A vacuum pump includes a motor, a pump coupled to the motor to receive torque therefrom, and a trestle including an inlet port, an outlet port, and a fluid pathway therebetween, the outlet port being fluidly connected to the pump. The vacuum pump also includes a first valve positioned within the fluid pathway and adjustable between an open state, in which an airflow induced by the pump is drawn through the inlet port, and a closed state, in which a reverse airflow through the inlet port is prevented, and a second valve positioned within the fluid pathway in series with the first valve and adjustable between an open state, in which the airflow induced by the pump is drawn through the inlet port, and a closed state, in which the reverse airflow through the inlet port is prevented when the motor is deactivated.

Pump module for a vacuum apparatus with a flange which can be connected to a vacuum apparatus in a vacuum-tight manner, at least one ion getter pump and at least one volume getter pump, NEG, where the ion getter pump is directly connected to the flange and the NEG is directly connected to the ion getter pump and where the NEG and the flange are arranged separately from each other.

Pump module for a vacuum apparatus with a flange which can be connected to a vacuum apparatus in a vacuum-tight manner, at least one ion getter pump and at least one volume getter pump, NEG, where the ion getter pump is directly connected to the flange and the NEG is directly connected to the ion getter pump and where the NEG and the flange are arranged separately from each other.

A method for evacuating a process space by initially evacuating the process space to a pressure limit value using two compressors operated in parallel, and on reaching or undershooting the pressure limit value, the process space is subsequently evacuated using the two compressors operated in series.

A method for evacuating a process space by initially evacuating the process space to a pressure limit value using two compressors operated in parallel, and on reaching or undershooting the pressure limit value, the process space is subsequently evacuated using the two compressors operated in series.

Flange for a vacuum apparatus comprises a housing to be connected to the vacuum apparatus defining an opening wherein the opening has rectangular narrow shape. The flange further comprises a metal seal arranged around the opening to create a vacuum tight seal.

Flange for a vacuum apparatus comprises a housing to be connected to the vacuum apparatus defining an opening wherein the opening has rectangular narrow shape. The flange further comprises a metal seal arranged around the opening to create a vacuum tight seal.

Housing for a vacuum pump, in particular a NEG or IGP-NEG combination, comprising a body defining an interior space to accommodate the vacuum pump, wherein a first flange is connected to the housing comprising an opening to connect the vacuum pump to a vessel and a second flange connected to the housing to connect the housing to an additional vacuum pump at least during regeneration. Further, a movable shield element is used movable from a first position to a second position, wherein in the first position the opening of the first flange is unobstructed and in the second position the opening is blocked.

Housing for a vacuum pump, in particular a NEG or IGP-NEG combination, comprising a body defining an interior space to accommodate the vacuum pump, wherein a first flange is connected to the housing comprising an opening to connect the vacuum pump to a vessel and a second flange connected to the housing to connect the housing to an additional vacuum pump at least during regeneration. Further, a movable shield element is used movable from a first position to a second position, wherein in the first position the opening of the first flange is unobstructed and in the second position the opening is blocked.

Provided herein is a mechanical resonant system, comprising a frame; at least one pump disposed on the frame; one or two masses coupled to the frame by a first plurality of resilient members; and at least one voice coil actuator disposed within the frame and coupled to the at least one pump or to the one or two masses; wherein when the system comprises two masses, a second plurality of resilient members couple the masses to each other. Also provided are methods for using these mechanical resonant systems to evacuate a chamber, to compress air, or sense changes in pressure.