A reactor apparatus, includes: a reactor chamber having an inlet through which treatment liquid containing by-products is introduced and having an interior space; a burner at a lower end portion of the reactor chamber to burn waste gas; a guide member above the burner and configured to allow the treatment liquid to flow outwardly of the burner; a water reservoir between the burner and the guide member, the water reservoir having a double pipe structure having an inner wall portion and an outer wall portion, and through which water supplied through a water inlet is configured to flow between the inner wall portion and the outer wall portion; and a cover member coupled to an upper end portion of the water reservoir and configured to cover a space between the inner wall portion and the outer wall portion, wherein an upper end of the outer wall portion is above an upper end of the inner wall portion, wherein a plurality of bumps are on a bottom surface of the cover member spaced apart from each other in a circumferential direction, the plurality of bumps configured to form a gap of several hundred pm between the bottom surface of the cover member and an upper surface of the inner wall portion of the water reservoir.

A method of cleaning a gas inlet nozzle of an abatement burner combustion chamber. The abatement burner intermittently receives gas for combustion from a feed process. The nozzle comprises a cleaning mechanism including a movable cleaning member for physically removing unwanted deposits from the nozzle. The cleaning member is movable from a retracted first position wherein the cleaning member is outside a path of a flame associated with the nozzle, to a second cleaning position wherein the cleaning member is in a path of the flame associated with the nozzle. The method comprises the steps of: a. identifying when the nozzle is out of use; b. moving the cleaning member from the first position to the second position while the nozzle is out of use; and c. returning the cleaning member to the first position before nozzle is in use.

A method of cleaning a gas inlet nozzle of an abatement burner combustion chamber. The abatement burner intermittently receives gas for combustion from a feed process. The nozzle comprises a cleaning mechanism including a movable cleaning member for physically removing unwanted deposits from the nozzle. The cleaning member is movable from a retracted first position wherein the cleaning member is outside a path of a flame associated with the nozzle, to a second cleaning position wherein the cleaning member is in a path of the flame associated with the nozzle. The method comprises the steps of: a. identifying when the nozzle is out of use; b. moving the cleaning member from the first position to the second position while the nozzle is out of use; and c. returning the cleaning member to the first position before nozzle is in use.

A regenerative thermal oxidizer (RTO) with three or more chambers. Each chamber would be in a unique mode, (inlet, outlet, purge). Each chamber has its gas flow determined by two poppet valves which define which mode the chamber will be in: inlet mode, output mode, or purge mode.

A cooling system for the decoating system includes a sensor, a control device, and a controller communicatively coupled with the sensor and the control device. The sensor is configured to measure a characteristic of the cooling system in the decoating system, the control device controls the characteristic of the cooling system, and the controller is configured to adjust the control device to adjust the characteristic of the cooling system based on at least one of a measured temperature within the decoating system or the measured characteristic. A method of controlling a temperature of the decoating system includes measuring a temperature within a piece of equipment of the decoating system and measuring a characteristic the cooling system in the piece of equipment of the decoating system. The method includes controlling the cooling system to adjust the characteristic based on at least one of the measured temperature or the measured characteristic.

A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool comprises: determining a concentration of carbon monoxide produced by the abatement apparatus when treating the effluent stream; and adjusting an operating parameter of the abatement apparatus in response to the concentration of carbon monoxide. In this way, the performance of the abatement device can be controlled by simply adjusting the operating parameters of the abatement device in response to the amount of carbon monoxide being produced to create conditions within the abatement apparatus which improve the removal of compounds being treated within the abatement device, while reducing undesirable by-products and without requiring advanced knowledge of the content of the effluent stream.

A cooling system for the decoating system includes a sensor, a control device, and a controller communicatively coupled with the sensor and the control device. The sensor is configured to measure a characteristic of the cooling system in the decoating system, the control device controls the characteristic of the cooling system, and the controller is configured to adjust the control device to adjust the characteristic of the cooling system based on at least one of a measured temperature within the decoating system or the measured characteristic. A method of controlling a temperature of the decoating system includes measuring a temperature within a piece of equipment of the decoating system and measuring a characteristic the cooling system in the piece of equipment of the decoating system. The method includes controlling the cooling system to adjust the characteristic based on at least one of the measured temperature or the measured characteristic.

An ammonia stripper (32) and method for stripping ammonia from ammonia-containing water is described, comprising an ammonia-containing water inlet (56), a steam inlet (70), and a forced air inlet (82), and an ammonia-containing gas outlet (36) and a wastewater outlet (72). The steam and air contact the ammonia-containing water in counter-flow to release ammonia from the ammonia-containing water. The ammonia stripper further comprises a steam and air mixing duct (200) shaped to create turbulence in the steam and air flow to promote mixing of the steam and air flow prior to contacting the ammonia-containing water. Also described is an ammonia stripper and method comprising a precipitation unit for precipitating solids from the ammonia-containing water prior to the inlet, and an ammonia stripper and method comprising a steam flash vessel for generating steam from the wastewater produced by the ammonia stripper for recycling into the ammonia stripper. Further described are thermal destructors for destroying ammonia in ammonia-containing gas from an ammonia stripper; and a method of removing ammonia from ammonia-containing gas wherein ammonia-containing gas is drawn from the ammonia-containing gas outlet and returned into the ammonia stripper to mix with the forced air entering the ammonia stripper.

Provided is a vacuum pump that can realize energy conservation when performing abatement of exhaust gas.

A vacuum pump that sucks in and exhausts exhaust gas includes a motor serving as a drive source, and a first controller that controls driving of the motor. The first controller monitors a state of the motor, and in a case in which the state of the motor is a specific state excluding when starting up and when stopped, outputs a specific signal (process signal) to an external entity.

A regenerative thermal oxidizer (RTO) with three or more chambers. Each chamber would be in a unique mode, (inlet, outlet, purge). Each chamber has its gas flow determined by two poppet valves which define which mode the chamber will be in: inlet mode, output mode, or purge mode.