A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.

The present invention relates to a pumping system to generate a vacuum (SP), comprising a main vacuum pump which is a claw pump (3) having a gas suction inlet (2) connected to a vacuum chamber (1) and a gas discharge outlet (4) leading into a gas evacuation conduit (5) in the direction of a gas exhaust outlet (8) outside the pumping system. The pumping system comprises a non-return valve (6) positioned between the gas discharge outlet (4) and the gas exhaust outlet (8), and an auxiliary vacuum pump (7) connected in parallel to the non-return valve. In a pumping method by means of this pumping system (SP), the main vacuum pump (3) is started up in order to pump the gases contained in the vacuum chamber (1) and to discharge these gases through its gas discharge outlet (4), simultaneously to which the auxiliary vacuum pump (7) is started up. Moreover the auxiliary vacuum pump (7) continues to pump all the while that the main vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or all the while that the main vacuum pump (3) maintains a defined pressure in the vacuum chamber (1).

The present invention relates to a pumping system to generate a vacuum (SP), comprising a main vacuum pump which is a claw pump (3) having a gas suction inlet (2) connected to a vacuum chamber (1) and a gas discharge outlet (4) leading into a gas evacuation conduit (5) in the direction of a gas exhaust outlet (8) outside the pumping system. The pumping system comprises a non-return valve (6) positioned between the gas discharge outlet (4) and the gas exhaust outlet (8), and an auxiliary vacuum pump (7) connected in parallel to the non-return valve. In a pumping method by means of this pumping system (SP), the main vacuum pump (3) is started up in order to pump the gases contained in the vacuum chamber (1) and to discharge these gases through its gas discharge outlet (4), simultaneously to which the auxiliary vacuum pump (7) is started up. Moreover the auxiliary vacuum pump (7) continues to pump all the while that the main vacuum pump (3) pumps the gases contained in the vacuum chamber (1) and/or all the while that the main vacuum pump (3) maintains a defined pressure in the vacuum chamber (1).

The invention enables quick evacuation of a chamber to a specified target degree of vacuum while increasing selectivity of evacuation conditions. A vacuum-processing device contains a chamber 40 that enables a workpiece to be soldered in a vacuum environment, an operating part 20 that sets a condition for evacuating the chamber 40, a pump 23 that evacuates the chamber 40, and a control portion 61 that calculates the amount of decrease in the degree of vacuum when evacuating the chamber 40 using a predetermined pump output, sets the calculated value as a reference value and switches an evacuation property from the evacuation property including a lower pump output to the evacuation property including a higher pump output when the calculated amount of decrease in degree of vacuum in real time has become smaller than the reference value.

A leak detector for checking the sealing tightness of an object to be tested includes a detection inlet to be connected to the object, a first pumping device, and a gas detector. The first pumping device includes a first rough vacuum pump, at least one second rough vacuum pump, and a turbomolecular pump. The gas detector is connected to the turbomolecular pump. The outlet of the at least one second rough vacuum pump is connected to the first rough vacuum pump, between two in-series pumping stages of the first rough vacuum pump.

A leak detector for checking the sealing tightness of an object to be tested includes a detection inlet to be connected to the object, a first pumping device, and a gas detector. The first pumping device includes a first rough vacuum pump, at least one second rough vacuum pump, and a turbomolecular pump. The gas detector is connected to the turbomolecular pump. The outlet of the at least one second rough vacuum pump is connected to the first rough vacuum pump, between two in-series pumping stages of the first rough vacuum pump.

A method of assigning an identifier to a controller of a modular vacuum pumping and/or abatement system, the method including: determining, by a first controller of the modular vacuum pumping and/or abatement system, that a first identifier is to be assigned to a second controller of the modular vacuum pumping and/or abatement system, wherein the second controller is located at a module of the modular vacuum pumping and/or abatement system; transmitting, by the first controller, a first signal indicative of the first identifier to the second controller; receiving, by a user input device coupled to the module, a user input; and adopting, by the second controller, the first identifier as its identifier in response to the user input.

A method of assigning an identifier to a controller of a modular vacuum pumping and/or abatement system, the method including: determining, by a first controller of the modular vacuum pumping and/or abatement system, that a first identifier is to be assigned to a second controller of the modular vacuum pumping and/or abatement system, wherein the second controller is located at a module of the modular vacuum pumping and/or abatement system; transmitting, by the first controller, a first signal indicative of the first identifier to the second controller; receiving, by a user input device coupled to the module, a user input; and adopting, by the second controller, the first identifier as its identifier in response to the user input.

A cryopump includes: a first-stage cryopanel; a second-stage cryopanel; a cryocooler thermally coupled to the first-stage cryopanel and the second-stage cryopanel to cool the first-stage cryopanel to a first-stage cooling temperature and cool the second-stage cryopanel to a second-stage cooling temperature that is lower than the first-stage cooling temperature; and a cryocooler controller configured to execute first-stage temperature control for controlling the first-stage cooling temperature to a first-stage target temperature and increase the cooling capacity of the cryocooler when an increase in the second-stage cooling temperature is detected during the execution of the first-stage temperature control.

A cryopump includes: a first-stage cryopanel; a second-stage cryopanel; a cryocooler thermally coupled to the first-stage cryopanel and the second-stage cryopanel to cool the first-stage cryopanel to a first-stage cooling temperature and cool the second-stage cryopanel to a second-stage cooling temperature that is lower than the first-stage cooling temperature; and a cryocooler controller configured to execute first-stage temperature control for controlling the first-stage cooling temperature to a first-stage target temperature and increase the cooling capacity of the cryocooler when an increase in the second-stage cooling temperature is detected during the execution of the first-stage temperature control.