A heat treatment container for a vacuum heat treatment apparatus according to an exemplary embodiment includes a bottom portion and a sidewall, and a support protruding inward.

Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber body having a passage, through which substrates are transferred, in one side thereof, the chamber body having opened upper and lower portions, an inner reaction tube disposed above the chamber body to provide a process space in which a process with respect to the substrates is performed, the inner reaction tube having an opened lower portion, a substrate holder disposed in the opened lower portion of the chamber to move between a stacking position at which the substrates transferred through the passage are vertically stacked and a process position at which the substrate holder ascends toward the process space to perform the process with respect to the stacked substrates, a blocking plate connected to a lower portion of the substrate holder to ascend or descend together with the substrate holder, the blocking plate closing the opened lower portion of the inner reaction tube at the process position, a connection cylinder vertically disposed on a lower portion of the blocking plate to ascend or descend together with the blocking plate, and a blocking member connected between the opened lower portion of the chamber body and the connection cylinder to isolate the opened lower portion of the chamber body from the outside.

Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber body having a passage, through which substrates are transferred, in one side thereof, the chamber body having opened upper and lower portions, an inner reaction tube disposed above the chamber body to provide a process space in which a process with respect to the substrates is performed, the inner reaction tube having an opened lower portion, a substrate holder disposed in the opened lower portion of the chamber to move between a stacking position at which the substrates transferred through the passage are vertically stacked and a process position at which the substrate holder ascends toward the process space to perform the process with respect to the stacked substrates, a blocking plate connected to a lower portion of the substrate holder to ascend or descend together with the substrate holder, the blocking plate closing the opened lower portion of the inner reaction tube at the process position, a connection cylinder vertically disposed on a lower portion of the blocking plate to ascend or descend together with the blocking plate, and a blocking member connected between the opened lower portion of the chamber body and the connection cylinder to isolate the opened lower portion of the chamber body from the outside.

A vacuum heat insulating container 1 includes an outer tube 2 having a bottom and an inner tube 3 having a bottom and an inner tube 3 having a bottom, the outer tube 2 and the inner tube 3 being arranged in such a way that the central axes thereof being a horizontal direction, an opening end of the outer tube 2 and an opening end of the inner tube 3 being bonded to each other, and a depressurized sealed space 8 being formed between the outer tube 2 and the inner tube 3, in which the vacuum heat insulating container further includes a load receiving part 7 for causing the outer tube 2 to support the inner tube 3, and the location of the load receiving part 7 in a vertical direction coincides with the location of the central axis of the outer tube 2.

A method for heat treating a superalloy component includes heating a superalloy component to a first temperature, cooling the superalloy from the first temperature to a second temperature at a first cooling rate in a furnace, and cooling the superalloy component from the second temperature to a final temperature at a second cooling rate. The second cooling rate is higher than the first cooling rate.

The invention relates to a firing furnace or press furnace for dental restoration parts, having a control device for the control of the furnace on the basis of at least one firing/press program; a display device, at least for displaying operating instructions based on symbolic representations; an input device, at least for selecting a firing/press program; wherein the control device is configured to be able to switch the furnace after selection of a control program to a security mode in which it displays one or several operating instructions and in which the input of firing or press parameters of the control program and/or the selection of a firing or press program is disabled.

The invention relates to a firing furnace or press furnace for dental restoration parts, having a control device for the control of the furnace on the basis of at least one firing/press program; a display device, at least for displaying operating instructions based on symbolic representations; an input device, at least for selecting a firing/press program; wherein the control device is configured to be able to switch the furnace after selection of a control program to a security mode in which it displays one or several operating instructions and in which the input of firing or press parameters of the control program and/or the selection of a firing or press program is disabled.

Embodiments include a heating device for heating a workpiece, including a furnace defining a closed space insulated from an exterior and surrounded by a heat insulator, a heater disposed in the furnace to heat a workpiece, a bar-shaped support element for supporting a workpiece in the furnace, and bases holding longitudinal ends of the support element for mounting the support element on a wall of the furnace, the support element being configured to increase the bending strength against sagging between its longitudinal ends.

A cooling device cools a workpiece using a mist-like coolant and includes a heat transfer coefficient switching device that switches a heat transfer coefficient of the mist-like coolant from a relatively low state to a relatively high state during cooling the workpiece.

A shielding module for a high-temperature furnace has a packet of interconnected shielding plates. The packet of interconnected shielding plates is mounted to a common base body. The base body has fixing points for fixing to base bodies of other shielding modules of the same kind.