A baking device for a wafer coated with a coating containing a solvent is described, having a baking chamber, a support for the wafer, an inlet for a purge gas, and an evacuation for the purge gas charged with solvent evaporated from the coating. The inlet is formed as a diffusion element arranged above the wafer so as to admit the purge gas evenly over substantially the entire surface of the wafer, and the evacuation is formed as an evacuation ring which radially surrounds the diffusion element and is arranged at a ceiling of the baking chamber.

A baking device for a wafer coated with a coating containing a solvent is described, having a baking chamber, a support for the wafer, an inlet for a purge gas, and an evacuation for the purge gas charged with solvent evaporated from the coating. The inlet is formed as a diffusion element arranged above the wafer so as to admit the purge gas evenly over substantially the entire surface of the wafer, and the evacuation is formed as an evacuation ring which radially surrounds the diffusion element and is arranged at a ceiling of the baking chamber.

A method for producing a metal ingot by using an electron-beam melting furnace including an electron gun capable of controlling a radiation position of an electron beam, and a hearth that accumulates a molten metal of a metal raw material, in which, in a downstream region between an upstream region in which the metal raw material is supplied onto the surface of the molten metal and a first side wall, an irradiation line is disposed so as to block a lip portion and so that two end portions are positioned in the vicinity of the side wall of the hearth. A first electron beam is radiated onto the surface of the molten metal along the irradiation line, and the first electron beam is radiated along the irradiation line. By this means, the surface temperature (T2) of the molten metal along the irradiation line is made higher than the average surface temperature (T0) of the entire surface of the molten metal in the hearth, and a molten metal flow from the irradiation line toward upstream that is a direction toward the opposite side to the first side wall is formed in an outer layer of the molten metal.

[Problem]

To provide a method for producing a metal ingot, which makes it possible to inhibit impurities contained in molten metal in a hearth from being mixed into the ingot.

[Solution]

A method for producing a metal ingot by using an electron-beam melting furnace having an electron gun and a hearth that accumulates a molten metal of a metal raw material, wherein the metal raw material is supplied to the position on a supply line disposed along a second side wall of the hearth that accumulates the molten metal of the metal raw material. A first electron beam is radiated along a first irradiation line that is disposed along the supply line and is closer to a central part of the hearth relative to the supply line on the surface of the molten metal. By this means, a surface temperature (T2) of the molten metal at the first irradiation line is made higher than an average surface temperature (T0) of the entire surface of the molten metal in the hearth, and in an outer layer of the molten metal, a first molten metal flow is formed from the first irradiation line toward the supply line.

Disclosed is a connection structure that connects a housing to a magnetic annealing furnace that is provided with a fixedly arranged magnet and includes a first drum flange having a cylindrical flange portion. The connection structure includes: a second drum flange that is attached and fixed to the housing and includes a flange portion configured to externally or internally fit the flange portion of the first drum flange thereto; a first sealant that is installed between facing surfaces of the housing and the second drum flange; and a second sealant that is installed between facing surfaces of the first and second drum flanges.

Disclosed is a connection structure that connects a housing to a magnetic annealing furnace that is provided with a fixedly arranged magnet and includes a first drum flange having a cylindrical flange portion. The connection structure includes: a second drum flange that is attached and fixed to the housing and includes a flange portion configured to externally or internally fit the flange portion of the first drum flange thereto; a first sealant that is installed between facing surfaces of the housing and the second drum flange; and a second sealant that is installed between facing surfaces of the first and second drum flanges.

Disclosed is a fuming furnace with a lead collecting and discharging function, the fuming furnace comprising a furnace body; the furnace body is provided with a hearth therein and a tuyere thereon; the bottom of the hearth forms a molten pool; the furnace body is further provided with a slag discharging outlet and a lead discharging outlet thereon; the furnace body comprises a furnace bottom water jacket and a hearth water jacket; the furnace bottom water jacket is provided with a refractory brick layer at the inner wall thereof; the refractory brick layer is provided with a lead collecting and discharging channel therein for collecting and discharging lead; the lead collecting and discharging channel is in communication with the lead discharging outlet, and the lead collecting and discharging channel is in communication with the molten pool via joints between the refractory bricks forming the refractory brick layer.

Disclosed is a fuming furnace with a lead collecting and discharging function, the fuming furnace comprising a furnace body; the furnace body is provided with a hearth therein and a tuyere thereon; the bottom of the hearth forms a molten pool; the furnace body is further provided with a slag discharging outlet and a lead discharging outlet thereon; the furnace body comprises a furnace bottom water jacket and a hearth water jacket; the furnace bottom water jacket is provided with a refractory brick layer at the inner wall thereof; the refractory brick layer is provided with a lead collecting and discharging channel therein for collecting and discharging lead; the lead collecting and discharging channel is in communication with the lead discharging outlet, and the lead collecting and discharging channel is in communication with the molten pool via joints between the refractory bricks forming the refractory brick layer.

A molten metal scrap submergence system comprising a furnace and a vortexing scrap submergence well. The vortexing scrap submergence well includes a diverter suspended above the well and oriented for immersion in a bath of molten metal circulating within the well. The system, or an alternative scrap submergence system, can include a hood element disposed in an overlapping position with regard to a top opening of the scrap submergence well. The hood at least substantially seals the top opening. The hood element includes a scrap piece feed chute and a burner allowing carbon containing vapor evaporated from the surface of the molten scrap pieces to combust and form predominantly water. The system, or an alternative scrap submergence system can include internal side walls of the well with a first diameter portion adjacent and above said ramp and a second, larger diameter portion above said first portion.

A molten metal scrap submergence system comprising a furnace and a vortexing scrap submergence well. The vortexing scrap submergence well includes a diverter suspended above the well and oriented for immersion in a bath of molten metal circulating within the well. The system, or an alternative scrap submergence system, can include a hood element disposed in an overlapping position with regard to a top opening of the scrap submergence well. The hood at least substantially seals the top opening. The hood element includes a scrap piece feed chute and a burner allowing carbon containing vapor evaporated from the surface of the molten scrap pieces to combust and form predominantly water. The system, or an alternative scrap submergence system can include internal side walls of the well with a first diameter portion adjacent and above said ramp and a second, larger diameter portion above said first portion.