A flange for a pump comprises first and second faces and a passageway for cryogenic fluid flow extending from the first face to the second face and at least one of (1) the passageway is for a pipe and comprises a first portion of a first diameter and a second portion of a second diameter greater than the first diameter, wherein when the pipe has an outer diameter that is smaller than the second diameter a gap is formed between the pipe and the passageway where the pipe passes through the second portion; and (2) a first annular groove in one of the first face and the second face and extending around the passageway, wherein the first annular groove in cooperation with the passageway forms a bellows. The gap and bellows increase the thermal resistance between the passageway and the flange, and the bellows allows for flexure during thermal contractions of the flange reducing thermal stress on welded fluid seals.

A flange for a pump comprises first and second faces and a passageway for cryogenic fluid flow extending from the first face to the second face and at least one of (1) the passageway is for a pipe and comprises a first portion of a first diameter and a second portion of a second diameter greater than the first diameter, wherein when the pipe has an outer diameter that is smaller than the second diameter a gap is formed between the pipe and the passageway where the pipe passes through the second portion; and (2) a first annular groove in one of the first face and the second face and extending around the passageway, wherein the first annular groove in cooperation with the passageway forms a bellows. The gap and bellows increase the thermal resistance between the passageway and the flange, and the bellows allows for flexure during thermal contractions of the flange reducing thermal stress on welded fluid seals.

Flange for a vacuum apparatus comprises a housing to be connected to the vacuum apparatus defining an opening wherein the opening has rectangular narrow shape. The flange further comprises a metal seal arranged around the opening to create a vacuum tight seal.

In a cryopump, a primary cryopumping array having adsorbent and cooled by a second refrigerator stage extends along radiation shield sides. That array is shielded by a condensing cryopumping array that extends along the primary cryopumping array. The primary cryopumping array may be a cylinder with adsorbent on an inwardly facing surface, and the condensing cryopumping array may comprise an array of baffles having surfaces facing the frontal opening. A raised surface such as a conical surface at the base of the radiation shield redirects molecules received from the frontal opening toward the primary cryopumping array. The refrigerator cold finger may extend tangentially relative to the radiation shield or connect to the base of the radiation shield.

In a cryopump, a primary cryopumping array having adsorbent and cooled by a second refrigerator stage extends along radiation shield sides. That array is shielded by a condensing cryopumping array that extends along the primary cryopumping array. The primary cryopumping array may be a cylinder with adsorbent on an inwardly facing surface, and the condensing cryopumping array may comprise an array of baffles having surfaces facing the frontal opening. A raised surface such as a conical surface at the base of the radiation shield redirects molecules received from the frontal opening toward the primary cryopumping array. The refrigerator cold finger may extend tangentially relative to the radiation shield or connect to the base of the radiation shield.

Provided is a cryopump including a cryopump vacuum chamber, a cryocooler, a first flange fixed to the cryopump vacuum chamber, a second flange fixed to the cryocooler and airtightly connected to the first flange, and an annular laminated vibration isolation body in which a first annular vibration isolation material, a first annular support member, an intermediate annular vibration isolation material, a second annular support member, and a second annular vibration isolation material are disposed in this order from the first flange toward the second flange. The second annular support member and the first annular support member are fixed to the first flange and the second flange, respectively, such that the first flange and the second annular support member are vibration-isolated from the second flange and the first annular support member.

Provided is a cryopump including a cryopump vacuum chamber, a cryocooler, a first flange fixed to the cryopump vacuum chamber, a second flange fixed to the cryocooler and airtightly connected to the first flange, and an annular laminated vibration isolation body in which a first annular vibration isolation material, a first annular support member, an intermediate annular vibration isolation material, a second annular support member, and a second annular vibration isolation material are disposed in this order from the first flange toward the second flange. The second annular support member and the first annular support member are fixed to the first flange and the second flange, respectively, such that the first flange and the second annular support member are vibration-isolated from the second flange and the first annular support member.

A cryocooler includes a cold head, a plurality of compressor main bodies that are connected to the cold head in parallel, a plurality of state detection sensors that are provided to correspond to the plurality of compressor main bodies respectively and each detect a state of a corresponding compressor main body to output a state detection signal, and a compressor control unit that is configured to, in a case where the state detection signal from any one state detection sensor of the plurality of state detection sensors indicates that the corresponding compressor main body is stopped, stop also the other compressor main bodies.

A cryocooler includes a cold head, a plurality of compressor main bodies that are connected to the cold head in parallel, a plurality of state detection sensors that are provided to correspond to the plurality of compressor main bodies respectively and each detect a state of a corresponding compressor main body to output a state detection signal, and a compressor control unit that is configured to, in a case where the state detection signal from any one state detection sensor of the plurality of state detection sensors indicates that the corresponding compressor main body is stopped, stop also the other compressor main bodies.

A cryopump includes a cryocooler which includes a high-temperature cooling stage and a low-temperature cooling stage, a radiation shield which is thermally coupled to the high-temperature cooling stage and axially extends in a tubular shape from a cryopump intake port, and a low-temperature cryopanel section which is thermally coupled to the low-temperature cooling stage, is surrounded by the radiation shield, and includes a plurality of cryopanels and a plurality of heat transfer bodies axially arranged in columnar shape, and in which the plurality of cryopanels and the plurality of heat transfer bodies are axially stacked.