A guard that receives a processing liquid removed off a substrate, is disposed so as to surround a substrate holding unit and a facing member in plan view. The guard forms, together with the substrate and the facing member having a facing surface facing an upper surface of the substrate, a space isolated from an ambient atmosphere. An inert gas supplying unit supplies an inert gas to the space to replace an atmosphere inside the space by the inert gas. A processing liquid supplying nozzle, which extends from an inner wall of the guard so as to be disposed inside the space in a state where the space is formed, supplies the processing liquid to the upper surface of the substrate.

A centrifugal moisture removal device includes a rotating mechanism and a fixing mechanism. The rotating mechanism includes a rotating bracket and a rotary driving member. The rotating bracket includes two sleeving portions. The fixing mechanism includes two positioning members, two clamping members, and two line driving members. Each clamping member includes a moving staff, an elastic member, and a sensing member. A first end portion of the moving staff passes through a sleeving portion and is mounted on a positioning member. The elastic member is sleeved on the moving staff. A first end portion of the elastic member resists the sleeving portion. A second end portion of the elastic member resists a second end portion of the moving staff. Each line driving member is set above the second end portion of a moving staff. The sensing member senses when the workpiece arrives at the positioning member.

A centrifugal moisture removal device includes a rotating mechanism and a fixing mechanism. The rotating mechanism includes a rotating bracket and a rotary driving member. The rotating bracket includes two sleeving portions. The fixing mechanism includes two positioning members, two clamping members, and two line driving members. Each clamping member includes a moving staff, an elastic member, and a sensing member. A first end portion of the moving staff passes through a sleeving portion and is mounted on a positioning member. The elastic member is sleeved on the moving staff. A first end portion of the elastic member resists the sleeving portion. A second end portion of the elastic member resists a second end portion of the moving staff. Each line driving member is set above the second end portion of a moving staff. The sensing member senses when the workpiece arrives at the positioning member.

A system for drying wet food articles (such as produce) is disclosed herein. The system can comprise a turntable capable of rotating multiple barrel stations. The system can comprise various loading, drying, dumping, and cleaning positions, and the barrel stations can be rotated to each of these positions. The present disclosure also describes various methods for drying wet food articles utilizing such systems.

A system for drying wet food articles (such as produce) is disclosed herein. The system can comprise a turntable capable of rotating multiple barrel stations. The system can comprise various loading, drying, dumping, and cleaning positions, and the barrel stations can be rotated to each of these positions. The present disclosure also describes various methods for drying wet food articles utilizing such systems.

A wafer processing apparatus includes a rotating chuck which is rotatably installed inside a cup housing and on which a substrate is mounted, a nozzle table rotatably installed inside the rotating chuck, a guide installed inside the nozzle table, a moving module movably installed on the guide, a guide arm configured to support a fluid supply line part, a lower nozzle part coupled to the guide arm to move together with the moving module and connected to the fluid supply line part, a driving shaft part connected to the rotating chuck and the nozzle table to rotate the rotating chuck and the nozzle table, a moving shaft rotatably installed inside the driving shaft part and connected to the moving module to move the moving module, and a driver connected to the driving shaft part and the moving shaft.

A wafer processing apparatus includes a rotating chuck which is rotatably installed inside a cup housing and on which a substrate is mounted, a nozzle table rotatably installed inside the rotating chuck, a guide installed inside the nozzle table, a moving module movably installed on the guide, a guide arm configured to support a fluid supply line part, a lower nozzle part coupled to the guide arm to move together with the moving module and connected to the fluid supply line part, a driving shaft part connected to the rotating chuck and the nozzle table to rotate the rotating chuck and the nozzle table, a moving shaft rotatably installed inside the driving shaft part and connected to the moving module to move the moving module, and a driver connected to the driving shaft part and the moving shaft.

A cleaning apparatus, method, and dry chamber are provided for cleaning a wafer carrier that holds wafers as part of a semiconductor fabrication process. The cleaning apparatus includes a wet chamber that receives the wafer carrier to be washed and a reservoir in fluid communication with the wet chamber. The reservoir stores a cleaning liquid that is introduced to the wafer carrier within the wet chamber during a washing operation, and a dry chamber is spaced apart from the wet chamber. The dry chamber receives the wafer carrier after the wafer carrier is washed in the wet chamber and holds the wafer carrier during a drying operation. A transport system transports the wafer carrier between the wet chamber and the dry chamber during a cleaning process.

The invention proposes a spinning device for drying food comprising a container, a cover, an internal rotatable basket, a central drive assembly coupled to the basket for effecting rotation of the basket and including a handle structure linearly reciprocating between a raised position and a lowered position to rotate the basket, wherein the conversion mechanism retained against axial movement, the lid being releasably coupled to the basket and engageably coupled to the handle structure, and a brake assembly for reducing the rotational velocity and/or for stopping the rotation of the basket relative to the container, characterized in that the actuation of the brake assembly is effected by a rotation of the handle structure of the drive mechanism with respect to the cover of the container around the vertical axis (A) of rotation of the device.

The invention proposes a spinning device for drying food comprising a container, a cover, an internal rotatable basket, a central drive assembly coupled to the basket for effecting rotation of the basket and including a handle structure linearly reciprocating between a raised position and a lowered position to rotate the basket, wherein the conversion mechanism retained against axial movement, the lid being releasably coupled to the basket and engageably coupled to the handle structure, and a brake assembly for reducing the rotational velocity and/or for stopping the rotation of the basket relative to the container, characterized in that the actuation of the brake assembly is effected by a rotation of the handle structure of the drive mechanism with respect to the cover of the container around the vertical axis (A) of rotation of the device.