The present invention is intended to provide a hybrid combustion apparatus using the pyrolysis of water and combustion air, in which a combustion chamber is defined by a double wall and divided into a primary combustion chamber configured to combust waste and a secondary combustion chamber configured to combust exhaust gas, and the size (diameter) of a combustion unit through which waste is configured to be different from that of the combustion chamber in which a flame is located, so that combustion temperature is further increased by introducing air, so that heated due to proximity to a flame, as combustion air, combustible waste is combusted at an ultrahigh temperature by pyrolyzing water and combustion air by means of a high combustion temperature, and so that complete combustion is achieved by increasing the time for which a flame stays within the combustion chamber, thereby discharging clean exhaust gas.

A combustor for burning waste material includes a horizontally extended combustion chamber through which a mixture of waste material and air is introduced under pressure tangentially for establishing a vortical movement of the waste material toward one of the end walls. The waste material is ignited during its vortical movement. A second discharge port extends for discharging from the chamber non-combustible material entrained in the outer region of the vortex. The discharged material is conveyed through a conduit to a separator which separates the discharged gases and solid material. A secondary air manifold supplies air through controlled and automated dampers at portals positioned at intervals along the length of the chamber. An adjustable baffle is mounted on the flue adjacent its open end for deflecting outwardly toward the side wall solid material which moves from adjacent the one end wall toward the open end of the flue. A recuperator is mounted externally to the chamber on the exhaust flue, supplying heated air to the secondary air manifold and to the primary air and waste feed intake. Additionally, control means are provided for the use of specialized sensors to monitor the temperature, air flow and volume of the chamber, integrated into a process automation system that allows for control of individual components, stages, regions, as well as the entire process.

A combustor for burning waste material includes a horizontally extended combustion chamber through which a mixture of waste material and air is introduced under pressure tangentially for establishing a vortical movement of the waste material toward one of the end walls. The waste material is ignited during its vortical movement. A second discharge port extends for discharging from the chamber non-combustible material entrained in the outer region of the vortex. The discharged material is conveyed through a conduit to a separator which separates the discharged gases and solid material. A secondary air manifold supplies air through controlled and automated dampers at portals positioned at intervals along the length of the chamber. An adjustable baffle is mounted on the flue adjacent its open end for deflecting outwardly toward the side wall solid material which moves from adjacent the one end wall toward the open end of the flue. A recuperator is mounted externally to the chamber on the exhaust flue, supplying heated air to the secondary air manifold and to the primary air and waste feed intake. Additionally, control means are provided for the use of specialized sensors to monitor the temperature, air flow and volume of the chamber, integrated into a process automation system that allows for control of individual components, stages, regions, as well as the entire process.

An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.

An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.

An implosion reactor tube is provided, including: a receptacle body having a tube shape open at a first end; a cylinder positioned within the receptacle body; a mixing chamber at a second end of the receptacle body; the mixing chamber defined by a baffle; the baffle having a plurality of inner passages proximate to the cylinder allowing fluid passage through the baffle and a plurality of outer passages proximate to the receptacle body allowing passage of air and fuel through said baffle; a fuel and air inlet for allowing the air and fuel to enter the mixing chamber; and a flash igniter for igniting the air and fuel.

An implosion reactor tube is provided, including: a receptacle body having a tube shape open at a first end; a cylinder positioned within the receptacle body; a mixing chamber at a second end of the receptacle body; the mixing chamber defined by a baffle; the baffle having a plurality of inner passages proximate to the cylinder allowing fluid passage through the baffle and a plurality of outer passages proximate to the receptacle body allowing passage of air and fuel through said baffle; a fuel and air inlet for allowing the air and fuel to enter the mixing chamber; and a flash igniter for igniting the air and fuel.

A nozzle for an abatement apparatus and a method are disclosed. The nozzle is for abatement apparatus operable to treat an effluent stream from a processing tool, the nozzle comprises: a nozzle body defining a nozzle inlet operable to receive the effluent stream, a nozzle outlet, and a conduit extending between the nozzle inlet and the nozzle outlet and operable to convey the effluent stream in a direction of flow from the nozzle inlet to the nozzle outlet; and an effluent stream rotator configured to impart a rotational component to the effluent stream to rotate the effluent stream around the direction of flow. In this way, the effluent stream is rotated as it passes through the nozzle body. The destruction rate efficiency achieved by an abatement apparatus when receiving such rotating effluent streams has been found to be significantly improved compared to non-rotating effluent streams.

A burner apparatus and process are described. The burner apparatus includes an inlet chamber in communication with a combustion chamber. The combustion chamber has a cylindrical shape defining a longitudinal axis and a radial direction orthogonal to the longitudinal axis. The combustion chamber has an upstream end and a downstream end, and an air inlet is disposed in the inlet chamber. A pilot, a fuel gas inlet, and a refractory material are disposed in the combustion chamber downstream of the air inlet. A mixed gas inlet is positioned downstream of the fuel gas inlet and the pilot in the combustion chamber. The mixed gas inlet includes a manifold having an inlet, a body, and a plurality of nozzles.

A ground supported power boiler is described combining a refractory lined and insulated conical floor; an insulated cylindrical combustion chamber; a cylindrical furnace with water tube wall; a rectangular convective section; a single vertical steam drum; tangential injection of the fuel and combustion air; means for fluidizing the fuel bed; means for selectively stripping particulates from the flue gases; multi-stage particulate stripping and filtering from flue gases, means for using the walls of steam drum as steam/water droplet separator, means for recirculating and capturing heat from the flue gases; means for pressurizing the interior of the boiler above atmospheric pressure; means for heating and drying fuel prior to feeding the fuel to the boiler; means for creating hydrogen shift reaction; means for eliminating any need for sootblowing; and designed to not require the use of an induced draft fan.