A cryopump includes: a first-stage target temperature selection unit which includes a normal target temperature for a normal mode of maintaining each of a first stage cryopanel and a second stage cryopanel at an extremely low temperature region, and a cool-down target temperature lower than the normal target temperature, for a cool-down mode of cooling each of the first stage cryopanel and the second stage cryopanel from room temperature to the extremely low temperature region, and selects the normal target temperature as a first-stage target temperature in a case where a current operation mode is the normal mode, and at least temporarily selects the cool-down target temperature as the first-stage target temperature in a case where the current operation mode is the cool-down mode; and a first-stage temperature control unit which controls a first-stage cryopanel temperature according to the selected first-stage target temperature.

A cryopump includes: a first-stage target temperature selection unit which includes a normal target temperature for a normal mode of maintaining each of a first stage cryopanel and a second stage cryopanel at an extremely low temperature region, and a cool-down target temperature lower than the normal target temperature, for a cool-down mode of cooling each of the first stage cryopanel and the second stage cryopanel from room temperature to the extremely low temperature region, and selects the normal target temperature as a first-stage target temperature in a case where a current operation mode is the normal mode, and at least temporarily selects the cool-down target temperature as the first-stage target temperature in a case where the current operation mode is the cool-down mode; and a first-stage temperature control unit which controls a first-stage cryopanel temperature according to the selected first-stage target temperature.

A method of regenerating a cryopump includes a first discharging process that includes alternately evacuating a cryopump housing and supplying a purge gas in a first pressure range, and a second discharging process that includes evacuating the cryopump housing to a low pressure region below the first pressure range. The second discharging process includes making a determination at least once in the low pressure range as to whether the second discharging process should be terminated, and supplying the purge gas to the cryopump housing prior to a first-time determination as to whether the second discharging process should be terminated.

A method of regenerating a cryopump includes a first discharging process that includes alternately evacuating a cryopump housing and supplying a purge gas in a first pressure range, and a second discharging process that includes evacuating the cryopump housing to a low pressure region below the first pressure range. The second discharging process includes making a determination at least once in the low pressure range as to whether the second discharging process should be terminated, and supplying the purge gas to the cryopump housing prior to a first-time determination as to whether the second discharging process should be terminated.

A reciprocating cryogenic pump 2 comprises a piston reciprocable within a pumping chamber 44. The pumping chamber 44 has an inlet suction valve 48 for cryogenic liquid to be pumped and an outlet 32 for high pressure cryogenic liquid. The inlet valve 48 for the cryogenic liquid communicates with a cryogenic liquid reception chamber 46 in the cold end or head 6 of the pump 2. The pump head 6 is at least partially surrounded by a first jacket 8 retaining primary vacuum insulation. The first jacket 8 is itself at least partly surrounded by a second jacket 10. The jacket 10 defines a chamber for the reception of a coolant fluid such as liquid nitrogen and the second jacket has an inlet 20 and an outlet 22 for the liquid nitrogen. The thermal insulation can be further enhanced by a trapped gas space 73 between the first jacket 8 and an inner sleeve 52, the latter defining with an outer sleeve 50 vacuum insulation for the pumping chamber 44.

A reciprocating cryogenic pump 2 comprises a piston reciprocable within a pumping chamber 44. The pumping chamber 44 has an inlet suction valve 48 for cryogenic liquid to be pumped and an outlet 32 for high pressure cryogenic liquid. The inlet valve 48 for the cryogenic liquid communicates with a cryogenic liquid reception chamber 46 in the cold end or head 6 of the pump 2. The pump head 6 is at least partially surrounded by a first jacket 8 retaining primary vacuum insulation. The first jacket 8 is itself at least partly surrounded by a second jacket 10. The jacket 10 defines a chamber for the reception of a coolant fluid such as liquid nitrogen and the second jacket has an inlet 20 and an outlet 22 for the liquid nitrogen. The thermal insulation can be further enhanced by a trapped gas space 73 between the first jacket 8 and an inner sleeve 52, the latter defining with an outer sleeve 50 vacuum insulation for the pumping chamber 44.

A compressor controller includes: a control amount calculation unit configured to calculate at least two control amounts including a first control amount for controlling a first control object that relates to a gas amount for cooling a cryogenic apparatus, and a second control amount for controlling a second control object that relates to the refrigerant gas amount and that is different from the first control object, the second control amount being common with the first control amount; and a selection unit configured to select a control object to be controlled from at least two control objects including the first control object and the second control object on the basis of a comparison between the at least two common control amounts.

A compressor controller includes: a control amount calculation unit configured to calculate at least two control amounts including a first control amount for controlling a first control object that relates to a gas amount for cooling a cryogenic apparatus, and a second control amount for controlling a second control object that relates to the refrigerant gas amount and that is different from the first control object, the second control amount being common with the first control amount; and a selection unit configured to select a control object to be controlled from at least two control objects including the first control object and the second control object on the basis of a comparison between the at least two common control amounts.

Systems and methods that facilitate forming and maintaining FRCs with superior stability as well as particle, energy and flux confinement and, more particularly, systems and methods that facilitate forming and maintaining FRCs with elevated system energies and improved sustainment utilizing multi-scaled capture type vacuum pumping.

Systems and methods that facilitate forming and maintaining FRCs with superior stability as well as particle, energy and flux confinement and, more particularly, systems and methods that facilitate forming and maintaining FRCs with elevated system energies and improved sustainment utilizing multi-scaled capture type vacuum pumping.