To provide a flow rate regulating valve capable of detecting a state where a flow path is fully closed even when there is no lead wire or the like for detecting the state where the flow path is fully closed. A flow rate regulating valve is a fluid regulating valve including a valve body for opening and closing fluid flow paths provided in a body and includes an actuator unit for moving the valve body, and the actuator unit includes a drive motor, a slider moved by a rotation of the motor, a cylindrical body mounted on the slider, and a shaft interlocked with the cylindrical body and provided with the valve body fixed to a distal end thereof. The motor is a stepping servomotor, and has a pressing control function for moving the valve body in the closing direction at a continuous rated torque.

A sealing device configured for use in a vacuum chamber between a reaction region of the vacuum chamber and an exhaust port includes a ring-shaped body with an upper surface and a lower surface. A distance between the upper surface and the lower surface of the sealing device is a thickness of the ring-shaped body. The thickness of the ring-shaped body differs along a circumference of the ring-shaped body such that the ring-shaped body has a wedge shape. The thickness of the ring-shaped body, around its circumference is dependent upon a structure of the exhaust port.

A sealing device configured for use in a vacuum chamber between a reaction region of the vacuum chamber and an exhaust port includes a ring-shaped body with an upper surface and a lower surface. A distance between the upper surface and the lower surface of the sealing device is a thickness of the ring-shaped body. The thickness of the ring-shaped body differs along a circumference of the ring-shaped body such that the ring-shaped body has a wedge shape. The thickness of the ring-shaped body, around its circumference is dependent upon a structure of the exhaust port.

The invention relates to a control valve for adjusting a process fluid flow of a process plant, comprising a valve housing with a valve seat and a valve member connected to a valve rod, which cooperates with the valve seat for opening and closing the control valve, wherein the valve rod is electrically connected to the valve housing through a contact device. The invention is characterized in that a measuring device for the ohmic transition resistance measurement of the contact device is provided, and that the measuring device is arranged in a measuring line that connects the valve housing to the valve rod.

The invention relates to a control valve for adjusting a process fluid flow of a process plant, comprising a valve housing with a valve seat and a valve member connected to a valve rod, which cooperates with the valve seat for opening and closing the control valve, wherein the valve rod is electrically connected to the valve housing through a contact device. The invention is characterized in that a measuring device for the ohmic transition resistance measurement of the contact device is provided, and that the measuring device is arranged in a measuring line that connects the valve housing to the valve rod.

An electronic expansion valve includes the valve needle screw assembly which also includes an outer edge guide section, the electronic expansion valve includes an inner edge guide section matched with the outer edge guide section, in the process of the action of the valve needle of the electronic expansion valve, the outer edge guide section of the valve needle screw assembly is matched with the inner edge guide section of the electronic expansion valve, to provide the guide for the valve needle, relatively reducing the deviation of the valve needle relative to the valve port, thereby reducing the eccentric wear of the valve needle.

A sealing device configured for use in a vacuum chamber between a reaction region of the vacuum chamber and an exhaust port includes a ring-shaped body with an upper surface and a lower surface. A distance between the upper surface and the lower surface of the sealing device is a thickness of the ring-shaped body. The thickness of the ring-shaped body differs along a circumference of the ring-shaped body such that the ring-shaped body has a wedge shape. The thickness of the ring-shaped body, around its circumference is dependent upon a structure of the exhaust port.

A sealing device configured for use in a vacuum chamber between a reaction region of the vacuum chamber and an exhaust port includes a ring-shaped body with an upper surface and a lower surface. A distance between the upper surface and the lower surface of the sealing device is a thickness of the ring-shaped body. The thickness of the ring-shaped body differs along a circumference of the ring-shaped body such that the ring-shaped body has a wedge shape. The thickness of the ring-shaped body, around its circumference is dependent upon a structure of the exhaust port.

A fluid control valve includes a housing body, a valve member, and a cap. The housing body includes a pipe part and a valve housing part. The valve housing part includes a valve opening, a pair of flat surfaces and an open end. In addition, the valve housing part houses the valve member configured to open and close the valve opening. The valve housing part has a central axis oriented perpendicular to a central axis of the pipe part. The cap closes the open end of the valve housing part. The flat surfaces are formed on opposite sides of a plane including the central axis of the valve housing part and the central axis of the pipe part. Each of the flat surfaces extend perpendicularly to the central axis of the valve housing.

A fluid control valve includes a housing body, a valve member, and a cap. The housing body includes a pipe part and a valve housing part. The valve housing part includes a valve opening, a pair of flat surfaces and an open end. In addition, the valve housing part houses the valve member configured to open and close the valve opening. The valve housing part has a central axis oriented perpendicular to a central axis of the pipe part. The cap closes the open end of the valve housing part. The flat surfaces are formed on opposite sides of a plane including the central axis of the valve housing part and the central axis of the pipe part. Each of the flat surfaces extend perpendicularly to the central axis of the valve housing.