A cryopump includes a low-temperature cryopanel, a high-temperature cryopanel provided outside the low-temperature cryopanel, and a housing provided outside the high-temperature cryopanel. The high-temperature cryopanel includes an extension panel extending outward. The housing includes an inlet flange surrounding the extension panel.

A cryopump includes a low-temperature cryopanel, a high-temperature cryopanel provided outside the low-temperature cryopanel, and a housing provided outside the high-temperature cryopanel. The high-temperature cryopanel includes an extension panel extending outward. The housing includes an inlet flange surrounding the extension panel.

A cryopump includes: a first-stage cryopanel; a second-stage cryopanel; a cryocooler thermally coupled to the first-stage cryopanel and the second-stage cryopanel to cool the first-stage cryopanel to a first-stage cooling temperature and cool the second-stage cryopanel to a second-stage cooling temperature that is lower than the first-stage cooling temperature; and a cryocooler controller configured to execute first-stage temperature control for controlling the first-stage cooling temperature to a first-stage target temperature and increase the cooling capacity of the cryocooler when an increase in the second-stage cooling temperature is detected during the execution of the first-stage temperature control.

A cryopump includes: a first-stage cryopanel; a second-stage cryopanel; a cryocooler thermally coupled to the first-stage cryopanel and the second-stage cryopanel to cool the first-stage cryopanel to a first-stage cooling temperature and cool the second-stage cryopanel to a second-stage cooling temperature that is lower than the first-stage cooling temperature; and a cryocooler controller configured to execute first-stage temperature control for controlling the first-stage cooling temperature to a first-stage target temperature and increase the cooling capacity of the cryocooler when an increase in the second-stage cooling temperature is detected during the execution of the first-stage temperature control.

A floating coil configuration for a compressor of a closed cycle cryogenic cooler, the coil configuration comprises a coil having a positive end and a negative end and first and second springs concentrically located within the coil, each spring having a first end and a second end. The positive end of the coil is coupled to the first end of the first spring and the negative end of the coil is coupled to the second end of the second spring. The second end of the first spring is electrically coupled to the first end of the second spring such that the first and second springs define an electrical path across the coil.

A header and a pump end for a cryogenic pump are provided for efficient liquid pumping operation. The header directs supplied liquid into a sump and gas into a freeboard. The liquid in the header can be distributed along the header and decanted over a weir to the sump, the liquid being drawn from the sump and up through the vessel to the pump end. Gas in the freeboard is collected for venting or return to the liquid source. Pump head plunger stroke can be lengthened and operated at slower stroke rates using a large cross-sectional area intake and discharge valves. Plunger seals, supported as a seal pack in a sleeve, are field installable over the plunger. A plunger to drive shim arrangement permits filed adjustment of the stroke.

A vacuum system includes at least one cryopump; sensors associated with the cryopump, each of the sensors being configured to sense an operating condition of the cryopump; and diagnostic circuitry configured to receive signals sampled from the sensors. The diagnostic circuitry includes a diagnostic model of the cryopump, the diagnostic model being derived from historical data of a plurality of cryopumps of a same type operating over a plurality of regeneration and servicing time periods and being configured to relate values of the sampled signals from the at least some sensors to a probability of the pump failing within a predetermined time. The diagnostic circuitry is configured to apply the sampled signals to the diagnostic model and to determine the probability of the at least one cryopump failing within a predetermined time from an output of the model.

A vacuum system includes at least one cryopump; sensors associated with the cryopump, each of the sensors being configured to sense an operating condition of the cryopump; and diagnostic circuitry configured to receive signals sampled from the sensors. The diagnostic circuitry includes a diagnostic model of the cryopump, the diagnostic model being derived from historical data of a plurality of cryopumps of a same type operating over a plurality of regeneration and servicing time periods and being configured to relate values of the sampled signals from the at least some sensors to a probability of the pump failing within a predetermined time. The diagnostic circuitry is configured to apply the sampled signals to the diagnostic model and to determine the probability of the at least one cryopump failing within a predetermined time from an output of the model.

A cryopumped gas amount estimation device includes: an ultimate pressure determination unit which determines an ultimate pressure of a cryopump vacuumvessel, based on a vacuummeasurement signal representing the degree of vacuum in the cryopump vacuum vessel; and a cryopumped gas amount quantification unit which includes a cryopumped gas amount quantification relation correlating the ultimate pressure with a cryopumped gas amount estimated value and converts the ultimate pressure into the cryopumped gas amount estimated value.

A cryopumped gas amount estimation device includes: an ultimate pressure determination unit which determines an ultimate pressure of a cryopump vacuumvessel, based on a vacuummeasurement signal representing the degree of vacuum in the cryopump vacuum vessel; and a cryopumped gas amount quantification unit which includes a cryopumped gas amount quantification relation correlating the ultimate pressure with a cryopumped gas amount estimated value and converts the ultimate pressure into the cryopumped gas amount estimated value.