An air pollution control system includes a denitration device that removes nitrogen oxide in flue gas from a boiler; a heat transfer tube for recovering part of heat of the flue gas after denitration; a precipitator that removes soot and dust in the flue gas after heat recovery; a desulfurization device that removes sulfur oxide in the flue gas discharged from the precipitator; a heat transfer tube for heating the flue gas discharged from the desulfurization device; a circulation pump that circulates a heat medium between the heat transfer tubes; a heat medium heater provided to the circulation pipe to heat the heat medium; and a control device that controls the heat medium heater based on an ammonia concentration at an outlet of the denitration device. The control device causes the heat medium heater to heat the heat medium when the ammonia concentration is higher than a certain value.

An air pollution control system includes a denitration device that removes nitrogen oxide in flue gas from a boiler; a heat transfer tube for recovering part of heat of the flue gas after denitration; a precipitator that removes soot and dust in the flue gas after heat recovery; a desulfurization device that removes sulfur oxide in the flue gas discharged from the precipitator; a heat transfer tube for heating the flue gas discharged from the desulfurization device; a circulation pump that circulates a heat medium between the heat transfer tubes; a heat medium heater provided to the circulation pipe to heat the heat medium; and a control device that controls the heat medium heater based on an ammonia concentration at an outlet of the denitration device. The control device causes the heat medium heater to heat the heat medium when the ammonia concentration is higher than a certain value.

A piping system for recovery heat energy from an exhaust gas in a heat recovery furnace, the piping system comprising a piping inlet, where the piping inlet transects a wall of a stack zone of the heat recovery furnace, a piping run, the piping run fluidly connected to the piping inlet, and a piping outlet, the piping outlet fluidly connected to the piping run, where the piping outlet transects the wall of the stack zone of the heat recovery furnace, where the piping system is positioned in a stack zone of the heat recovery furnace between a stack inlet and a stack outlet.

A piping system for recovery heat energy from an exhaust gas in a heat recovery furnace, the piping system comprising a piping inlet, where the piping inlet transects a wall of a stack zone of the heat recovery furnace, a piping run, the piping run fluidly connected to the piping inlet, and a piping outlet, the piping outlet fluidly connected to the piping run, where the piping outlet transects the wall of the stack zone of the heat recovery furnace, where the piping system is positioned in a stack zone of the heat recovery furnace between a stack inlet and a stack outlet.

A heat exchanger includes a heat recovery unit that causes a heat medium to recover heat from flue gas through first heat exchange by bringing the flue gas into contact with a fin tube; a reheater including a preheating unit configured to preheat flue gas through second heat exchange by bringing the flue gas into contact with a tube, and heating units that heat the flue gas through third heat exchange by bringing the flue gas into contact with the heat medium; and a control unit that calculates a recovered heat quantity to be recovered by the heat recovery unit from the flue gas through the first heat exchange, and that controls temperature of the heat medium after the first heat exchange within a predetermined range.

A heat exchanger includes a heat recovery unit that causes a heat medium to recover heat from flue gas through first heat exchange by bringing the flue gas into contact with a fin tube; a reheater including a preheating unit configured to preheat flue gas through second heat exchange by bringing the flue gas into contact with a tube, and heating units that heat the flue gas through third heat exchange by bringing the flue gas into contact with the heat medium; and a control unit that calculates a recovered heat quantity to be recovered by the heat recovery unit from the flue gas through the first heat exchange, and that controls temperature of the heat medium after the first heat exchange within a predetermined range.

A method for improving effectiveness of a steam generator system includes providing air to an air preheater at a mass flow such that the air preheater has a cold end outlet temperature defined by the improved air preheater operating with increased heat recovery (HR) of at least 1% calculated according to the equation: HR=100%?((Tgi?TgoAdvX)/(Tgi?TgoSTD)?1). The method requires either reducing the amount of heat that flows into the air preheater from the flue gas and/or increasing the amount of heat extracted from the flue gas. The method includes mitigating SO.sub.3 in the flue gas which is discharged directly from the air preheater to a particulate removal system and then directly into a flue gas desulfurization system. The method includes extracting heat from the Flue gas to create equipment preheat and/or flue gas stack reheat air with the latter being fed to heat the flue gas prior to entering a discharge stack to raise the temperature of the flue gas to mitigate visible plume exiting and to mitigate corrosion in, the discharge stack.

A method for improving effectiveness of a steam generator system includes providing air to an air preheater at a mass flow such that the air preheater has a cold end outlet temperature defined by the improved air preheater operating with increased heat recovery (HR) of at least 1% calculated according to the equation: HR=100%?((Tgi?TgoAdvX)/(Tgi?TgoSTD)?1). The method requires either reducing the amount of heat that flows into the air preheater from the flue gas and/or increasing the amount of heat extracted from the flue gas. The method includes mitigating SO.sub.3 in the flue gas which is discharged directly from the air preheater to a particulate removal system and then directly into a flue gas desulfurization system. The method includes extracting heat from the Flue gas to create equipment preheat and/or flue gas stack reheat air with the latter being fed to heat the flue gas prior to entering a discharge stack to raise the temperature of the flue gas to mitigate visible plume exiting and to mitigate corrosion in, the discharge stack.

The invention relates to a method of capturing a sintered product after sintering a waste gas in a semiconductor manufacturing process and its capturing device. The method comprises providing aerosolized water molecules to be entered into a reaction chamber of a waste gas treatment tank; and capturing a product generated after a sintering reaction of the waste gas by diffusion distributing of the aerosolized water molecules, wherein, the aerosolized water molecules are diffusion distributed between a bottom edge of a waste gas reaction end in the reaction chamber and a tank wall surrounding the reaction chamber. The present invention further provides a device for capturing a sintered product for implementing the method. The object of the present invention is to solve problems saying that a semiconductor exhaust gas is processed by a high temperature sintering treatment, the generated SiO.sub.2 powders, the WO.sub.2 powders or the BO.sub.2 powders are extremely fine, the F.sub.2 gas is small molecules, and it is not easy to capture them during a rear stage water washing program.

The invention relates to a method of capturing a sintered product after sintering a waste gas in a semiconductor manufacturing process and its capturing device. The method comprises providing aerosolized water molecules to be entered into a reaction chamber of a waste gas treatment tank; and capturing a product generated after a sintering reaction of the waste gas by diffusion distributing of the aerosolized water molecules, wherein, the aerosolized water molecules are diffusion distributed between a bottom edge of a waste gas reaction end in the reaction chamber and a tank wall surrounding the reaction chamber. The present invention further provides a device for capturing a sintered product for implementing the method. The object of the present invention is to solve problems saying that a semiconductor exhaust gas is processed by a high temperature sintering treatment, the generated SiO.sub.2 powders, the WO.sub.2 powders or the BO.sub.2 powders are extremely fine, the F.sub.2 gas is small molecules, and it is not easy to capture them during a rear stage water washing program.