A piping structure includes a plurality of pipes that connects a plurality of process modules disposed adjacent to each other at a first room and a plurality of vacuum pumps disposed at a second room below the first room to be corresponding to the plurality of process modules, respectively. The plurality of pipes are divided into a plurality of blocks in a height direction, and the plurality of pipes used for blocks in an identical height have an identical shape.

A compressor includes a shell, a compression mechanism and a fitting. The shell includes an opening and defines a chamber. The compression mechanism is disposed within the chamber of the shell. The fitting is attached to the shell at the opening. Working fluid flowing through the fitting flows to the compression mechanism. The opening is partially defined by a first edge and a second edge. The first edge includes a first planar surface and the second edge includes a second planar surface that faces the first planar surface. A first portion of the fitting extends at least partially into the opening and a second portion of the fitting abuts against the first and second edges.

A fluid control device (111) includes a valve section (12) and a blower section (13). The valve section (12) allows fluid to flow in one direction. The valve section (12) has the shape of a cylindrical container with a valve chamber (40) provided therein. The valve section (12) includes a top plate (21), a side-wall plate (22), a bottom plate (23), and a film (24). A plurality of ejection holes (41) and a plurality of auxiliary holes (49) arranged in a predetermined pattern are formed in a central region of the top plate (21). A plurality of communication holes (43) arranged in a predetermined pattern are formed in a central region of the bottom plate (23). A plurality of film holes (42) arranged in a predetermined pattern are formed in a central region of the film (24).

A direct drive air pump has a motor and a pumping mechanism connected to an end of the motor, and further has an auxiliary pumping mechanism connected to the other end of the motor, and a tube connected with the pumping mechanism and the auxiliary pumping mechanism. In each one of the pumping mechanism and the auxiliary pumping mechanism, a cylindrical body has a top plate having an exhaust hole. A single O-ring is used to seal between the cylindrical body and a cylindrical cover for reducing the sealing portions. A valve block of a non-return valve can co-work with a spring for opening and closing the exhaust hole. The valve block is soft for closing the exhaust hole well and reducing the noise of collision between the valve block and the top plate.

A natural gas compressor can include a pre-staging chamber that couples with a supply line to receive natural gas from the supply line. The compressor can additionally include a first-stage chamber that couples with the supply line to receive natural gas from the supply line. The first-stage chamber can additionally be coupled with the pre-staging chamber to receive from the pre-staging chamber natural gas that has been compressed by the pre-staging chamber. The compressor can also include a second-stage chamber configured to receive natural gas that has been compressed by the first-stage chamber.

A compressor includes a shell assembly and a compression mechanism disposed within the shell assembly. The shell assembly includes first and second end caps. A suction chamber is disposed within the shell assembly between the first end cap and the second end cap. A discharge chamber and oil sump may be disposed within the shell assembly. The shell assembly includes at least one suction opening into the suction chamber. A distributor is in communication with one of the suction openings. Plugs may sealingly engage another one of the suction openings. The distributor includes an inlet path and first and second outlet paths. A suction line is coupled to the inlet path. The suction line includes at least first and second portions. A first plane bisecting the second portion along a length of the second portion is perpendicular to a second plane that bisects the first and second outlet paths.

A linear compressor is provided that may include a shell; a compressor body accommodated in the shell to compress a refrigerant; a discharge cover assembly through which the refrigerant compressed in the compressor body may be discharged; a cover pipe that extends from the discharge cover assembly to discharge the refrigerant discharged into the discharge cover assembly to an outside of the discharge cover assembly; a discharge pipe coupled to the shell to discharge the refrigerant flowing along the cover pipe to an outside of the shell; a loop pipe having a first end connected to the cover pipe and a second end connected to the discharge pipe; and a coupling member that respectively couples both the first and second ends of the loop pipe to the cover pipe and the discharge pipe. The coupling member may include a connection member, a first portion of which is inserted into the loop pipe and a second portion of which is inserted into the discharge pipe or the cover pipe. The connection member may be formed of a steel material. At least one of the discharge pipe or the cover pipe may be formed of a steel material.

A linear compressor is provided. The linear compressor may include a discharge cover including a plurality of covers stacked in an axial direction.

A linear compressor is provided. The linear compressor may include a cylinder including a cylinder body that defines a compression space for a refrigerant and a cylinder flange that extends from the cylinder body in a radial direction; a piston that reciprocates within the cylinder in an axial direction; and a frame coupled to the cylinder. The frame may include a frame body into which the cylinder body may be inserted and a first press-fitting portion press-fitted into the cylinder flange.

A linear compressor is provided. The linear compressor may include a frame coupled to a cylinder, a gas hole defined in the frame, and a gas pocket that communicates with the gas hole and transfers a refrigerant gas to the cylinder.