The motion system for a CMM includes a measuring axis with an air bearing, a control unit for determining a position of the measuring probe in a reference frame and outputting the position as a measuring result. The first air bearing includes a guideway, slide having a slide surface and a gas outlet within the slide surface. The gas outlet is for providing a gas cushion in a gap between the slide surface and the guideway. A cover is arranged around the slide so a gap is provided between the cover and the guideway and a hollow space is provided between the cover and the slide. A wiper is arranged on the cover. A nozzle unit is supplied by a second gas supply line and for providing a high-pressure gas flow directed onto the guideway.

A non-contact air bearing having electrostatic discharge properties may comprise: a porous media element having a bearing surface; a supply line configured supply an externally pressurize gas or fluid to the porous media; and an electrostatic dissipative porous bearing layer on the bearing surface of the porous media element; wherein the externally pressurized fluid flows through the porous media element and creates a thin film between the electrostatic dissipative layer and a substrate supported by the air bearing.

A high precision air bearing stage for wafer inspection and a method of runout errors detecting and compensating. The air bearing stage includes a base block, a crossbeam mounted on the base block, a sliding table configured to carry a compensation stage, a motor and a grating ruler used to drive the sliding table to move along the crossbeam, sensors used for monitoring the position of the sliding table in real time, air-bearing used for supporting the sliding table, and a compensation stage configured to compensate the runout errors of the air bearing stage based on the real-time detecting data from the sensors. The air-bearing includes a first air-bearing, a second air-bearing and a third air-bearing.

A hydrostatic/hydrodynamic fluid bearing assembly for a can bodymaker is provided. The hydrostatic/hydrodynamic fluid bearing assembly is separate from the ram body. The outboard guide bearing assembly includes a carriage assembly and a number of elongated journals. The carriage assembly includes a ram coupling, a crank coupling, and body defining a number of journal passages. The ram body is coupled to a ram coupling. The crank coupling is structured to be coupled to a crank arm. Each journal extends through a carriage assembly body journal passage. In this configuration, the ram body may form a can body in a traditional manner, but fluid bearing assembly fluid is not applied to the ram body. Instead, the fluid bearing assembly fluid is applied to the journals.

A linear compressor includes a cylinder that defines a compression space of a refrigerant and has a cylindrical shape, and a piston disposed in the cylinder and reciprocating along an axis of the cylinder. The cylinder includes a supply port radially passing through the cylinder, and a recess formed on an inner circumferential surface of the cylinder and communicating with the supply port. The supply port includes a first supply port and a second supply port disposed in a rear of the first supply port, and the recess includes a first recess and a second recess disposed in a rear of the first recess. The first recess and the second recess are formed in different shapes.

An object stage bearing system can include an object stage, a hollow shaft coupled to the object stage, and an in-vacuum gas bearing assembly coupled to the hollow shaft and the object stage. The in-vacuum gas bearing assembly can include a gas bearing, a scavenging groove, and a vacuum groove. The gas bearing is disposed along an inner wall of the in-vacuum gas bearing assembly and along an external wall of the hollow shaft. The scavenging groove is disposed along the inner wall such that the scavenging groove is isolated from the gas bearing. The vacuum groove is disposed along the inner wall such that the vacuum groove is isolated from the scavenging groove and the gas bearing.

Methods and systems for determination of warpage in a workpiece supported by a non-contact support platform, including a surface with a plurality of pressure ports and a plurality of fluid evacuation ports on the surface, a supply system with a pressure supply connected to the plurality of pressure ports on the surface and configured to supply pressure at a substantially constant level and cause a fluid to flow out of the plurality of pressure ports, so as to support a workpiece by fluid-bearing formed under the workpiece, and at least one flowmeter, coupled to a controller and configured to measure the flowrate at the surface, wherein the workpiece is determined to be warped when the measured flowrate is outside a predefined flowrate range.

Devices and method include relatively moving elements having one or more bearing surfaces defining a gap between the elements into which a fluid is received. At least one of the bearing surfaces comprises a varying topography to provide pressurized volumes of the fluid in order to define a hydraulic bearing to support at least one of the elements during movement.

Various embodiments of the present technology generally relate to precise rotary motion control systems. More specifically, some embodiments relate to systems, methods, and means for providing pressure to a non-contact rotary system. In some embodiments, the rotary system comprises a rotary shaft that can rotate three hundred and sixty degrees continuously. In order for the rotary system to be entirely non-contact with any surfaces of surrounding components or housing, pressure must be supplied to a rotary air bearing that floats the rotary unit above a surface. In some examples, the bottom air bearing is a vacuum preloaded (VPL) air bearing. As such, the VPL air bearing requires a supply of positive pressure and a supply of negative pressure to stabilize the rotary unit. The present technology provides a mechanism for providing pneumatic air to the air bearing without a physical connection to the rotary shaft or air bearing.

A hydrostatic/hydrodynamic fluid bearing assembly for a can bodymaker is provided. The hydrostatic/hydrodynamic fluid bearing assembly is separate from the ram body. The outboard guide bearing assembly includes a carriage assembly and a number of elongated journals. The carriage assembly includes a ram coupling, a crank coupling, and body defining a number of journal passages. The ram body is coupled to a ram coupling. The crank coupling is structured to be coupled to a crank arm. Each journal extends through a carriage assembly body journal passage. In this configuration, the ram body may form a can body in a traditional manner, but fluid bearing assembly fluid is not applied to the ram body. Instead, the fluid bearing assembly fluid is applied to the journals.