There is provided a cryopump including a cryocooler, a cryopanel that is cooled by the cryocooler, a cryopump container that includes a container body, which accommodates the cryopanel, and a cryocooler accommodating tube of which one end is coupled to the container body and the other end is fixed to the cryocooler and into which the cryocooler is inserted, a vent valve for exhausting a fluid from the cryopump container, a first exhaust passage that includes a first exhaust port provided in the container body, is disposed outside the cryopump container, and connects the first exhaust port to the vent valve, and a second exhaust passage that includes a second exhaust port provided in the cryocooler accommodating tube, connects the second exhaust port to the vent valve, and merges with the first exhaust passage between the first exhaust port and the vent valve.

A cryopump includes at least one cryopanel including a photocatalyst layer on a surface thereof, and an excitation light source that is disposed so as to irradiate the photocatalyst layer with excitation light that activates the photocatalyst layer.

A cryopump includes at least one cryopanel including a photocatalyst layer on a surface thereof, and an excitation light source that is disposed so as to irradiate the photocatalyst layer with excitation light that activates the photocatalyst layer.

A piston ring set of a cryogenic pump includes a first piston ring and a second piston ring which are dissimilarly shaped and cooperatively shaped to form a hollow cylindrical shape when in abutment to one another. The first piston ring is C-shaped and defines a middle portion disposed between a first end portion and a second end portion. A piston ring gap is disposed between a first distal end of the first end portion and a second distal end of the second end portion. When the first piston ring is in abutment with the second piston ring forming the hollow cylindrical shape, the second piston ring does not extend along the middle portion of the first piston ring while the second piston ring does extend along the first end portion and second end portion of the first piston ring.

A cryopump with a pump inlet; a two stage refrigerator; a first stage array arranged thermally coupled to a first stage of the two stage refrigerator; and a cryopanel structure coupled to a second stage of the two stage refrigerator. Surfaces of the cryopanel structure have portions that are coated portion with an adsorbent material and other portions that are not coated with the adsorbent material.

A cryopump with a pump inlet; a two stage refrigerator; a first stage array arranged thermally coupled to a first stage of the two stage refrigerator; and a cryopanel structure coupled to a second stage of the two stage refrigerator. Surfaces of the cryopanel structure have portions that are coated portion with an adsorbent material and other portions that are not coated with the adsorbent material.

Provided is a cryopump including a cryopump vacuum chamber, a cryocooler, a first flange fixed to the cryopump vacuum chamber, a second flange fixed to the cryocooler and airtightly connected to the first flange, and an annular laminated vibration isolation body in which a first annular vibration isolation material, a first annular support member, an intermediate annular vibration isolation material, a second annular support member, and a second annular vibration isolation material are disposed in this order from the first flange toward the second flange. The second annular support member and the first annular support member are fixed to the first flange and the second flange, respectively, such that the first flange and the second annular support member are vibration-isolated from the second flange and the first annular support member.

Provided is a cryopump including a cryopump vacuum chamber, a cryocooler, a first flange fixed to the cryopump vacuum chamber, a second flange fixed to the cryocooler and airtightly connected to the first flange, and an annular laminated vibration isolation body in which a first annular vibration isolation material, a first annular support member, an intermediate annular vibration isolation material, a second annular support member, and a second annular vibration isolation material are disposed in this order from the first flange toward the second flange. The second annular support member and the first annular support member are fixed to the first flange and the second flange, respectively, such that the first flange and the second annular support member are vibration-isolated from the second flange and the first annular support member.

A device for enriching and purifying a single gas in a mixed gas includes: a pre-purification cold trap for freezing and adsorbing part of non-target gases; an enrichment cold and hot trap, having molecular sieves of different specifications detachably filled therein, a gas inlet thereof connected to a gas outlet of the pre-purification cold trap; a freezing unit for reducing a temperature of the enrichment cold and hot trap; a vacuum acquisition system for enabling the enrichment and purification device to reach a preset vacuum degree and exhausting other unabsorbed non-target gases out of the enrichment cold and hot trap, having a suction connected to a gas outlet of the enrichment cold and hot trap; a heating unit for heating the enrichment cold and hot trap to completely release the absorbed target gas; and a purification outlet connected to the gas outlet of the enrichment cold and hot trap.

A device for enriching and purifying a single gas in a mixed gas includes: a pre-purification cold trap for freezing and adsorbing part of non-target gases; an enrichment cold and hot trap, having molecular sieves of different specifications detachably filled therein, a gas inlet thereof connected to a gas outlet of the pre-purification cold trap; a freezing unit for reducing a temperature of the enrichment cold and hot trap; a vacuum acquisition system for enabling the enrichment and purification device to reach a preset vacuum degree and exhausting other unabsorbed non-target gases out of the enrichment cold and hot trap, having a suction connected to a gas outlet of the enrichment cold and hot trap; a heating unit for heating the enrichment cold and hot trap to completely release the absorbed target gas; and a purification outlet connected to the gas outlet of the enrichment cold and hot trap.