A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or more purge valves during the unsafe condition. The purge valve can be a cryo-purge valve or exhaust purge valve. The purge valve can be a normally open valve. The electronic controller can release the normally open valve in response to the unsafe condition. The electronic controller can delay its response to the unsafe condition for a safe period of time. Attempts from other systems to control these valves during unsafe conditions can be preempted during unsafe conditions. A user can be inhibited from manually controlling the purge valve during unsafe conditions. A power failure recovery routine may be initiated in response to a restoration of power. The power failure recovery routine can respond to an unsafe condition even if the power failure recovery routine has been manually turned off by a user.

A system and method is provided to control a purge valve during an unsafe condition associated with a cryopump. An electronic controller may be used to control the opening and closing of one or more purge valves during the unsafe condition. The purge valve can be a cryo-purge valve or exhaust purge valve. The purge valve can be a normally open valve. The electronic controller can release the normally open valve in response to the unsafe condition. The electronic controller can delay its response to the unsafe condition for a safe period of time. Attempts from other systems to control these valves during unsafe conditions can be preempted during unsafe conditions. A user can be inhibited from manually controlling the purge valve during unsafe conditions. A power failure recovery routine may be initiated in response to a restoration of power. The power failure recovery routine can respond to an unsafe condition even if the power failure recovery routine has been manually turned off by a user.

A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.

A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.

A cryopump system includes: a plurality of cryopumps; a plurality of compressor units arranged to operate in parallel in accordance with a control output, respectively, to supply refrigerant gas to the plurality of cryopumps; and a cryopump controller operative to determine the control output for each of the plurality of compressor units. The cryopump controller adjusts a preset value for at least one of the compressor units, the preset value being utilized to determine the control output, so that operation statuses of the respective compressor units are substantially equalized.

A cryopump system includes: a plurality of cryopumps; a plurality of compressor units arranged to operate in parallel in accordance with a control output, respectively, to supply refrigerant gas to the plurality of cryopumps; and a cryopump controller operative to determine the control output for each of the plurality of compressor units. The cryopump controller adjusts a preset value for at least one of the compressor units, the preset value being utilized to determine the control output, so that operation statuses of the respective compressor units are substantially equalized.

A cryopump capable of being mounted on a vacuum chamber via a gate valve, the cryopump includes a cryocooler, and a controller configured to detect whether or not the gate valve is closed, and to control the cryocooler such that a cooling capacity of the cryocooler when the gate valve is closed is increased compared to a cooling capacity of the cryocooler when the gate valve is opened.

A cryopump capable of being mounted on a vacuum chamber via a gate valve, the cryopump includes a cryocooler, and a controller configured to detect whether or not the gate valve is closed, and to control the cryocooler such that a cooling capacity of the cryocooler when the gate valve is closed is increased compared to a cooling capacity of the cryocooler when the gate valve is opened.

An installation for pumping cryogenic fluid comprising a fluid tight enclosure designed to contain a bath of cryogenic fluid, the enclosure housing a compression chamber configured to compress the fluid in the compression chamber, the piston being mounted at a first end of a rod. The installation including a drive mechanism driving a second end of the rod in a back and forth movement in a longitudinal direction of travel. In the configuration of operation of the installation, the longitudinal direction of travel of the piston rod being vertical, the motor being fixed rigidly to an upper mounting structure. The mechanical conversion system is also fixed rigidly to an upper mounting structure which comprises the mounting structure for the motor or a separate mounting structure rigidly connected to the mounting structure for the motor.

An installation for pumping cryogenic fluid comprising a fluid tight enclosure designed to contain a bath of cryogenic fluid, the enclosure housing a compression chamber configured to compress the fluid in the compression chamber, the piston being mounted at a first end of a rod. The installation including a drive mechanism driving a second end of the rod in a back and forth movement in a longitudinal direction of travel. In the configuration of operation of the installation, the longitudinal direction of travel of the piston rod being vertical, the motor being fixed rigidly to an upper mounting structure. The mechanical conversion system is also fixed rigidly to an upper mounting structure which comprises the mounting structure for the motor or a separate mounting structure rigidly connected to the mounting structure for the motor.