.

An inlet assembly for a an abatement burner includes: an inlet conduit operable to convey an effluent gas stream to be treated from an inlet aperture via a bore to an outlet aperture for treatment; and a lance conduit operable to convey a fuel gas from a gas inlet aperture via a gas bore to a gas outlet aperture positioned within the bore for mixing with the effluent gas stream, a cross-sectional area of the gas bore increasing towards the gas outlet aperture. In this way, the expansion caused by the increasing cross-sectional area of the gas bore enhances the mixing of the fuel gas with the effluent gas stream which provides for improved destruction and removal efficiencies (DRE), which enables the inlet assembly to be operated with reduced quantities of fuel gas, while still maintaining required levels of DRE.

A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool and comprises: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; a combustion characteristic monitor operable to determine combustion performance of the radiant burner by monitoring infra-red radiation emitted from the combustion surface; and a radiant burner controller operable to control operation of the radiant burner in dependence upon combustion performance determined by the combustion characteristic monitor. Accordingly, aspects recognize that if a burner is suffering from an excessive flow of air the burner pad or combustion surface will typically cool, which results in an increase in unwanted emissions in the exhaust produced by a radiant burner. The cooling also results in a reduction in infrared radiation determined by the combustion surface. The hydrogen flame of the radiant burner and the hydrocarbon flame of the burner pilot typically do not emit infrared radiation and thus a change in infra-red an radiation, for example, intensity, quantity or frequency, emitted by the combustion surface of the radiant burner can be used to diagnose an overflow of cold gas, typically air, in the combustion mixture fed into the system, for example, the combustion chamber. Once diagnosed appropriate ameliorative steps may be taken and, for example, the burner control logic may be operable to compensate by reducing air flow into the burner.

A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing processing tool and comprises: a plurality of treatment chambers, each treatment chamber having an effluent stream inlet for supplying a respective portion of said effluent gas stream to that treatment chamber for treatment therewithin. In this way, multiple treatment chambers may be provided, each of which treats part of the effluent stream. Accordingly, the number of treatment chambers can be selected to match the flow rate of the effluent gas stream from any particular processing tool. This provides an architecture which is reliably scalable to suit the needs of any effluent gas stream flow rate.

A diptube apparatus for a flameless thermal oxidizer having a matrix bed of media including a vent gas stream conduit at least partially positioned within the matrix bed for delivering a vent gas stream; an oxidizing agent conduit separate from the vent gas stream conduit and at least partially positioned within the matrix bed for delivering oxidizing agents; and at least one mixing conduit positioned within the matrix bed and configured to receive the vent gas stream and the oxidizing agents to deliver a combination of the vent gas stream and the oxidizing agents into the matrix bed. A related method and flameless thermal oxidizer are also provided.

The present invention provides an infrared hydrogen/oxygen combustor. The structure of the combustor includes a sinus ring (1). A surrounding foot (12) of the angle-shaped sinus ring (1) wraps a material-containing basin (14). A first small tube (16) and a second small tube (7) are connected the material-containing basin (14) and the angle-shaped sinus ring (1). Water solution (3) is contained in the material-containing basin (14). A straight-hole ceramic water-absorbing board (5) is provided on the upper part of the water solution (3), a spacing ring (6) is provided above the side of the material-containing basin (14) and in the upward ring of the angle-shaped sinus ring (1), a two-stage material-containing box (9) with a separated brake is provide on one side of the angle-shaped sinus ring (1). The technical scheme of the invention reduces the production cost, the pollution and protects the environment.