A cantilever linear motion reference device employing two-layer air suspension. By means of a two-layer force sealed air suspension structure, the invention realizes two-dimensional air suspension support and motion guiding and improves the rotational stiffness per unit for an air suspension working surface. By combining accurate driving and feedback control, the invention achieves high speed, high acceleration, high frequency motion, and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

A throttle unit is equipped with a grooved block including at least one minute groove formed on a plane surface, and an opposite block having a plane surface which is opposite to the minute groove. The grooved block and the opposite block are detachably joined so as to be opposite to each other. A throttle fluid path is formed by the minute groove and the plane surface of the opposite block. At least one surface of each of the minute groove is constituted by a curved surface or an inclined surface that is inclined with respect to the plane surface of the grooved block.

In a moving body guiding device which supplies lubricating oil between a guiding surface of a supporting body and a sliding surface of the moving body and guides a moving body, a lubricating oil pocket having a periphery enclosed by a land portion is provided on the sliding surface of the moving body, a closed loop oil groove is formed along the inside of the land portion, a front portion and a rear portion inside the lubricating oil pocket communicate with one another by means of a lubricating oil pocket return passage at least partially opening in the oil groove, and lubricating oil that has accumulated in the rear portion, in a movement direction, concomitant with movement of the moving body, flows to the front portion in the movement direction.

A support table for a lithographic apparatus, a method of loading a substrate, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus. In one arrangement, a support table is configured to support a substrate. The support table has a base surface. The base surface faces a surface of the substrate when the substrate is supported by the support table. One or more gas cushion members are provided above the base surface. Each of the gas cushion members includes a recess. The recess is shaped and configured such that a lowering of the substrate into a position on the support table at which the substrate is supported by the support table causes a localised build-up of pressure within the recess. The localized build-up of pressure provides a localised gas cushioning effect during the lowering of the substrate.

A hydrostatic/hydrodynamic fluid bearing assembly for a can bodymaker is provided. The hydrostatic/hydrodynamic fluid bearing assembly is separate from the ram body. The outboard guide bearing assembly includes a carriage assembly and a number of elongated journals. The carriage assembly includes a ram coupling, a crank coupling, and body defining a number of journal passages. The ram body is coupled to a ram coupling. The crank coupling is structured to be coupled to a crank arm. Each journal extends through a carriage assembly body journal passage. In this configuration, the ram body may form a can body in a traditional manner, but fluid bearing assembly fluid is not applied to the ram body. Instead, the fluid bearing assembly fluid is applied to the journals.

An air suspension support and motion guiding device having unequal-depth throttling chambers. Throttling plugs (10) are arranged regularly on an air suspension working surface, forming an array of throttling chambers with unequal depths. The invention improves the rotational stiffness per unit area for an air suspension working surface while ensuring support and stability of an air-suspended rail (1) and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

A cantilever linear motion reference device employing two-layer air suspension. By means of a two-layer force sealed air suspension structure, the invention realizes two-dimensional air suspension support and motion guiding and improves the rotational stiffness per unit for an air suspension working surface. By combining accurate driving and feedback control, the invention achieves high speed, high acceleration, high frequency motion, and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Various embodiments of the present technology generally relate to precise rotary motion control systems. More specifically, some embodiments relate to systems, methods, and means for providing pressure to a non-contact rotary system. In some embodiments, the rotary system comprises a rotary shaft that can rotate three hundred and sixty degrees continuously. In order for the rotary system to be entirely non-contact with any surfaces of surrounding components or housing, pressure must be supplied to a rotary air bearing that floats the rotary unit above a surface. In some examples, the bottom air bearing is a vacuum preloaded (VPL) air bearing. As such, the VPL air bearing requires a supply of positive pressure and a supply of negative pressure to stabilize the rotary unit. The present technology provides a mechanism for providing pneumatic air to the air bearing without a physical connection to the rotary shaft or air bearing.

A dual membrane restrictor adapted to be connected to an oil supplying device, a loading device, and a recycling device is provided. The dual membrane restrictor includes a casing and first and second membranes. The casing has a first channel connected to the oil supplying device, first and second chambers, a second channel connected to the loading device, and a third channel connected to the recycling device. The first membrane is disposed in the first chamber divided into first upper and lower chambers by the first membrane. The first channel is connected to the first upper chamber. The second membrane is disposed in the second chamber divided into second upper and lower chambers by the second membrane. The second upper chamber is connected to the first lower chamber and the second channel. The second lower chamber is connected to the second channel and the third channel.

A vibration isolation system including a support, a forward actuator and a return device. The support is for supporting the body on a base. The support has a body engaging surface and a base engaging surface. The base engaging surface is arranged to couple to the base. The support couples the body engaging surface to the body in a coupled state. The support uncouples the body engaging surface from the body in an uncoupled state. The forward actuator moves the body and the body engaging surface together relatively to the base in a first direction from a first initial position to an end position in the coupled state. The return device is configured to move the body engaging surface relatively to the body opposite to the first direction from the end position to a second initial position in the uncoupled state.