Disclosed is a vacuum valve having at least one acoustic sensor, the acoustic sensor being designed such that information can be generated by the acoustic sensor via a structure-borne sound wave, as a measuring signal, impacting on at least one component of the vacuum valve.

A valve system having a vacuum valve and a regulating unit is disclosed. The vacuum valve has a valve seat including a valve opening, a first seal surface, and a valve closure for closing the valve opening using a second seal surface. A drive unit coupled to the valve closure is designed to be adjusted to provide respective valve opening states. The regulating unit adjusts the valve opening state by actuating the drive unit based on a currently determined regulating variable and a target variable. The regulating unit has a checking function configured such that a series of states of the valve closure are detected as park of the regulating process, and the states are stored as current regulating data. The current regulating data is compared with specified target regulating data and process information is generated based on the comparison of the current and the target regulating data.

The present invention relates to a vacuum valve, and more particularly, to a vacuum valve including a valve housing with a blade, a main shaft, a vertical moving part, a horizontal moving part, a horizontal moving unit, and a main body bracket. Opening and closing guide holes are obliquely formed in both side surfaces such that cam rollers, having passed through the vertical moving guide grooves, are inserted into the grooves so as to guide the fore and aft movement of the blade according to the vertical movement of the horizontal moving unit.

A gate valve 1 includes: a plate 2 having an opening portion 9; a plate 3 located opposite to the plate 2; a guide space 5 formed between the plates 2, 3; and a plate 6 provided in the space 5. The plate 6 is slidable along a direction in which an opening portion 11 is offset from the opening portion 9 in the space 5 in a state in which the plate 6 is pressed by the pressing portion 13 and separated from the plate 2, and a position of the plate 6 is fixed with respect to the plate 2 in the space 5 in a state in which the plate 6 is pressed by the pressing portion 16 and is in contact with the plate 2. The pressing portions 13, 16 each have a bellows structure formed by diffusion-bonding metal plates 18 and 19 to each other.

A seal support ring (1) for a valve (2), particularly a vacuum valve, which has a throughflow opening (3) and a basic body (4), which annularly surrounds the throughflow opening, and a fastener arrangement (5) for fastening the seal support ring to a valve housing (6) of the valve. The basic body has a first side (7) on which the seal support ring, in a mounted state on the valve housing, lies against the valve housing, and the seal support ring has a seal ring (8) made from an elastomer which, in its position on the basic body, surrounds the throughflow opening. A casing wall (9) is arranged on the basic body and at least partially surrounds the throughflow opening and, on a second side (10) of the basic body (4) opposite the first side, protrudes from the basic body and has a larger inside diameter than the seal ring.

A valve for controlling the flow of a solid material from an opening includes a gate having a first face adjacent the opening, a second face opposite the first, and an orifice. A support is disposed adjacent the second face of the gate and is configured so that the gate can move relative to the support from a first position permitting the material to flow from the opening through the orifice and a second position preventing the material from flowing through the opening. The support is movable in a direction substantially orthogonal to the first direction so that the distance from the first face to the opening can be varied.

A valve (1), preferably a vacuum valve, is provided including at least one closure element (2), at least one valve seat (3), and at least one drive unit (4). The closure element (2) is pressed against the valve seat (3) in a closed position and is raised from the valve seat (3) in a raised position, and the closure element can be moved by a drive unit (4) in a closing direction (5) from the raised position into the closed position, in particular in a linear closing direction. The closure element (2) is mounted on a support body (6) of the drive unit (4) in a movable manner in at least one direction (7) orthogonally or transversely to the closing direction (5) in order to align the closure element (2) when pressing against the valve seat (3).

Particle scattering is suppressed only by controlling the gate valve in opening the gate valve with the internal pressure of the chamber being matched to the atmospheric pressure. A method of controlling a gate valve is characterized in that, in a gate valve that presses its valve body to an opening of a chamber by detecting a torque of a motor that drives the valve body, the method comprises the following steps: acquiring in advance a local maximum of the torque at the time of decompressing the inside of the chamber with the valve body closed under the atmospheric pressure, detecting the torque when a vent gas is being introduced into the chamber before returning the inside of the chamber to the atmospheric pressure for opening the valve body, opening the valve body when the torque exceeds the local maximum of the torque so that a clearance is created between the valve body and the opening of the chamber, and opening fully the valve body after the particles are discharged together with the gas inside the chamber.

Disclosed is a valve for regulating a volume or mass flow and/or for closing and opening a valve opening, having a valve seat, a valve closure and a drive unit which is coupled to the valve closure and is set up to provide a movement of the valve closure in such a way that the valve closure can be adjusted from an open position to a closed position and back. The vacuum valve includes a radio arrangement having at least one coupling element and a memory element, and information relating to a valve state can be provided by means of the memory element.